Manufacturing method of semiconductor device
A manufacturing method of a semiconductor device includes the following steps. Firstly, a lower electrode is formed over a substrate (semiconductor substrate). Successively, the lower electrode is primarily crystallized. Successively, a capacitance dielectric layer is formed over the lower electrode after primarily crystallized. Successively, the capacitance dielectric layer is secondarily crystallized. Then, an upper electrode is formed over the capacitance dielectric layer.
1. A manufacturing method of a semiconductor device comprising:
forming a lower electrode over a substrate by repeatedly alternating deposition of one of a plurality of layers constituting the lower electrode with application of a primary crystallization treatment to the deposited layer;
forming a capacitance dielectric layer over said lower electrode;
secondarily crystallizing said capacitance dielectric layer;
forming an upper electrode over said capacitance dielectric layer;
forming an interlayer dielectric layer over said substrate; and
forming a recess in said interlayer dielectric layer,
wherein said forming said lower electrode includes at least forming said lower electrode over the bottom and the sidewall of said recess, and
the aspect ratio of said recess is 3 or more.
2. The manufacturing method according to claim 1 , wherein said secondarily crystallizing includes heating said capacitance dielectric layer under a temperature condition of 380° C. to 400° C. in a non-oxidizing atmosphere.
3. The manufacturing method according to claim 1 , wherein said primary crystallization treatment includes bringing a nitrogen radical into contact with the deposited layer of said lower electrode.
4. The manufacturing method according to claim 1 , wherein the thickness of said capacitance dielectric layer is 7 nm or less.
5. The manufacturing method according to claim 1 , wherein the relative permittivity of said capacitance dielectric layer is 20 to 50.
6. The manufacturing method according to claim 1 , wherein said capacitance dielectric layer includes at least one kind selected from the group consisting of ZrO 2 , HfO 2 , Ta 2 O 3 , and a substance produced by adding Ti, Al, Y, or lanthanoid to one of those.
7. The manufacturing method according to claim 1 , wherein said forming the lower electrode is performed using a remote plasma atomic layer deposition (ALD) apparatus.