IP Library Granted Patent US 10,761,043
Granted Patent B2
US 10,761,043 · App. 13/553,853 · Granted Sep 1, 2020

Graphene-based nanopore and nanostructure devices and methods for macromolecular analysis

Inventors: Marija Drndic (Philadelphia, PA); Ken Healy (Cambridge, MA); Meni Wanunu (Chestnut Hill, MA); Christopher Ali Merchant (Baltimore, MD); Matthew Puster (Philadelphia, PA); Kimberly Elizabeth Venta (Philadelphia, PA)
Assignee: The Trustees of the University of Pennsylvania
G01N27/26G01N33/48721Y10T156/10Y10T156/1056Y10T436/143333
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Quick Facts
Patent No.
US 10,761,043
App. No.
13/553,853
Granted
Sep 1, 2020
Kind
B2
Abstract

Provided are graphene-based nanopore and nanostructure devices, which devices may include an insulating layer disposed atop the graphene, which can be in a planar shape or nanostructured into a ribbon or other shapes, containing a single graphene layer or several layers. Graphene layers and nanostructures can be placed nearby horizontally or stacked vertically. Also provided are related methods of fabricating and processing such devices and also methods of using such devices in macromolecular analysis.

Claims (29)

1. A device, comprising:

a first graphene sheet being characterized as having a bowtie profile and having a narrowed region that defines a width in a direction,

the narrowed region bridging first and second regions of the first graphene sheet, each of the first and second regions defining a width in the direction that is greater than the width of the narrowed region in the direction, the narrowed region having a thickness and further comprising at least one pore extending through the thickness of the narrowed region, the pore being contained within the narrowed region,

the pore characterized by a cross-sectional dimension in the range of from about 0.1 nm to about 100 nm,

the cross-sectional dimension of the pore being less than the width of the narrowed region; and

a membrane contacting the first graphene sheet,

the membrane having an aperture in register with the pore of the first graphene sheet.

2. The device of claim 1 , wherein the graphene sheet has an area of less than about 31400 nm2.

3. The device of claim 1 , further comprising a graphene ribbon contacting the first graphene sheet.

4. The device of claim 1 , further comprising a second graphene sheet, the first and second graphene sheets at least partially overlapping one another.

5. The device of claim 1 , wherein the aperture has a cross-sectional dimension in the range of from about 10 nm to about 30 nm.

6. The device of claim 5 , wherein the pore has a cross-sectional dimension in the range of from about 1 nm to about 10 nm.

7. The device of claim 6 , wherein the cross-sectional dimension of the aperture differs from the cross-sectional dimension of the pore by less than about 5 nm.

8. The device of claim 1 , wherein the first graphene sheet has a cross-sectional dimension that is larger than a cross-sectional dimension of the aperture by less than about 20 nm.

9. The device of claim 1 , wherein the first graphene sheet has a cross-sectional dimension that is larger than a cross-sectional dimension of the aperture by less than about 10 nm.

10. The device of claim 1 , wherein the first graphene sheet comprises from 1 to about 50 layers of graphene.

11. The device of claim 1 , wherein the membrane comprises silicon nitride, silicon oxide, boron nitride, aluminum oxide, hafnium oxide, borosilicate glass, quartz, or any combination thereof.

12. The device of claim 1 , further comprising a voltage source capable of applying a voltage across the pore of the first graphene sheet.

13. The device of claim 1 , further comprising a current amplifier capable of measuring the ionic current flowing through the pore in the first graphene sheet.

14. The device of claim 1 , further comprising a voltage sensor capable of measuring the voltage on the first graphene sheet.

15. The device of claim 1 , further comprising a first amount of an insulating material surmounting at least a portion of the first graphene sheet, through which insulating material the pore of the first graphene sheet extends.

16. The device of claim 15 , wherein the insulating material has a thickness in the range of from about 0.1 nm to about 100 nm.

17. The device of claim 15 , wherein at least a portion of an interior wall of the pore of the graphene sheet is surmounted by the insulating material.

18. The device of claim 15 , wherein the insulating material is disposed between the first graphene sheet and a second graphene sheet, the second graphene sheet comprising a pore at least partially in register with the pore of the first graphene sheet.

19. The device of claim 4 , wherein the first and second graphene sheets are characterized as being ribbons.

20. The device of claim 19 , wherein the ribbons overlap one another.

21. The device of claim 20 , wherein the ribbons are characterized as being crossed.

22. The device of claim 1 , wherein at least a portion of the graphene sheet comprises graphene annealed by application of an electric current, graphene annealed by application of thermal annealing, graphene that has been exposed to a plasma, graphene that has been exposed to ozone, or any combination thereof.

23. The device of claim 1 , wherein the graphene sheet has a resistivity in the range of from about 1 k-ohms to about 2 M-ohms.

Assignments (3)
CONFIRMATORY LICENSE Recorded Nov 14, 2012
From: UNIVERSITY OF PENNSYLVANIA
To: NATIONAL INSTITUTES OF HEALTH (NIH), U.S. DEPT. OF HEALTH AND HUMAN SERVICES (DHHS), U.S. GOVERNMENT
Reel/Frame 029296/0083 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 31, 2012
From: DRNDIC, MARIJA
To: THE TRUSTEES OF THE UNIVERSITY OF PENNSYLVANIA
Reel/Frame 029214/0969 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 31, 2012
From: HEALY, KEN; WANUNU, MENI; MERCHANT, CHRISTOPHER ALI; PUSTER, MATTHEW; VENTA, KIMBERLY ELIZABETH
To: THE TRUSTEES OF THE UNIVERSITY OF PENNSYLVANIA
Reel/Frame 029215/0030 →
Continuity (2)
Provisional Application 61510650 · Jul 22, 2011
Related Publication 20130309776A1 · Nov 21, 2013