Manufacturing method of device

1. A manufacturing method of a device comprising:

sequentially forming a first sacrificial film, a first support film, a second sacrificial film, and a second support film on a semiconductor substrate;

forming a hole to pass through the second support film, the second sacrificial film, the first support film, and the first sacrificial film;

forming a crown-shaped electrode covering an inner surface of the hole and connected to the second support film and the first support film;

forming a first opening in the second support film into a first pattern which is designed such that a connection between the crown-shaped electrode and the second support film is at least partially maintained;

removing at least a part of the second sacrificial film through the first opening;

forming a second opening in the first support film with use of the first opening; and

removing the first sacrificial film through the second opening.

2. The manufacturing method of a device according to claim 1 , wherein the formation of the second opening is performed by anisotropic dry etching.

3. The manufacturing method of a device according to claim 2 , wherein the formation of the first opening, the partial removal of the second sacrificial film, and the formation of the second opening are carried out successively by a single dry etching step.

4. The manufacturing method of a device according to claim 2 , wherein after the formation of the first opening, the second sacrificial film is totally removed by solution etching, and then the formation of the second opening is performed by dry etching through the first opening.

5. The manufacturing method of a device according to claim 2 , wherein:

a third support film and a third sacrificial film are sequentially formed after the formation of the second sacrificial film and before the formation of the second support film; and

formation of a third opening in the third support film with use of the first opening is performed in the same process as the formation of the second opening in the first support film.

6. The manufacturing method of a device according to claim 1 , wherein the first pattern is designed such that an area of a remaining part of the second support film after the formation of the first opening is greater than an area of the first opening.

7. The manufacturing method of a semiconductor device according to claim 6 , wherein the first pattern has an oblong shape with rounded corners that is arranged such that a part of the crown-shaped electrode is located on the inner circumferential side while the remaining part is located on the outer circumferential side.

8. The manufacturing method of a device according to claim 7 , wherein a plurality of the crown-shaped electrodes correspond to the first opening.

9. The manufacturing method of a device according to claim 1 , wherein the first sacrificial film and the second sacrificial film are made of a silicon oxide film, and the first support film and the second support film are made of a silicon nitride film.

10. The manufacturing method of a device according to claim 1 , wherein a cylinder interlayer film is formed on the second support film before the formation of the hole.

11. The manufacturing method of a device according to claim 1 , wherein the formation of the second opening is performed such that connection between the crown-shaped electrode and the first support film is at least partially maintained.

12. A manufacturing method of a device comprising:

stacking alternately a plurality of sacrificial films and a plurality of support films;

forming a crown-shaped electrode which passes through the plurality of sacrificial film layers and the plurality of support film layers and is connected to the plurality of support film layers;

forming a first opening in an uppermost layer of the plurality of support film layers, into a first pattern which is designed such that the connection with the crown-shaped electrode is at least partially maintained;

forming a corresponding opening corresponding to the first opening in each of the plurality of support film layers except for the upper most layer with use of the first opening such that the connection with the crown-shaped electrode is at least partially maintained for all of the plurality of support film layers except for the upper most layer; and

removing the plurality of sacrificial films through the first opening and the corresponding opening.