Metallization of fluorocarbon-based dielectric for interconnects
View Patent ↗Embodiments of the present disclosure are directed towards metallization of a fluorocarbon-based dielectric material for interconnect applications. In one embodiment, an apparatus includes a semiconductor substrate, a device layer disposed on the semiconductor substrate, the device layer including one or more transistor devices, and an interconnect layer disposed on the device layer, the interconnect layer comprising a fluorocarbon-based dielectric material, where x represents a stoichiometric quantity of fluorine relative to carbon in the dielectric material, and one or more interconnect structures configured to route electrical signals to or from the one or more transistor devices, the one or more interconnect structures comprising cobalt (Co), or ruthenium (Ru), or combinations thereof. Other embodiments may be described and/or claimed.
1. An apparatus comprising:
a semiconductor substrate;
a device layer disposed on the semiconductor substrate, the device layer including one or more transistor devices; and
an interconnect layer disposed on the device layer, the interconnect layer comprising
a fluorocarbon-based dielectric material, and
one or more interconnect structures configured to route electrical signals to or from the one or more transistor devices, the one or more interconnect structures comprising cobalt (Co), or ruthenium (Ru), or combinations thereof, wherein an individual interconnect structure of the one or more interconnect structures comprises:
a bulk portion comprising copper (Cu); and
a barrier liner disposed between the bulk portion and the fluorocarbon-based dielectric material, the barrier liner comprising the Co, or the Ru, or combinations thereof, wherein the barrier liner comprises titanium nitride (TiN) doped with the Co, or the Ru, or combinations thereof.
2. The apparatus of claim 1 , wherein the one or more interconnect structures include trench structures or via structures.
3. The apparatus of claim 2 , wherein the interconnect layer is directly coupled with the device layer.
4. The apparatus of claim 2 , wherein the interconnect layer further comprises an isolation film comprising another dielectric material that has a chemical composition that is different than the fluorocarbon-based dielectric material, wherein the isolation film is disposed between the fluorocarbon-based dielectric material and the device layer.
5. The apparatus of claim 2 , wherein the apparatus is a laptop, a netbook, a notebook, an ultrabook, a smartphone, a tablet, a personal digital assistant (PDA), an ultra mobile PC, a mobile phone, a desktop computer, a server, a printer, a scanner, a monitor, a set-top box, an entertainment control unit, a digital camera, a portable music player, or a digital video recorder.
6. The apparatus of claim 1 , wherein the interconnect layer is directly coupled with the device layer.
7. The apparatus of claim 6 , wherein the interconnect layer further comprises an isolation film comprising another dielectric material that has a chemical composition that is different than the fluorocarbon-based dielectric material, wherein the isolation film is disposed between the fluorocarbon-based dielectric material and the device layer.
8. The apparatus of claim 6 , wherein the apparatus is a laptop, a netbook, a notebook, an ultrabook, a smartphone, a tablet, a personal digital assistant (PDA), an ultra mobile PC, a mobile phone, a desktop computer, a server, a printer, a scanner, a monitor, a set-top box, an entertainment control unit, a digital camera, a portable music player, or a digital video recorder.
9. The apparatus of claim 1 , wherein the interconnect layer further comprises an isolation film comprising another dielectric material that has a chemical composition that is different than the fluorocarbon-based dielectric material, wherein the isolation film is disposed between the fluorocarbon-based dielectric material and the device layer.
10. The apparatus of claim 9 , wherein the apparatus is a laptop, a netbook, a notebook, an ultrabook, a smartphone, a tablet, a personal digital assistant (PDA), an ultra mobile PC, a mobile phone, a desktop computer, a server, a printer, a scanner, a monitor, a set-top box, an entertainment control unit, a digital camera, a portable music player, or a digital video recorder.
11. The apparatus of claim 1 , wherein the apparatus is a laptop, a netbook, a notebook, an ultrabook, a smartphone, a tablet, a personal digital assistant (PDA), an ultra mobile PC, a mobile phone, a desktop computer, a server, a printer, a scanner, a monitor, a set-top box, an entertainment control unit, a digital camera, a portable music player, or a digital video recorder.