Isolation for nanowire devices
View Patent ↗The present disclosure relates to the field of fabricating microelectronic devices. In at least one embodiment, the present disclosure relates to forming an isolated nanowire, wherein isolation structure adjacent the nanowire provides a substantially level surface for the formation of microelectronic structures thereon.
1. A method of forming a nanowire isolation structure, comprising:
forming at least one germanium nanowire, comprising
patterning a mask on a substrate;
etching the substrate to form at least one recess and at least one fin, each fin having a top surface and two opposing sides;
removing the patterned mask;
depositing the dielectric material over the recess and the fin;
recessing the dielectric material to expose a portion of at least one side of the fin;
forming a germanium alloy cladding on the exposed sides and the top surface of the fin; and
oxidizing and annealing the germanium alloy cladding;
forming a dielectric material adjacent to the germanium nanowire, wherein forming the dielectric material includes forming at least one divot channel in the dielectric material;
forming a protective layer over the dielectric material and the nanowire;
depositing a filler dielectric material over the protective layer; and
removing a portion of the filler dielectric material to expose a portion of the protective layer and to leave a portion of the filler dielectric material within the divot channel.
2. The method of claim 1 wherein removing the portion of the filler dielectric material to expose a portion of the protective layer and leave a portion of the filler dielectric within the divot channel comprises removing the portion of the filler dielectric material to expose a portion of the protective layer and leave a portion of the filler dielectric within the divot channel which is substantially planar to the protective layer.
3. The method of claim 1 wherein forming the protective layer over the dielectric material and the nanowire comprises forming a high-K dielectric protective layer over the dielectric material and the nanowire.
4. The method of claim 1 wherein forming the protective layer over the dielectric material and the nanowire comprises forming a silicon nitride protective layer over the dielectric material and the nanowire.
5. The method of claim 1 wherein forming as least one germanium nanowire comprises forming at least one germanium nanowire having a germanium content of between about 50 and 100%.
6. The method of claim 1 wherein patterning a mask on a substrate comprises patterning a mask on a silicon-containing substrate.
7. The method of claim 1 wherein forming the germanium alloy cladding comprises forming a silicon germanium alloy cladding.
8. A method of forming a nanowire isolation structure, comprising:
forming at least one nanowire;
forming a dielectric material adjacent to the nanowire, wherein forming the dielectric material includes forming at least one divot channel in the dielectric material;
wherein forming the at least one nanowire and forming the dielectric material adjacent the nanowire comprises:
forming at least one recess and at least one fin in a silicon-containing substrate, each fin having a top surface and two opposing sides;
depositing the dielectric material over the recesses and fins;
recessing the dielectric material to expose a portion of the sides of each fin;
forming an alloy cladding on the exposed sides and the top surface of each fin;
converting the alloy cladding into a nanowire and an oxide shell substantially surrounding each nanowire;
depositing a second dielectric material over the nanowire and dielectric material; and
removing the second dielectric material and the oxide shells;
forming a protective layer over the dielectric material and the nanowire;
depositing a filler dielectric material over the protective layer; and
removing a portion of the filler dielectric material to expose a portion of the protective layer and to leave a portion of the filler dielectric material within the divot channel.
9. The method of claim 8 wherein removing the portion of the filler dielectric material to expose a portion of the protective layer and leave a portion of the filler dielectric within the divot channel comprises removing the portion of the filler dielectric material to expose a portion of the protective layer and leave a portion of the filler dielectric within the divot channel which is substantially planar to the protective layer.
10. The method of claim 8 wherein forming the protective layer over the dielectric material and the nanowire comprises forming a high-K dielectric protective layer over the dielectric material and the nanowire.
11. The method of claim 8 wherein forming the protective layer over the dielectric material and the nanowire comprises forming a silicon nitride protective layer over the dielectric material and the nanowire.
12. The method of claim 8 wherein forming the alloy cladding comprises forming a germanium alloy cladding.
13. The method of claim 12 wherein forming the germanium alloy cladding comprises forming a silicon germanium alloy cladding.
14. The method of claim 8 wherein forming at least one nanowire comprises forming at least one germanium nanowire.
15. The method of claim 14 wherein forming as least one germanium nanowire comprises forming at least one germanium nanowire having a germanium content of between about 50 and 100%.