Semiconductor integrated circuit with metal gate
A method of fabricating a semiconductor integrated circuit (IC) is disclosed. The method includes providing a semiconductor substrate and forming a gate trench therein. The method also includes filling in the gate trench partially with a work-function (WF) metal stack, and filling in the remaining gate trench with a dummy-filling-material (DFM) over the WF metal stack. A sub-gate trench is formed by etching-back the WF metal stack in the gate trench, and is filled with an insulator cap to form an isolation region in the gate trench. The DFM is fully removed to from a MG-center trench (MGCT) in the gate trench, which is filled with a fill metal.
1. A method for fabricating a semiconductor integrated circuit (IC), the method comprising:
providing a semiconductor substrate having a gate trench;
partially filling in the gate trench with a work-function (WF) metal stack;
filling in the remaining gate trench with a dummy-filling-material (DFM) over the WF metal stack;
forming a sub-gate-trench in the gate trench while retaining the DFM;
filling the sub-gate-trench with an insulator capping layer to form an isolation region in the gate trench;
fully removing the DFM to form a MG-center trench (MGCT) in the center of gate trench; and
filling in the MGCT with a fill metal.
2. The method of claim 1 , wherein the semiconductor substrate includes:
an interfacial layer (IL) on the semiconductor substrate;
a high-k (HK) dielectric layer over the IL; and
a sidewall spacer as the sidewall of the gate trench.
3. The method of claim 1 , wherein the sub-gate-trench is formed by an etching process having a etch selectivity respective to the DFM, wherein the DFM remain at least partially intact during the etching process.
4. The method of claim 3 , wherein the etching process removes a portion of WF metal stack to form the sub-gate-trench with a self-align characteristic.
5. The method of claim 1 , wherein the DFM includes dielectric materials.
6. The method of claim 1 , wherein the sub-gate-trench is formed by recessing the WF metal stack and the HK dielectric layer.
7. The method of claim 1 , wherein the sub-gate-trench is formed by recessing the WF metal stack, the HK dielectric layer and the sidewall spacer.
8. The method of claim 1 , wherein a depth (d) of the sub-gate-trench is controlled to achieve a predetermined target of a device performance.
9. The method of claim 1 , further comprising:
after filling in the sub-gate-trench with the insulator capping layer, applying a chemical mechanical polishing (CMP) to remove excessive portions of the insulator capping layer to expose a top surface of the DFM.
10. The method of claim 1 , wherein the insulator capping layer includes materials having a substantial different etch rate than the DFM.
11. The method of claim 10 , wherein the DFM is removed by an etch-back process having an etch selectivity with respect to the insulator capping layer.
12. The method of claim 1 , further comprising:
after filling in the MGCT with the fill metal, applying a CMP to remove excessive fill metal to achieve a predetermined fill metal height (h).
13. A semiconductor integrated circuit (IC), the IC comprising:
a semiconductor substrate;
a gate dielectric stack formed on the semiconductor substrate;
a metal gate (MG) stack formed over the gate dielectric stack; wherein the MG stack has a center region surrounded by an edge region;
a fill metal formed in an upper portion of the center region of the MG stack;
an isolation region formed in the upper portion of edge region of the MG stack; and
a work-function (WF) metal stack formed in lower portions of both the center and edge regions of the MG stack.
14. The IC of claim 13 , wherein the gate dielectric stack includes:
an interfacial layer (IL) disposed on the semiconductor substrate; and
a high-k (HK) dielectric layer disposed over the IL.
15. The IC of claim 13 , further comprising:
a sidewall spacer on the MG stack and the gate dielectric stack.
16. A method for fabricating a semiconductor integrated circuit (IC), the method comprising:
providing a semiconductor substrate;
forming a dummy gate on the semiconductor substrate;
forming a sidewall spacer on the dummy gate;
removing the dummy gate to form a gate trench;
filling in the gate trench partially with a work-function (WF) metal stack;
filling in the remaining gate trench with a dummy-filling-material (DFM) over the WF metal stack;
forming a sub-gate-trench with a predetermined depth (d) around the DFM in the gate trench;
filling in the sub-gate-trench with an insulator capping layer to form an isolation region in the gate trench;
after the isolation region formation, fully removing the DFM from the gate trench to form a MG-center trench (MGCT) in the gate trench;
filling in the MGCT with a fill metal; and
etching-back the fill metal to a predetermined metal height (h).
17. The method of claim 16 , wherein the DFM includes materials having a substantially different etch rate than the material of the WF metal stack.
18. The method of claim 17 , wherein the DFM remains fairly intact during the formation of the sub-gate-trench.
19. The method of claim 16 , wherein the isolation region is formed by a material having a substantially different etch rate than the DFM.
20. The method of claim 19 , wherein the isolation region remains intact during the DFM removal.