Thick-film paste containing lead-vanadium-based oxide and its use in the manufacture of semiconductor devices

1. A process comprising:

(a) providing an article comprising one or more insulating films disposed onto at least one surface of a semiconductor substrate;

(b)(e) applying a thick-film paste composition onto the one or more insulating films to form a layered structure, the thick-film paste composition comprising:

i) 80-99.5 wt % of a source of electrically conductive metal;

ii) 0.5 to 20 wt % of a lead-vanadium-based oxide; and

iii) an organic medium,

 wherein the source of electrically conductive metal and the lead-vanadium-based oxide are dispersed in the organic medium and wherein the above wt % are based on the total weight of the source of electrically conductive metal and the lead-vanadium-based oxide, the lead-vanadium-based oxide comprising 52-80 wt % PbO, 10-45 wt % V 2 O 5 and one or more additional oxides with a liquidus temperature of 900° C. or less, said one or more additional oxides comprising at least one oxide selected from the group consisting of 4-18 wt % Bi 2 O 3 , 0.5-8 wt % 1-3 wt % and 0.5-6 wt % TeO 2 , wherein said oxide wt % are based on the total weight of the lead-vanadium-based oxide; and

(c) firing the semiconductor substrate, the one or more insulating films, and the thick-film paste wherein the organic medium of the thick film paste is volatilized, thereby forming an electrode in contact with the one or more insulating layers and in electrical contact with the semiconductor substrate.

2. The process of claim 1 , the lead-vanadium-based oxide further comprising one or more of 0.1-2 wt % Li 2 O0, 0.1-4 wt % TiO 2 , 0.1-5 wt % Fe 2 O 3 and 0.1-5 wt % Cr 2 O 3 , wherein said wt % is based on the total weight of the lead-vanadium-based oxide.

3. The process of claim 1 , the lead-vanadium-based oxide comprising 55-63 wt % PbO, 18-30 wt % V 2 O 5 and 5-11 wt % of the additional oxide Bi 2 O 3 , wherein said wt % are based on the total weight of the lead-vanadium-based oxide.

4. The process of claim 3 , the lead-vanadium-based oxide further comprising one or more additional oxides selected from the group consisting of 0, 8-7 wt % P 2 O 5 , 1.5-1.9 wt % B 2 O 3 , and 1-6 wt % TeO 2 , wherein said wt % are based on the total weight of the lead-vanadium-based oxide.

5. The process of claim 4 , the lead-vanadium-based oxide further comprising one or more of 0.2-1.1 wt % Li 2 O, 0.5-2 wt % TiO 2 , 0.1-5 wt % Fe 2 O 3 and 0.1-5 wt % Cr 2 O 3 , wherein said wt % is based on the total weight of the lead-vanadium-based oxide.

6. A semiconductor device comprising an electrode formed from a thick-film paste composition comprising:

i) 80-99.5 wt % of a source of electrically conductive metal;

ii) 0.5 to 20 wt % of a lead-vanadium-based oxide; and

iii) an organic medium,

wherein the source of electrically conductive metal and the lead-vanadium-based oxide are dispersed in the organic medium and wherein the above wt % are based on the total weight of the source of electrically conductive metal and the lead-vanadium-based oxide, the lead-vanadium-based oxide comprising 52-80 wt % PbO, 10-45 wt % V 2 O 5 and one or more additional oxides with a liquid us temperature of 900° C. or less, said one or more additional oxides comprising at least one oxide selected from the group consisting of 4-18 wt % BiO 3 , 0.5-8 wt % P 2 O 5 , 1-3 wt % B 2 O 3 , and 0.5-6 wt % TeO 2 , wherein said oxide wt % are based on the total weight of the lead-vanadium-based oxide and wherein said thick film paste composition has been fired to remove the organic medium and form said electrode.

7. The semiconductor device of claim 6 , the lead-vanadium-based oxide further comprising one or more of 0.1-2 wt % Li 2 O, 0.1-4 wt % TiO 2 , 0.1-5 wt % Fe 2 O 3 and 0.1-5 wt % Cr 2 O 3 , wherein said wt % is based on the total weight of the lead-vanadium-based oxide.

8. The semiconductor device of claim 6 , the lead-vanadium-based oxide comprising 55-63 wt % PbO, 18-30 wt % V 2 O 5 and 5-11 wt % of additional oxide Bi 2 O 3 , wherein the said wt % are based on the total weight of the lead-vanadium-based oxide.

9. The semiconductor device of claim 8 , the lead-vanadium-based oxide further comprising one or more additional oxides selected from the group consisting of 0.8-7 wt % P 2 O 5 , 1.5-1.9 wt % B 2 O 3 , and 1-6 wt % wherein said wt % are based on the total weight of the lead-vanadium-based oxide.

10. The semiconductor device of claim 9 , the lead-vanadium-based oxide further comprising one or more of TeO 2 , 0.2-1.1 wt % Li 2 O, 0.5-2 wt % TiO 2 , 0.1-5 wt % Fe 2 O 3 and 0.1-5 wt % Cr 2 O 3 , wherein said wt % is based on the total weight of the lead-vanadium-based oxide.

11. A thick-film paste composition comprising:

a) 80-99.5 wt % of a source of electrically conductive metal;

b) 0.5 to 20 wt % of a lead-vanadium-based oxide; and

c) an organic medium;

wherein the source of electrically conductive metal and the lead-vanadium-based oxide are dispersed in the organic medium and wherein the above wt % are based on the total weight of the source of electrically conductive metal and the lead-vanadium-based oxide, the lead-vanadium-based oxide comprising 52-80 wt % PbO, 10-45 wt % V 2 O 5 and one or more additional oxides with a liquidus temperature of 900° C. or less, said one or more additional oxides comprising at least one oxide selected from the group consisting of 4-18 wt % Bi 2 O 3 , 0.5-8 wt % P 2 O 5 , 1-3 wt % B 2 O 3 , and 0.5-6 wt % TeO 2 , wherein said oxide wt % are based on the total weight of the lead-vanadium-based oxide.

12. The thick-film paste composition of claim 11 , the lead-vanadium-based oxide further comprising one or more of 0.1-2 wt % Li 2 O, 0.1-4 wt % TiO 2 , 0.1-5 wt % Fe 2 O 3 and 0.1-5 wt % Cr 2 O 3 , wherein said oxide wt % is based on the total weight of the lead-vanadium-based oxide.

13. The thick-film paste composition of claim 11 , the lead-vanadium-based oxide comprising 55-63 wt % PbO, 18-30 wt % V 2 O 5 and 5-11 wt % of the additional oxide Bi 2 O 3 , wherein said wt % are based on the total weight of the lead-vanadium-based oxide.

14. The thick-film paste composition of claim 13 , the lead-vanadium-based oxide further comprising one or more additional oxides selected from the group consisting of 0.8-7 wt % P 2 O 3 , 1.5-1.9 wt % B 2 O 3 , and 1-6 wt % TeO 2 , wherein said wt % are based on the total weight of the lead-vanadium-based oxide.

15. The thick-film paste composition of claim 14 , the lead-vanadium-based oxide further comprising one or more of 0.2-1.1 wt % Li 2 O, 0.5-2 wt % TiO 2 , 0.1-5 wt % Fe 2 O 3 and 0.1-5 wt % Cr 2 O 3 , wherein said wt % is based on the total weight of the lead-vanadium-based oxide.

16. The thick-film paste composition of claim 1 , wherein the electrically conductive metal is selected from the group consisting of Ag, Cu, Au, Pd, Pt, Sn, Al and Ni.

17. A lead-vanadium-based oxide comprising 52-80 wt % PhO, 10-45 wt % V 2 O 5 and one or more additional oxides with a liquidus temperature of 900° C. or less, said one or more additional oxides comprising at least one oxide selected from the group consisting of 4.18 wt % Bi 2 O 3 , 0.5-8 wt % P 2 O 5 , 1-3 wt % B 2 O 3 , and 0.5-6 wt % TeO 2 , wherein said oxide wt % are based on the total weight of the lead-vanadium-based oxide.

18. The lead-vanadium-based oxide of claim 17 , the lead-vanadium-based oxide further comprising one or more of 0.1-2 wt % Li 2 O, 0.1-4 wt % TiO 2 , 0.1-5 wt % Fe 2 O 3 and 0.1-5 wt % Cr 2 O 3 , wherein said wt % is based on the total weight of the lead-vanadium-based oxide.

19. The lead-vanadium-based oxide of claim 17 , the lead-vanadium-based oxide comprising 55-63 wt % PbO, 18-30 wt % V 2 O 5 and 5-11 wt % of the additional oxide Bi 2 O 3 , wherein said wt % are based on the total weight of the lead-vanadium-based oxide.

20. The lead-vanadium-based oxide of claim 1 , the lead-vanadium-based oxide further comprising one or more additional oxides selected from the group consisting of 0.8-7 wt % P 2 O 3 , 1.5-1.9 wt % B 2 O 3 , and 1-6 wt % TeO 2 , wherein said wt % are based on the total weight of the lead-vanadium-based oxide.

21. The lead-vanadium-based oxide of claim 20 , the lead-vanadium-based oxide further comprising one or more of 0.2-1.1 wt % 0.5-2 wt % TiO 2 , 0.1-5 wt % Fe 2 O 3 and 0.1-5 wt % Cr 2 O 3 , wherein said wt % is based on the total weight of the lead-vanadium-based oxide.