Mask and method for fabricating semiconductor device
A photo mask for exposing according to an embodiment includes a mark pattern arranged in a mark region that is different from an effective region to form a semiconductor device; and a regular pattern arranged in the mark region and around the mark pattern and smaller than the mark pattern in size and pitch.
1. A photo mask for exposing comprising:
a mark pattern arranged in a mark region that is different from an effective region to form a semiconductor device; and
a regular pattern arranged in the mark region and around the mark pattern and smaller than the mark pattern in size and pitch,
wherein the mark pattern includes an auxiliary pattern smaller in size than the regular pattern arranged in the mark region.
2. The photo mask according to claim 1 , wherein the regular pattern is a line and space pattern.
3. The photo mask according to claim 2 , wherein a circuit line and space pattern for forming the semiconductor device is formed in the effective region, and
the regular pattern arranged around the mark pattern is a line and space pattern formed in substantially the same size and pitch as the circuit line and space pattern for the circuit.
4. The photo mask according to claim 2 , wherein the auxiliary pattern is formed in the mark pattern.
5. The photo mask according to claim 4 , wherein the auxiliary pattern is formed in a width less than a resolution limit of a exposure light.
6. The photo mask according to claim 4 , wherein a line pattern is used as the mark pattern and a space pattern is formed as the auxiliary pattern.
7. The photo mask according to claim 6 , wherein the auxiliary pattern is formed so as to be connected to a space portion of the line and space pattern arranged as the regular pattern around the mark pattern.
8. The photo mask according to claim 4 , wherein a space pattern is used as the mark pattern and a line pattern is formed as the auxiliary pattern.
9. The photo mask according to claim 8 , wherein the auxiliary pattern is formed so as to be connected to a line portion of the line and space pattern arranged as the regular pattern around the mark pattern.
10. The photo mask according to claim 2 , wherein the line and space pattern arranged around the mark pattern is formed in such a width that half a size of a dimension of a pattern corresponding to the line and space pattern formed on a substrate by exposing and transferring the line and space pattern becomes less than a resolution limit of a exposure light.
11. The photo mask according to claim 10 , wherein the mark pattern is formed in such a width that a size after subtracting half the size of the dimension of the pattern corresponding to the line and space pattern from a dimension of a pattern corresponding to the mark pattern formed on the substrate by exposing and transferring the mark pattern becomes equal to the resolution limit of the exposure light or more.
12. The photo mask according to claim 2 , wherein the line and space pattern arranged around the mark pattern is formed in such a width that half a size of a dimension of a pattern corresponding to the line and space pattern formed on a substrate by exposing and transferring the line and space pattern becomes less than a resolution limit of a measuring light for pattern measurement.
13. The photo mask according to claim 12 , wherein the mark pattern is formed in such a width that a size after subtracting half the size of the dimension of the pattern corresponding to the line and space pattern from a dimension of a pattern corresponding to the mark pattern formed on the substrate by exposing and transferring the mark pattern becomes equal to the resolution limit of the a measuring light for pattern measurement or more.