IP Library Granted Patent US 8,890,277
Granted Patent B2
US 8,890,277 · App. 13/577,964 · Granted Nov 18, 2014

Graphite and/or graphene semiconductor devices

Inventors: Arthur Foster Hebard (Gainesville, FL); Sefaattin Tongay (Albany, CA)
Assignee: University of Florida Research Foundation Inc.
H01L29/47H01L29/1608H01L29/1606H01L29/2003H01L29/475H01L29/812H01L29/7786H01L29/872
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Quick Facts
Patent No.
US 8,890,277
App. No.
13/577,964
Granted
Nov 18, 2014
Kind
B2
Abstract

Various embodiments are provided for graphite and/or graphene based semiconductor devices. In one embodiment, a semiconductor device includes a semiconductor layer and a semimetal stack. In another embodiment, the semiconductor device includes a semiconductor layer and a zero gap semiconductor layer. The semimetal stack/zero gap semiconductor layer is formed on the semiconductor layer, which forms a Schottky barrier. In another embodiment, a semiconductor device includes first and second semiconductor layers and a semimetal stack. In another embodiment, a semiconductor device includes first and second semiconductor layers and a zero gap semiconductor layer. The first semiconductor layer includes a first semiconducting material and the second semi conductor layer includes a second semiconducting material formed on the first semiconductor layer. The semimetal stack/zero gap semiconductor layer is formed on the second semiconductor layer, which forms a Schottky barrier.

Claims (28)

1. A Schottky diode comprising:

a semiconductor layer including a semiconducting material;

a semimetal stack including a graphene layer, wherein the semimetal stack is formed on the semiconductor layer, and the semiconductor layer and the semimetal stack form a Schottky barrier; and

an ohmic contact layer in contact with the semiconductor layer and not in contact with the semimetal stack.

2. The Schottky diode of claim 1 , wherein the Schottky barrier formed by the semiconductor layer and the semimetal stack has a height in a range of about 0.54 eV to about 1.04 eV.

3. The Schottky diode of claim 1 , wherein the semimetal stack is doped.

4. The Schottky diode of claim 3 , wherein the semimetal stack includes intercalated impurity atoms.

5. The Schottky diode of claim 3 , wherein the semimetal stack includes intercalated bromine atoms.

6. The Schottky diode of claim 1 , wherein the semimetal stack further includes a graphite layer comprising a plurality of graphene sub-layers.

7. The Schottky diode of claim 1 , wherein the semimetal stack further includes a “few layer” graphene layer.

8. The Schottky diode of claim 1 , wherein the semiconductor layer includes at least one of the following semiconducting materials: SiC or GaN.

9. The Schottky diode of claim 1 , wherein the semimetal stack comprises a plurality of layers including the graphene layer.

10. The Schottky diode of claim 1 , wherein the ohmic contact layer is disposed on a side of the semiconductor layer opposite the semimetal stack.

11. The Schottky diode of claim 1 , wherein the ohmic contact layer and the semimetal stack are disposed on a common side of the semiconductor layer.

12. The Schottky diode of claim 11 , wherein the ohmic contact layer partially encircles the semimetal stack.

13. The Schottky diode of claim 1 , further comprising a second ohmic contact layer disposed on a side of the semimetal stack opposite the semiconductor layer.

14. The Schottky diode of claim 4 , wherein the impurity atoms comprises at least one of rubidium, cesium, SbCl 5 , SO 3 , or SbF 5 .

15. The Schottky diode of claim 6 , wherein the graphite layer comprises a highly oriented pyrolytic graphite.

16. A Schottky diode comprising:

a semiconductor layer including a semiconducting material; and

a semimetal stack including a graphene layer, wherein the semimetal stack is formed on the semiconductor layer, and the semiconductor layer and the semimetal stack form a Schottky barrier, wherein the semimetal stack is doped with Gold (III) Chloride (AuCl 3 ) or Bis(trifluoromethanesulfonyl)amine.

17. The Schottky diode of claim 16 , wherein the semimetal stack only includes a single graphene layer of a single atomic layer of graphite.

18. A Schottky comprising:

a semiconductor layer including a semiconducting material; and

a semimetal stack including a graphene layer, wherein the semimetal stack is formed on the semiconductor layer, and the semiconductor layer and the semimetal stack form a Schottky barrier; and

a “few layer” graphene layer comprising unaligned graphene sub-layers, each graphene sub-layer comprising a single atomic layer of graphite.

19. The Schottky diode of claim 18 , wherein the semimetal stack is doped.

20. The Schottky diode of claim 18 , further comprising an ohmic contact layer in contact with the semiconductor layer and not in contact with the semimetal stack.

Assignments (2)
CONFIRMATORY LICENSE Recorded Nov 18, 2015
From: UNIVERSITY OF FLORIDA
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 037128/0737 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 9, 2012
From: HEBARD, ARTHUR FOSTER; TONGAY, SEFAATTIN
To: UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.
Reel/Frame 028756/0206 →
Continuity (2)
Provisional Application 61314127 · Mar 15, 2010
Related Publication 20130001516A1 · Jan 3, 2013