Semiconductor device
View Patent ↗A semiconductor device includes a first semiconductor region of a first conductivity type and formed of a material having a band gap wider than that of silicon; a first layer selectively disposed on a surface of and forming a first junction with the first semiconductor region; a second layer selectively disposed on the first semiconductor region and forming a second junction with the first semiconductor region; a first diode formed by a region including the first junction; a second diode formed by a region including the second junction; and a fourth semiconductor region of a second conductivity type and disposed in the first semiconductor region, between and contacting the first and second junctions. A recess and elevated portion are disposed on the first semiconductor region. The first and the second junctions are formed at different depths. The second diode has a lower built-in potential than the first diode.
1. A semiconductor device comprising:
a first semiconductor region of a first conductivity type and formed of a material having a band gap wider than a band gap of silicon;
a first layer selectively disposed on a surface of the first semiconductor region and forming a first junction with the first semiconductor region;
a second layer selectively disposed on the surface of the first semiconductor region and forming a second junction with the first semiconductor region;
a first diode formed by a region that includes the first junction;
a second diode formed by a region that includes the second junction;
an electrode film is formed over the first layer and the second layer, the electrode film is electrically connected to the first diode and the second diode; and
a fourth semiconductor region of a second conductivity type and disposed in a surface of the first semiconductor region, between the first junction and the second junction, contacting the first junction and the second junction, wherein
a recess and an elevated portion that protrudes more than a bottom aspect of the recess are disposed on the surface of the first semiconductor region,
the first junction and the second junction are formed at different depths from the surface of the first semiconductor region, and
a built-in potential of the second diode is lower than a built-in potential of the first diode.
2. The semiconductor device according to claim 1 , wherein
the first layer is disposed on a surface of the elevated portion,
the second layer is disposed on the bottom aspect of the recess, and
a depth of the first junction formed on the elevated portion from the surface of the elevated portion is shallower than a depth of the recess.
3. The semiconductor device according to claim 2 , wherein
an end of the first junction is exposed at a side of the elevated portion.
4. The semiconductor device according to claim 1 , wherein
a thickness of the second layer is thinner than a thickness of the first layer.
5. The semiconductor device according to claim 1 , wherein
the first layer is a second semiconductor region of a second conductivity type,
the second layer is a third semiconductor region of the second conductivity type, and
the third semiconductor region is thinner than the second semiconductor region and has an impurity concentration that is lower than an impurity concentration of the second semiconductor region.
6. The semiconductor device according to claim 5 , wherein
the second semiconductor region is an epitaxial layer selectively disposed on the surface of the first semiconductor region, and
the elevated portion is formed by the second semiconductor region.
7. The semiconductor device according to claim 5 , wherein
the first diode and the second diode are pn-junction diodes.
8. The semiconductor device according to claim 1 , wherein
the first layer is a second semiconductor region of a second conductivity type, and
the second layer is a metal film that forms a Schottky barrier with the first semiconductor region.
9. The semiconductor device according to claim 8 , wherein
the second semiconductor region is an epitaxial layer selectively disposed on the surface of the first semiconductor region, and
the elevated portion is formed by the second semiconductor region.
10. The semiconductor device according to claim 8 , wherein
the first diode is a pn-junction diode, and
the second diode is a Schottky barrier diode.
11. The semiconductor device according to claim 5 , wherein
the elevated portion has a tapered shape, and
the fourth semiconductor region is disposed in a surface layer on a side of the recess, between the first junction and the second junction and has an impurity concentration that is lower than an impurity concentration of the second semiconductor region.
12. The semiconductor device according to claim 5 , wherein
the recess is a trench formed in a surface that is of the first semiconductor region and where the second semiconductor region to be disposed, and
the fourth semiconductor region is disposed in a surface layer of a side wall of the trench, between the first junction and the second junction and has an impurity concentration that is lower than an impurity concentration of the second semiconductor region.
13. The semiconductor device according to claim 5 , wherein
a fifth semiconductor region of a second conductivity type has an impurity concentration that is lower than an impurity concentration of the second semiconductor region and is disposed in a surface layer of a bottom aspect of the recess, and
the second junction formed on the bottom aspect of the recess is divided by the fifth semiconductor region.
14. The semiconductor device according to claim 5 , wherein
the third semiconductor region is a region that is formed by ion implantation.
15. The semiconductor device according to claim 8 , wherein
the metal film is an alloy film that is formed by vapor-depositing a metal, followed by thermal treatment.
16. The semiconductor device according to claim 1 , wherein
the first semiconductor region is disposed on a semiconductor substrate that is of the first conductivity type and is formed of a material having a band gap wider than a band gap of silicon,
a sixth semiconductor region that is thinner than the semiconductor substrate and has an impurity concentration that is higher than an impurity concentration of the semiconductor substrate is disposed inside the first semiconductor region, parallel to a surface of the semiconductor substrate, and
the sixth semiconductor region is disposed deeper toward the semiconductor substrate than an intermediate depth in the first semiconductor region.
17. The semiconductor device according to claim 5 , wherein
the semiconductor device has a stripe-like planar layout formed by alternately and repeatedly disposing the first junction and the second junction,
the first junction and the second junction are disposed in a stripe-like pattern,
an end of the second junction is exposed at an outermost peripheral portion in a direction perpendicular to a longitudinal direction of the stripe,
an end of the first junction and an end of the second junction are alternately exposed at an outermost peripheral portion in a direction parallel to the longitudinal direction of the stripe, and
a field limiting layer disposed in the outermost peripheral portion and encompassing the first junction and the second junction contacts the end of the first junction and the end of the second junction that are exposed at the outermost peripheral portion.
18. A semiconductor device according to claim 1 , wherein:
the fourth semiconductor region contacting a bottom surface of the first layer and a bottom surface of the second layer.