Inspection apparatus, substrate mounting device and inspection method
View Patent ↗Non-contact type displacement sensors which measure the height of a substrate surface are installed above the substrate in order to hold the upper surface of the substrate at a desired height or to maintain the flatness of the substrate. A substrate mounting device is such that a plurality of grooves and of barriers are provided on the upper surface of a table and air is supplied between the substrate and the table to enable the pressure of air to displace the substrate. In addition, the substrate mounting device has such a structure as to make it possible to deform the substrate into an arbitrary convex-concave shape or to make the substrate flat by feeding back the output of the displacement sensor.
1. An inspection apparatus for inspecting a substrate, comprising:
a substrate mounting device,
where the substrate mounting device is a rear surface non-contact type, and includes a holding portion disposed at an outer circumferential portion of the substrate mounting device so as to mount the substrate thereon;
a structure, including a first piezo element, formed at a portion opposed to a rear surface of the substrate; and
a first control section for controlling pressure between the rear surface of the substrate and the structure,
where the first control section includes a second control section for controlling volume between the rear surface of the substrate and the structure.
2. The inspection apparatus according to claim 1 ,
wherein the second control section includes a first drive section for driving the first piezo element.
3. An inspection apparatus for inspecting a substrate, comprising:
a substrate mounting device,
where the substrate mounting device is a rear surface non-contact type, and includes a holding portion disposed at an outer circumferential portion of the substrate mounting device so as to mount the substrate thereon;
a structure formed at a portion opposed to a rear surface of the substrate;
first control section for controlling pressure between the rear surface of the substrate and the structure,
where the holding section includes a second piezo element; and
a second drive section for driving the second piezo element.
4. An inspection method for inspecting a substrate, comprising the steps of:
holding the substrate using a substrate mounting device which is a rear surface non-contact type;
controlling flatness of the substrate by controlling pressure on a rear surface side of the substrate; and
inspecting the substrate,
wherein a concavity-convexity forming structure is disposed on a portion opposed to the rear surface of the substrate, and the concavity-convexity forming structure includes a piezo element, and
wherein volume between the rear surface of the substrate and the concavity-convexity forming structure is controlled.
5. The inspection apparatus according to claim 1 , wherein the structure is concavity-convexity forming.
6. The inspection apparatus according to claim 1 , wherein the structure is formed in a circle.
7. The inspection apparatus according to claim 1 , wherein the structure is formed in a straight line.
8. The inspection apparatus according to claim 1 , further comprising:
a first measuring section for measuring displacement of the substrate disposed on a side where the substrate is inspected;
wherein the first control section controls pressure between the rear surface of the substrate and the structure on the basis of a measurement result of the first measuring section.
9. The inspection apparatus according to claim 1 ,
wherein the inspection apparatus includes a medium supply section for supplying a medium to a portion opposed to the rear surface of the substrate, and
the first control section controls an amount of the medium.
10. The inspection apparatus according to claim 9 , further comprising:
a second measuring section for measuring temperature of the medium; and
wherein the control section controls the temperature of the medium on the basis of a measurement result of the second measuring section.
11. The inspection apparatus according to claim 2 ,
wherein the holding section includes a second piezo element, and
the inspection apparatus includes a second drive section for driving the second piezo element.
12. The inspection apparatus according to claim 3 ,
wherein the structure is concavity-convexity forming.
13. The inspection apparatus according to claim 3 ,
wherein the structure is formed in a circle.
14. The inspection apparatus according to claim 3 ,
wherein the structure is formed in a straight line.
15. The inspection apparatus according to claim 3 , further comprising:
a first measuring section for measuring displacement of the substrate disposed on a side where the substrate is inspected;
wherein the first control section controls pressure between the rear surface of the substrate and the structure on the basis of a measurement result of the first measuring section.
16. The inspection apparatus according to claim 15 ,
wherein the substrate mounting device includes a medium supply section for supplying a medium to a portion opposed to the rear surface of the substrate, and
the first control section controls an amount of the medium.
17. The inspection apparatus according to claim 3 , further comprising:
a second measuring section for measuring temperature of the medium; and
wherein the first control section controls the temperature of the medium on the basis of a measurement result of the second measuring section.