Semiconductor device and method for manufacturing semiconductor device
View Patent ↗There is provided a semiconductor device and a method for manufacturing a semiconductor device. Within the N-type semiconductor layer formed from a high resistance N-type substrate, the P-type well diffusion layer and P-type extraction layer are formed and are fixed to ground potential. Due thereto, a depletion layer spreading on the P-type well diffusion layer side does not reach the interlayer boundary between the P-type well diffusion layer and the buried oxide film. Hence, the potential around the surface of the P-type well diffusion layer is kept at a ground potential. Accordingly, when the voltages are applied to the backside of the N-type semiconductor layer and a cathode electrode, a channel region at the MOS-type semiconductor formed as a P-type semiconductor layer is not activated. Due thereto, leakage current that may occur independently of a control due to the gate electrode of a transistor can be suppressed.
1. A semiconductor device that serves as a sensor formed on an SOI substrate for X-ray detection, comprising:
the SOI substrate including
a second-conductive-type semiconductor layer having first and second regions each being on one surface of the second-conductive-type semiconductor layer, the first and second regions being adjacent each other on the one surface of the second-conductive-type semiconductor layer,
an oxide film layer having one surface contacting the one surface of the second-conductive-type semiconductor layer, and
a first-conductive-type semiconductor layer having one surface contacting another surface of the oxide film layer that is opposite the one surface of the oxide film layer;
a first first-conductive-type diffusion layer is formed in the first region of the second-conductive-type semiconductor layer and in direct contact with the one surface of the second-conductive-type semiconductor layer;
a second first-conductive-type diffusion layer, with a higher impurity concentration than that in the first first-conductive-type diffusion layer, formed in a portion of the first first-conductive-type diffusion layer and in direct contact with the one surface of the second-conductive-type semiconductor layer;
a diode including a first second-conductive-type diffusion layer and a third first-conductive-type diffusion layer with a high impurity concentration formed at a portion of the second region, the diode being in direct contact with the one surface of the second-conductive-type semiconductor layer;
a MOS-type transistor formed in a region of the first region that includes another surface of the first-conductive-type semiconductor layer opposite to the one surface of the first-conductive-type semiconductor layer;
a first electrode that passes through the oxide film layer and is connected to the second first-conductive-type diffusion layer;
a second electrode that passes through the oxide film layer and is connected to the first second-conductive-type diffusion layer; and
a third electrode that passes through the oxide film layer and is connected to the third first-conductive-type diffusion layer.
2. The semiconductor device according to claim 1 , further comprising a voltage applying unit for applying voltage to
an other surface of the second-conductive-type semiconductor layer opposite to the one surface of the second-conductive-type semiconductor layer, and
the second electrode,
wherein the first electrode and the third electrode are connected to ground.
3. The semiconductor device according to claim 1 , further comprising:
a second second-conductive-type diffusion layer formed in the first first-conductive-type diffusion layer so as to be in contact with the oxide film layer;
a third second-conductive-type diffusion layer with a higher impurity concentration than that in the second second-conductive-type diffusion layer and being formed in a portion of the second second-conductive-type diffusion layer; and
a fourth electrode that passes through the oxide film layer and is connected to the third second-conductive-type diffusion layer.
4. The semiconductor device according to claim 3 , further comprising
a voltage applying unit for applying voltage to
another surface of the second-conductive-type semiconductor layer opposite to the one surface of the second-conductive-type semiconductor layer, and
the second electrode,
wherein the first electrode, the third electrode and the fourth electrode are connected to ground.