IP Library Granted Patent US 9,005,466
Granted Patent B2
US 9,005,466 · App. 13/583,600 · Granted Apr 14, 2015

Highly insulative and highly stable piezoelectric single LTGA crystal, method for producing the same, piezoelectric element using said single LTGA crystal, and combustion pressure sensor

Inventors: Takayuki Hayashi (Nagano, JP); Toshimitsu Aruga (Nagano, JP); Makoto Matsukura (Hokuto, JP); Yutaka Anzai (Hokuto, JP); Akio Miyamoto (Hokuto, JP); Sadao Matsumura (Hokuto, JP); Yasunori Furukawa (Hokuto, JP)
Assignee: Citizen Finetech Miyota Co., Ltd.
C30B29/22G01L9/08G01L23/10H01L41/1132H01L41/187C30B15/00C30B33/02H01L41/41F02D35/023
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Quick Facts
Patent No.
US 9,005,466
App. No.
13/583,600
Granted
Apr 14, 2015
Kind
B2
Abstract

In accordance with the present invention, there is provided a method for producing a single LTGA crystal from a polycrystalline starting material prepared from a mixture of La 2 O 3 , Ta 2 O 5 , Ga 2 O 3 , and Al 2 O 3 , wherein a mixture having a composition represented by y(La 2 O 3 )+(1−x−y−z)(Ta 2 O 5 )+z(Ga 2 O 3 )+x(Al 2 O 3 ) (in the formula, 0<x≦0.40/9, 3.00/9<y≦3.23/9, and 5.00/9≦z<5.50/9) is used as the polycrystalline starting material, and a single LTGA crystal is grown using the Z-axis as a crystal growth axis. The grown LTGA single crystal is preferably subjected to a vacuum heat treatment. The single LTGA crystal grown by the method according to the present invention, which is highly insulative and highly stable, can be utilized in such applications as a piezoelectric element of a highly reliable combustion pressure sensor useful in measurement of a combustion pressure in a combustion chamber of an internal combustion engine.

Claims (13)

1. A method for producing a single LTGA crystal from a polycrystalline starting material prepared from a mixture of La 2 O 3 , Ta 2 O 5 , Ga 2 O 3 , and Al 2 O 3 , wherein a mixture having a composition represented by y(La 2 O 3 )+(1−x−y−z)(Ta 2 O 5 )+z(Ga 2 O 3 )+x(Al 2 O 3 ) (in the formula, 0<x≦0.40/9, 3.00/9<y≦3.23/9, and 5.00/9≦z<5.50/9) is used as the polycrystalline starting material, and a single LTGA crystal is grown using the Z-axis as a crystal growth axis.

2. The method for producing a single LTGA crystal according to claim 1 , wherein the grown single LTGA crystal is subjected to a vacuum heat treatment.

3. The method for producing a single LTGA crystal according to claim 2 , wherein the vacuum heat treatment is performed for 1-24 hours at a vacuum pressure of 1 torr (133.322 Pa) or less and a temperature of 1000° C. or more and 1450° C. or less.

4. The method for producing a single LTGA crystal according to claim 1 , wherein oxygen in an amount of 0.2-5% is present in a single LTGA crystal growth atmosphere.

5. A single LTGA crystal produced by a method wherein a mixture having a composition represented by y(La 2 O 3 )+(1−x−y−z)(Ta 2 O 5 )+z(Ga 2 O 3 )+x(Al 2 O 3 ) (in the formula, 0<x≦0.40/9, 3.00/9<y≦3.2319, and 5.00/9≦z<5.5019) is used as a polycrystalline starting material, and a single LTGA crystal is grown using the Z-axis as a crystal growth axis, the crystal having an initial insulation resistivity at 500° C. immediately after growth of 3×10 8 Ω·cm or more, and an insulation resistivity after left standing in the air at 500° C. for 100 hours after the growth of also 3×10 8 Ω·cm or more.

6. The single TGA crystal according to claim 5 , having an insulation resistivity after left standing in the air at 500° C. for 100 hours after growth of 5×10 8 Ω·cm or more.

7. The single LTGA crystal according to claim 6 , having an insulation resistivity after left standing in the air at 500° C. for 100 hours after growth of 1×10 9 Ω·cm or more.

8. The single LTGA crystal according to claim 5 , having an initial insulation resistivity at 500° C. immediately after growth of 5×10 8 Ω·cm or more.

9. The single LTGA crystal according to claim 8 , having an initial insulation resistivity at 500° C. immediately after growth of 1×10 Ω·cm or more.

10. A piezoelectric element comprising the single LTGA crystal according to claim 5 .

11. The piezoelectric element according to claim 10 , wherein a rate of change of piezoelectric constant value at a given temperature of 500° C. or less relative to the piezoelectric constant value at 25° C. is within ±3%.

12. A combustion pressure sensor comprising a piezoelectric element including the single LTGA crystal according to claim 5 .

13. The combustion pressure sensor according to claim 12 , wherein a rate of change of piezoelectric constant value at a given temperature of 500° C. or less relative to the piezoelectric constant value of the piezoelectric element at 25° C. is within ±3%.

Assignments (2)
CHANGE OF NAME Recorded Mar 15, 2016
From: CITIZEN FINETECH MIYOTA CO., LTD.
To: CITIZEN FINEDEVICE CO., LTD.
Reel/Frame 038742/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 10, 2012
From: HAYASHI, TAKAYUKI; ARUGA, TOSHIMITSU; MATSUKURA, MAKOTO; ANZAI, YUTAKA; MIYAMOTO, AKIO; MATSUMURA, SADAO; FURUKAWA, YASUNORI
To: CITIZEN FINETECH MIYOTA CO., LTD.
Reel/Frame 028925/0183 →
Continuity (1)
Related Publication 20130015393A1 · Jan 17, 2013