Lateral flow atomic layer deposition apparatus and atomic layer deposition method using the same
View Patent ↗A lateral flow atomic layer deposition (ALD) apparatus has two gas inflow channels and two gas outflow channels that are connected to two gas outlets that are symmetrically formed based on a substrate in which a thin film is deposited, thereby differently guiding a flow direction of a gas flowing on the substrate. Therefore, uniformity of a deposited film is improved, compared with the conventional lateral flow ALD apparatus in which a supplied source gas and reaction gas constantly flow in only one direction on the substrate.
1. A lateral flow atomic layer deposition (ALD) apparatus in which a process gas flows between a surface in which a substrate is placed and a surface opposite thereto in a direction that is parallel to the substrate, the lateral flow ALD apparatus comprising:
a substrate support supporting the substrate;
a reactor cover contacting the substrate support to define a reaction chamber;
a first gas flow control plate located between the reactor cover and the substrate support;
a second gas flow control plate located between the reactor cover and the substrate support, and below the first gas flow control plate;
a first gas inlet connected to a first gas inflow passage and a second gas inlet connected to a second gas inflow passage; and
a first gas outlet connected to a first gas outflow passage and a second gas outlet connected to a second gas outflow passage,
wherein the first gas outflow passage and the second gas outflow passage are disposed between an upper surface of the first gas flow control plate and a lower surface of an inside of the reactor cover,
wherein the first gas inflow passage and the second gas inflow passage are disposed between the first gas flow control plate and the second gas flow control plate.
2. The lateral flow ALD apparatus of claim 1 , wherein the first gas outlet and the second gas outlet are located at an opposite side based on an upper surface of the substrate.
3. The lateral flow ALD apparatus of claim 1 , wherein the first gas inflow passage and the second gas inflow passage are located at an opposite side with respect to an upper surface of the substrate.
4. The lateral flow ALD apparatus of claim 2 , wherein the first gas outflow passage and the second gas outflow passage are defined by a first outflow groove and a second outflow groove that are formed at the upper surface of the first gas flow control plate and the lower surface of an inside of the reactor cover.
5. The lateral flow ALD apparatus of claim 3 , wherein the first gas inflow passage and the second gas inflow passage are defined by a first inflow groove and a second inflow groove that are formed at a lower surface of the first gas flow control plate and an upper surface of the second gas flow control plate.
6. The lateral flow ALD apparatus of claim 5 , wherein a process gas supplied through the first gas inlet flows as laminar flow in a first direction on the substrate via the first gas inflow passage.
7. The lateral flow ALD apparatus of claim 6 , wherein a process gas flowing in the first direction on the substrate is exhausted to the outside of the reactor through the second gas outflow passage.
8. The lateral flow ALD apparatus of claim 6 , wherein a process gas supplied through the second gas inlet flows as laminar flow in a second direction on the substrate via the second gas inflow passage.
9. The lateral flow ALD apparatus of claim 8 , wherein a process gas flowing in the second direction on the substrate is exhausted to the outside of the reactor through the first gas outflow passage.
10. The lateral flow ALD apparatus of claim 8 , wherein the second direction is opposite to the first direction.
11. The lateral flow ALD apparatus of claim 2 , wherein the first gas outlet comprises a first valve connected to an exhaust pump and a second valve connected to an inert gas supply line and the second gas outlet comprises a third valve connected to the exhaust pump and a fourth valve connected to the inert gas supply line.
12. The lateral flow ALD apparatus of claim 11 , wherein the third valve is closed and the fourth valve is opened, thereby the inert gas being supplied through the second gas outlet, when a process gas is exhausted through the first gas outlet.
13. The lateral flow ALD apparatus of claim 12 , wherein an inert gas is supplied to the first gas inflow passage through the first gas inlet, when a process gas is exhausted through the first gas outlet.
14. The lateral flow ALD apparatus of claim 11 , wherein the first valve is closed and the second valve is opened, thereby the inert gas being supplied through the first gas outlet, when a process gas is exhausted through the second gas outlet.
15. The lateral flow ALD apparatus of claim 14 , wherein the inert gas is supplied to the second gas inflow passage through the second gas inlet, when a process gas is exhausted through the second gas outlet.