IP Library › Granted Patent US 9,583,669
Granted Patent B2
US 9,583,669 · App. 13/587,916 · Granted Feb 28, 2017

Inkjet printable etch resist

Inventors: Hua Dong (Shrewsbury, MA); Robert K. Barr (Shrewsbury, MA)
Assignee: Sun Chemical Corporation
H01L31/1804C08L93/04C09D11/08C09D11/34H01L21/0273H01L21/02118H01L21/2822H01L21/31155H01L21/47Y02E10/547Y02P70/521
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Quick Facts
Patent No.
US 9,583,669
App. No.
13/587,916
Granted
Feb 28, 2017
Kind
B2
Abstract

The methods involve selectively depositing a resist containing a solid hydrogenated rosin resin and a liquid hydrogenated rosin resin ester as a mixture on a semiconductor followed by etching uncoated portions of the semiconductor and simultaneously inhibiting undercutting of the resist. The etched portions may then be metallized to form current tracks.

Claims (9)

1. A method comprising:

a) providing a doped semiconductor wafer comprising a front side, a back side, and a pn junction;

b) selectively applying a resist composition on top of the front side of the semiconductor wafer, the resist composition comprises one or more hydrogenated rosin resins, the hydrogenated rosin resins are solids at room temperature, one or more hydrogenated rosin resin esters, the hydrogenated rosin resin esters are liquids at room temperature, wherein a weight ratio of the one or more hydrogenated rosin resins to the one or more hydrogenated rosin resin esters is 2:1 to 4:1 and one or more fatty acids; and

c) applying an etch composition to the semiconductor to etch away exposed sections of the front side of the semiconductor to form current tracks.

2. The method of claim 1 , wherein the front side of the semiconductor further comprises an antireflective layer.

3. The method of claim 1 , wherein the hydrogenated rosin resin is derived from abietic acid or pimaric acid.

4. The method of claim 1 , wherein the hydrogenated rosin resin ester is derived from abietic acid or pimaric acid.

5. The method of claim 1 , wherein an emitter layer of the front side of the semiconductor wafer is n++ doped.

6. The method of claim 1 , wherein the semiconductor wafer is a mono cast wafer, monocrystalline wafer or a polycrystalline wafer.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 11, 2016
From: ROHM AND HAAS ELECTRONIC MATERIALS LLC
To: SUN CHEMICAL CORPORATION
Reel/Frame 037709/0194 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 9, 2015
From: DONG, HUA; BARR, ROBERT K
To: ROHM AND HAAS ELECTRONIC MATERIALS LLC
Reel/Frame 036992/0765 →
Continuity (1)
Related Publication 20140051248A1 · Feb 20, 2014