Semiconductor devices and methods of manufacturing the same
A semiconductor device includes a metal pattern filling a trench formed through at least a portion of an insulating interlayer on a substrate and including copper, and a wetting improvement layer pattern in the metal pattern including at least one of tantalum, tantalum nitride, titanium, titanium nitride, ruthenium, cobalt and manganese.
1. A semiconductor device, comprising:
a metal pattern filling a trench through at least a portion of an insulating interlayer on a substrate, the metal pattern including copper; and
a wetting improvement multi-layered pattern in the metal pattern, the wetting improvement multi-layered pattern having a width equal to or less than about 10 nm, and including at least one of tantalum, tantalum nitride, titanium, titanium nitride, ruthenium, cobalt and manganese,
wherein the metal pattern surrounds the wetting improvement multi-layered pattern.
2. The semiconductor device of claim 1 , wherein the wetting improvement multi-layered pattern has a width equal to or less than about ½ of a width of the trench and is formed at a central portion of the trench.
3. The semiconductor device of claim 1 , further comprising:
a barrier layer pattern between the metal pattern and the insulating interlayer, the barrier layer pattern including at least one of tantalum, tantalum nitride, titanium, titanium nitride, ruthenium, cobalt and manganese.
4. The semiconductor device of claim 1 , further comprising:
a contact plug electrically connected to the metal pattern and the substrate.
5. The semiconductor device of claim 4 , wherein the substrate includes a cell region and a peripheral circuit region, further comprising:
a first gate structure on the cell region; and
a second gate structure on the peripheral circuit region,
wherein the contact plug is electrically connected to a portion of the substrate adjacent to the second gate structure.
6. The semiconductor device of claim 5 , wherein the first gate structure includes a tunnel insulation layer pattern, a floating gate, a dielectric layer pattern and a control gate sequentially stacked on the substrate.
7. The semiconductor device of claim 5 , wherein the first gate structure includes a gate insulation layer pattern, a gate electrode and a gate mask sequentially stacked on the substrate.
8. A semiconductor device, comprising:
an insulating interlayer on a substrate; and
a wiring structure filling an entire space within a trench in the insulating interlayer such that no voids are formed therein, the wiring structure including a barrier layer pattern on sidewalls of the trench, a metal pattern on the barrier layer pattern, and a wetting improvement multi-layered pattern in the metal pattern, the wetting improvement multi-layered pattern having a width equal to or less than about 10 nm, and configured to serve as an impurity so that electro-migration (EM) among metal crystals in the metal pattern decreases,
wherein the metal pattern surrounds the wetting improvement multi-layered pattern.
9. The semiconductor device of claim 8 , wherein the metal pattern includes copper.
10. The semiconductor device of claim 8 , wherein the barrier layer pattern and the wetting improvement multi-layered pattern include a same metal.
11. The semiconductor device of claim 10 , wherein the same metal is at least one of tantalum, tantalum nitride, titanium, titanium nitride, ruthenium, cobalt and manganese.
12. The semiconductor device of claim 8 , wherein the wetting improvement multi-layered pattern has a width equal to or less than about ½ of a width of the trench and is formed at a central portion of the trench.