High voltage device
View Patent ↗A method of forming a device is disclosed. A substrate having a device region is provided. The device region comprises a source region, a gate and a drain region defined thereon. A drift well is formed in the substrate adjacent to a second side of the gate. The drift well underlaps a portion of the gate with a first edge of the drift well beneath the gate. A secondary portion is formed in the drift well. The secondary portion underlaps a portion of the gate with a first edge of the secondary portion beneath the gate. The first edge of the secondary portion is offset from the first edge of the drift well. A gate dielectric of the gate comprises a first portion having a first thickness and a second portion having a second thickness. The second portion is over the secondary portion.
1. A method of forming a device comprising:
providing a substrate having a device region, wherein the device region comprises a source region, a gate and a drain region defined thereon;
forming a drift well in the substrate adjacent to a second side of the gate, the drift well underlaps a portion of the gate with a first edge of the drift well beneath the gate, wherein the drift well comprises first polarity type dopants;
forming a secondary portion in the drift well, the secondary portion underlaps a portion of the gate with a first edge of the secondary portion beneath the gate, wherein the first edge of the secondary portion is offset from the first edge of the drift well, and wherein the secondary portion comprises neutral dopants; and
wherein a gate dielectric of the gate comprises a first portion having a first thickness and a second portion having a second thickness, wherein the second portion is over the secondary portion.
2. The method of claim 1 wherein the neutral dopants comprise fluorine, chlorine, germanium, silicon or a combination thereof.
3. The method of claim 2 wherein the dopant concentration of the neutral dopants is about 1E14-1E16/cm 2 .
4. The method of claim 3 wherein the neutral dopants enhance oxide growth on the substrate surface.
5. The method of claim 4 wherein an interface of the first and second portion of the gate dielectric is aligned with the first edge of the secondary portion.
6. The method of claim 5 wherein the first thickness of the gate dielectric is smaller than the second thickness of the gate dielectric.
7. The method of claim 6 further comprising forming an internal device isolation region along a channel width direction in the substrate between the gate and drain.
8. The method of claim 7 wherein the drift well encompasses the drain and internal device isolation region.
9. The method of claim 8 further comprising forming an isolation region, wherein the isolation region isolates the device region from other regions of the device.
10. The method of claim 9 further comprising forming a device well within the isolation region.
11. The method of claim 10 wherein the device well encompasses the source, drain drift well and internal isolation region.
12. The method of claim 6 further comprising forming a salicide block on the substrate over the drift well, wherein the salicide block is aligned with an edge of the gate and slightly overlaps the drain.
13. The method of claim 12 wherein the salicide block is an extension of the second portion of the gate dielectric.
14. A method of forming a semiconductor device comprising:
providing a substrate having a device region, wherein the device region comprises a source region, a gate and a drain region defined thereon;
forming a drift well having first polarity type dopants in the substrate adjacent to a second side of the gate, the drift well underlaps a portion of the gate with a first edge of the drift well beneath the gate;
forming a secondary portion having neutral dopants in the drift well, the secondary portion underlaps a portion of the gate with a first edge of the secondary portion beneath the gate, wherein the first edge of the secondary portion is offset from the first edge of the drift well; and
wherein a gate dielectric of the gate comprises a first portion having a first thickness and a second portion having a second thickness, wherein the second portion is over the secondary portion.
15. The method of claim 14 wherein the neutral dopants comprise fluorine, chlorine, germanium, silicon or a combination thereof.
16. The method of claim 15 wherein the dopant concentration of the neutral dopants is about 1E14-1E16/cm 2 .
17. The method of claim 16 wherein an interface of the first and second portion of the gate dielectric is aligned with the first edge of the secondary portion.
18. A semiconductor device comprising:
a substrate having a device region, wherein the device region comprises a source region, a gate and a drain region defined thereon;
a drift well in the substrate adjacent to a second side of the gate, the drift well underlaps a portion of the gate with a first edge of the drift well beneath the gate;
a secondary portion having neutral dopants in the drift well, the secondary portion underlaps a portion of the gate with a first edge of the secondary portion beneath the gate, wherein the first edge of the secondary portion is offset from the first edge of the drift well; and
wherein a gate dielectric of the gate comprises a first thickness for a first portion and a second thickness for a second portion, wherein the second portion is over the secondary portion.