IP Library › Patent Application 13623819
Patent Application
App. No. 13/623,819

METHOD AND APPARATUS FOR ALIGNING NANOWIRES DEPOSITED BY AN ELECTROSPINNING PROCESS

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Quick Facts
Patent No.
US None
App. No.
13/623,819
Abstract

Embodiments of the invention generally include apparatus and methods for depositing nanowires in a predetermined pattern during an electrospinning process. An apparatus includes a nozzle for containing and ejecting a deposition material, and a voltage source coupled to the nozzle to eject the deposition material. One or more electric field shaping devices are positioned to shape the electric field adjacent to a substrate to control the trajectory of the ejected deposition material. The electric field shaping device converges an electric field at a point near the surface of the substrate to accurately deposit the deposition material on the substrate in a predetermined pattern. The methods include applying a voltage to a nozzle to eject an electrically-charged deposition material towards a substrate, and shaping one or more electric fields to control the trajectory of the electrically-charged deposition material. The deposition material is then deposited on the substrate in a predetermined pattern.

Claims (34)

1 . An apparatus for electrospinning a material on a substrate, comprising:

a reservoir for containing a deposition material;

a nozzle in fluid communication with the reservoir;

a substrate support adapted to support a substrate adjacent to the nozzle;

a voltage source coupled to the nozzle to apply an electric potential to the nozzle to eject the deposition material from the nozzle; and

an electric field shaping device comprising a counter electrode positioned to shape an electric field between the substrate and the nozzle, the electric field shaping device adapted to influence the trajectory of the deposition material ejected from the nozzle.

2 . The apparatus of claim 1 , wherein the electric field shaping device is positioned adjacent to the substrate on a side opposite of the nozzle.

3 . The apparatus of claim 2 , wherein the substrate support comprises a frame having a central opening therethrough, the substrate support adapted to support a perimeter of a substrate.

4 . The apparatus of claim 2 , wherein the counter electrode is a pin having a conical tip adjacent to the substrate.

5 . The apparatus of claim 2 , wherein the counter electrode is fixed in position.

6 . The apparatus of claim 2 , wherein the counter electrode is movable relative to the substrate support.

7 . An apparatus for electrospinning a material on a substrate, comprising:

a reservoir for containing a deposition material;

a nozzle in fluid communication with the reservoir, the nozzle adapted to deliver the deposition material to a surface of a substrate;

a substrate support movable relative the nozzle, the substrate support adapted to support the substrate adjacent to the nozzle;

a voltage source coupled to the nozzle to apply an electric potential to the nozzle to eject the deposition material from the nozzle; and

one or more coils positioned around a process region located between the nozzle and the substrate support, the one or more coils adapted to influence the trajectory of the deposition material ejected from the nozzle.

8 . The apparatus of claim 7 , further comprising a counter electrode positioned adjacent to the substrate on a side opposite of the nozzle, wherein the counter electrode is coupled to the voltage source and is adapted to influence the trajectory of the deposition material ejected from the nozzle.

9 . The apparatus of claim 8 , wherein the voltage source is adapted to apply an electric potential to the one or more coils, and the electric potential applied to the one or more coils is of the same polarity as the electric potential applied to the nozzle.

10 . The apparatus of claim 9 , wherein the voltage source is adapted to apply an electric potential to the counter electrode, and the electric potential applied to the counter electrode is of the opposite polarity as the electric potential applied to the nozzle.

11 . The apparatus of claim 10 , wherein the counter electrode is a pin having a conical tip directed towards the substrate.

12 . The apparatus of claim 7 , wherein the one or more coils comprises a plurality of coils vertically spaced apart from one another and having axially aligned centers.

13 . The apparatus of claim 7 , wherein the plurality of coils have decreasing diameters in a direction from the nozzle towards to the substrate support.

14 . A method of electrospinning a material on a substrate, comprising:

applying a voltage to a nozzle to eject an electrically-charged deposition material towards a surface of a substrate;

shaping an electric field adjacent to the substrate to control the trajectory of the electrically-charged deposition material towards the substrate; and

depositing the electrically-charged deposition material on the surface of the substrate in a predetermined pattern by controlling the trajectory.

15 . The method of claim 14 , wherein shaping the electric field comprises applying an electric potential to a counter electrode positioned on the opposite side of the substrate as compared to the nozzle.

16 . The method of claim 14 , wherein shaping the electric field comprises applying an electric potential to one or more coils positioned within a process region located between the substrate and the nozzle.

17 . The method of claim 14 , wherein the electrically-charged deposition material comprises a polymer and a metal.

18 . The method of claim 17 , wherein the polymer is polyvinyl alcohol and the metal is aluminum.

19 . The method of claim 14 , wherein shaping the electric field comprises:

applying an electric potential to a counter electrode positioned on the opposite side of the substrate as compared to the nozzle; and

applying an electric potential to one or more coils positioned within a process region located between the substrate and the nozzle.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 8, 2012
From: LESCHKIES, KURTIS; VERHAVERBEKE, STEVEN; VISSER, ROBERT
To: APPLIED MATERIALS, INC.
Reel/Frame 029265/0859 →