Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus
View Patent ↗An apparatus and method for fabricating a semiconductor device using a 4-way valve with improved purge efficiency by improving a gas valve system by preventing dead volume from occurring are provided. The apparatus includes a reaction chamber in which a substrate is processed to fabricate a semiconductor device; a first processing gas supply pipe supplying a first processing gas into the reaction chamber; a 4-way valve having a first inlet, a second inlet, a first outlet, and a second outlet and installed at the first processing gas supply pipe such that the first inlet and the first outlet are connected to the first processing gas supply pipe; a second processing gas supply pipe connected to the second inlet of the 4-way valve to supply a second processing gas; a bypass connected to the second outlet of the 4-way valve; and a gate valve installed at the bypass.
1. A method of forming a semiconductor using atomic layer deposition, the method comprising:
supplying a source gas through a first path to a chamber;
supplying a carrier gas through a second path including a bypass to a discharge pump;
supplying a reactive gas through a third path to the chamber; and
supplying a purge gas through a fourth path to the chamber,
wherein the second path and the fourth path intersect, and
wherein the carrier gas is supplied to the discharge pump through the bypass of the second path.
2. The method of claim 1 , wherein a portion of the first path and a portion of the second path converge to share a common path so that the carrier gas purges the source gas from the common path.
3. The method of claim 1 , wherein the carrier gas purges the source gas from the first path and the purge gas purges the source gas and the reactive from the chamber.
4. The method of claim 1 , wherein the first path, the second path and the fourth path intersect at a valve.
5. The method of claim 4 , wherein the valve is a 4-way diaphragm valve.
6. The method of claim 5 , wherein the first path passes through a first inlet and a first outlet of the 4-way diaphragm valve,
the second path passes through the first inlet and a second outlet of the 4-way diaphragm valve, and
the fourth path passes through a second inlet and the first outlet of the 4-way diaphragm valve.
7. The method of claim 4 , wherein the source gas is supplied through the first path to the chamber when the 4-way diaphragm valve is set in a first state, and
the carrier gas is supplied through the second path to the discharge pump when the 4-way diaphragm valve is set in a second state.
8. The method of claim 7 , wherein the purge gas is continuously supplied to the chamber when the valve is set to the first state and when the valve is set to the second state.