Plasma deposition on a partially formed battery through a mesh screen

1. A plasma deposition method for depositing a battery component material on a partially fabricated battery cell in a plasma deposition zone, the method comprising:

(a) providing in the plasma deposition zone, a battery support comprising at least one partially fabricated battery cell, the partially fabricated battery cell comprising a battery component layer containing charge-carrying metal species and having an exposed surface;

(b) maintaining a mesh screen spaced apart, and at a preset distance from, the exposed surface of the battery component layer of the partially fabricated battery cell, the mesh screen having a plurality of mesh openings;

(c) maintaining a pressure of a process gas in the plasma deposition zone; and

(d) energizing the process gas to form a plasma by applying an electrical power to the process gas to deposit the battery component material onto the exposed surface of the battery component layer,

whereby the mesh screen reduces migration of the charge-carrying metal species across the battery component layer.

2. A method according to claim 1 wherein (b) comprises electrically charging, grounding or floating, the mesh screen.

3. A method according to claim 1 wherein in (b) the mesh screen comprises mesh openings comprising at least one of the following:

(i) a cumulative open area which is at least 70% of the total area of the mesh screen;

(ii) an open area of at least 0.25 mm 2 ; and

(iii) a dimension of at least 0.5 mm.

4. A method according to claim 1 wherein (b) comprises maintaining the mesh screen at at least one of:

(i) a preset distance of at least 1 cm; and

(ii) a preset distance of less than 10 cm.

5. A method according to claim 1 wherein in (a), the partially fabricated battery cell comprises a battery component layer that is at least one of:

(i) a cathode or electrolyte; and

(ii) a lithium-containing material.

6. A method according to claim 5 wherein the lithium-containing material comprises lithium cobalt oxide or LiPON.

7. A method according to claim 6 wherein the battery component material being deposited comprises LiPON or copper.

8. A plasma deposition method comprising:

(a) providing a battery support on a support carrier in a plasma deposition zone, the battery support comprising at least one partially fabricated battery cell having a battery component layer with an exposed surface, the battery component layer containing charge-carrying metal species;

(b) maintaining in the plasma deposition zone, a mesh screen at a preset distance away from the support carrier such that the exposed surface of the battery component layer of the partially fabricated battery cell is spaced apart from the mesh screen, the mesh screen having a plurality of mesh openings;

(c) maintaining a pressure of a process gas in the plasma deposition zone; and

(d) energizing the process gas to form a plasma by applying an electrical power to the process gas to deposit the battery component material onto the exposed surface of the battery component layer,

whereby the mesh screen reduces migration of the charge-carrying metal species across the battery component layer.

9. A method according to claim 8 wherein (b) comprises electrically charging, grounding or floating, the mesh screen.

10. A method according to claim 8 wherein in (b) the mesh screen comprises mesh openings comprising at least one of the following:

(i) a cumulative open area which is at least 70% of the total area of the mesh screen;

(ii) an open area of at least 0.25 mm 2 ; and

(iii) a dimension of at least 0.5 mm.

11. A method according to claim 8 wherein (b) comprises maintaining the mesh screen at at least one of:

(i) a preset distance of at least 1 cm; and

(ii) a preset distance of less than 10 cm.

12. A method according to claim 8 wherein in (a), the partially fabricated battery cell comprises a battery component layer comprising a lithium-containing material.

13. A method according to claim 12 wherein the battery component material being deposited comprises LiPON or copper.

14. A plasma deposition method comprising:

(a) providing a battery support on a support carrier in a plasma deposition zone, the battery support comprising at least one partially fabricated battery cell having a battery component layer with an exposed surface, the battery component layer containing charge-carrying metal species;

(b) maintaining in the plasma deposition zone, a mesh screen at a distance of at least 1 cm away from the support carrier such that the exposed surface of the battery component layer of the partially fabricated battery cell is spaced apart from the mesh screen, the mesh screen having a plurality of mesh openings;

(c) maintaining a pressure of a process gas in the plasma deposition zone; and

(d) energizing the process gas to form a plasma by applying an electrical power to the process gas to deposit the battery component material onto the exposed surface of the battery component layer,

whereby the mesh screen reduces migration of the charge-carrying metal species across the battery component layer.

15. A method according to claim 14 wherein in (a), the partially fabricated battery cell comprises a battery component layer comprising a lithium-containing material.

16. A method according to claim 15 wherein the battery component material being deposited comprises LiPON or copper.

17. A method according to claim 14 wherein in (b), the mesh screen is attached to the support carrier or to a chamber wall.