IP Library Granted Patent US 8,901,947
Granted Patent B2
US 8,901,947 · App. 13/629,924 · Granted Dec 2, 2014

Probe out-of-position sensing for automated test equipment

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Quick Facts
Patent No.
US 8,901,947
App. No.
13/629,924
Granted
Dec 2, 2014
Kind
B2
Abstract

Detecting misalignment of test probes with component carriers in an automated test system is taught. Automated test systems for testing electronic components can have electronic components held in component carriers in preparation for testing. Testing can include moving test probes through openings provided in the component carrier to contact the electronic components held therein. Aspects of disclosed implementations use force feedback from the test probes to determine if the test probes have successfully contacted the electronic component without, for example, contacting the component carrier.

Claims (41)

1. A method for testing electronic components in an electronic component test system, the method comprising:

moving a component carrier into a test station of the test system;

moving a test probe in a direction toward the component carrier while the component is in the test station, the component carrier having an opening for the test probe to pass through when the test probe is in a test position;

measuring a feedback force of the test probe while moving the test probe in the direction toward the component carrier; and

determining, using a controller, whether the test probe makes contact with the component carrier based on the feedback force.

2. The method of claim 1 wherein determining whether the test probe makes contact with the component carrier comprises determining that the test probe makes contact with a contact pad of an electronic component through the opening based on the feedback force, the electronic component supported by the component carrier, such that the test probe does not make contact with the component carrier.

3. The method of claim 2 , further comprising:

measuring a test parameter of the electronic component using the contact between the test probe and the contact pad.

4. The method of claim 2 wherein determining that the test probe makes contact with the contact pad of the electronic component comprises:

comparing an amount of time for an occurrence of a positive value for the feedback force while moving the test probe in the direction toward the component carrier to a defined amount of time; and

concluding that the test probe makes contact with the contact pad when the amount of time is equal to the defined amount of time.

5. The method of claim 1 wherein determining whether the test probe makes contact with the component carrier comprises:

comparing an amount of time for an occurrence of a positive value of the feedback force while moving the test probe in the direction toward the component carrier to a defined amount of time; and

concluding that the test probe makes contact with the component carrier when the amount of time is less than the defined amount of time.

6. The method of claim 1 wherein determining whether the test probe makes contact with the component carrier comprises:

comparing the feedback force when the test probe reaches the test position with a defined feedback force; and

concluding that the test probe makes contact with the component carrier if the feedback force is greater than the defined feedback force.

7. The method of claim 1 wherein determining whether the test probe makes contact with the component carrier comprises:

comparing the feedback force when the test probe reaches the test position with a defined feedback force;

concluding that the test probe makes contact with neither a contact pad of an electronic component through the opening nor the component carrier if the feedback force is less than the defined feedback force; and

concluding that the test probe makes contact with a contact pad of an electronic component through the opening, such that the test probe does not make contact with the component carrier, if the feedback force is equal to the defined feedback force.

8. The method of claim 1 , further comprising:

issuing an alert when the test probe makes contact with the component carrier.

9. The method of claim 1 wherein determining whether the test probe makes contact with the component carrier comprises determining that the test probe makes no contact over a range of travel from a starting position to the test position.

10. The method of claim 9 wherein determining that the test probe makes no contact over the range of travel comprises concluding that the feedback force has a constant value of zero over the range of travel.

11. The method of claim 9 , further comprising:

issuing an alert when the test probe makes no contact over the range of travel.

12. The method of claim 1 wherein determining whether the test probe makes contact with the component carrier based on the feedback force comprises determining whether the test probe makes contact with the component carrier based on the feedback force and an amount of time to reach a defined feedback force.

13. An apparatus for testing electronic components in an electronic component test system, comprising:

a test station including a test probe configured to transmit a signal to an electronic component;

a component carrier configured to support the electronic component and having an opening for the test probe to pass through when the component carrier is in the test station and the test probe is in a test position;

a force measurement device configured to measure a feedback force of the test probe while moving the test probe in a direction toward the component carrier; and

a controller configured to determine whether the test probe makes contact with the component carrier based on the feedback force.

14. The apparatus of claim 13 , further comprising:

a probe module supporting the test probe and controlled by the controller to move test probe over a range of travel from a starting position to the test position.

15. The apparatus of claim 14 wherein the controller is configured to determine that the test probe does not makes contact with the component carrier when no feedback force is measured over the range of travel.

16. The apparatus of claim 13 wherein the controller is configured to generate an alarm when the test probe makes contact with the component carrier.

17. The apparatus of claim 13 wherein the controller is configured to determine that the test probe makes contact with the component carrier when an amount of time for an occurrence of a positive value of the feedback force while moving the test probe in the direction toward the component carrier is less than a defined amount of time.

18. The apparatus of claim 13 wherein the controller is configured to determine that the test probe makes contact with the component carrier when the feedback force when the test probe reaches the test position is greater than a defined feedback force.

19. The apparatus of claim 13 wherein the controller is configured to determine that the test probe makes contact with a contact pad of an electronic component through the opening based on the feedback force, the electronic component supported by the component carrier; and wherein the controller is configured to determine that the test probe does not make contact with the component carrier when the test probe makes contact with the contact pad.

20. The apparatus of claim 19 wherein the controller is configured to obtain a measurement of a test parameter of the electronic component using the contact between the test probe and the contact pad.

Assignments (11)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO. 7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0227. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (TERM LOAN). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055006/0492 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040925 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Feb 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V. F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 052917/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040928 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Jan 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 052915/0001 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
PATENT SECURITY AGREEMENT (TERM LOAN) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0227 →
RELEASE OF SECURITY INTEREST Recorded Nov 7, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 040928/0001 →
RELEASE OF SECURITY INTEREST Recorded Sep 21, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V., F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 040925/0001 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 6, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037445/0592 →