LED Device with Embedded Top Electrode
An LED device and a method of manufacturing, including an embedded top electrode, are presented. The LED device includes an LED structure and a top electrode. The LED structure includes layers disposed on a substrate, including an active light-emitting region. A top layer of the LED structure is a top contact layer. The top electrode is embedded into the top contact layer, wherein the top electrode electrically contacts the top contact layer.
1 - 20 . (canceled)
21 . A light emitting diode (LED) device comprising:
an active light-emitting layer;
a top contact layer having a top surface formed over the active light-emitting layer; and
a first top electrode at least partially embedded in the top contact and having a non-conductive bottommost surface, wherein the first top electrode electrically contacts the top contact layer.
22 . The LED device of claim 21 , wherein the first top electrode comprises a metal, a metal alloy, a conductive material, or combinations thereof.
23 . The LED device of claim 22 , wherein the conductive material is transparent.
24 . The LED device of claim 21 , wherein the top contact layer includes a transparent conductive material and the first top electrode includes a metal material.
25 . The LED device of claim 21 , further comprising:
a bottom electrode;
a buffer layer formed over the bottom electrode; and
a bottom contact layer formed over the buffer layer, wherein the active light-emitting layer is formed over the bottom electrode, the buffer layer, and the bottom contact layer.
26 . The LED device of claim 25 , wherein the buffer layer is reflective.
27 . The LED device of claim 21 , further comprising a conductive web connecting the first top electrode and a second top electrode in the top contact layer.
28 . The LED device of claim 27 , wherein the conductive web comprises a metal, a metal alloy, a conductive material, or combinations thereof.
29 . A method of forming a light emitting diode (LED) device, the method comprising:
forming an active light-emitting layer over a substrate;
forming a top contact layer over the active light-emitting layer;
patterning the top contact layer to form a first trench therein;
forming a top electrode within the first trench, wherein the top electrode has a non-conductive bottommost surface.
30 . The method of claim 29 , wherein the top electrode comprises a metal, a metal alloy, a conductive material, or combinations thereof.
31 . The method of claim 29 , wherein forming the top electrode within the first trench includes:
forming a dielectric material layer in the first trench; and
depositing a conductive material layer over the dielectric material layer in the first trench.
32 . The method of claim 29 , wherein patterning the top contact layer to form the first trench therein includes patterning the top contact layer to form a second trench therein.
33 . The method of claim 29 , wherein forming the top electrode within the first trench includes:
forming a dielectric material layer in the first trench and the second trench;
removing the dielectric material layer from the second trench; and
depositing a conductive material layer in the second trench and over the dielectric material layer in the first trench.
34 . The method of claim 29 further comprising:
forming a bottom electrode over the substrate;
forming a buffer layer over the bottom electrode; and
forming a bottom contact layer formed over the buffer layer, wherein the active light-emitting layer is formed over the bottom electrode, the buffer layer, and the bottom contact layer.
35 . A light emitting diode (LED) structure comprising:
a top contact layer; and
an electrode partially embedded in the top contact layer, wherein the electrode has a non-conductive bottommost surface.
36 . The LED structure of claim 35 , wherein the electrode comprises a metal, a metal alloy, a conductive material, or combinations thereof.
37 . The LED device of claim 35 , wherein the conductive material is transparent.
38 . The LED device of claim 35 , wherein the top contact layer includes a transparent conductive material and the first top electrode includes a metal material.
39 . The LED structure of claim 35 , wherein the electrode has a top surface that is non-coplanar with a top surface of the top contact layer.
40 . The LED structure of claim 39 , wherein the top surface of the electrode is recessed relative to the top surface of the top contact layer.