Light-emitting devices with textured active layer

1. A method of fabricating a lighting apparatus, comprising:

forming a mask layer over a substrate, the mask layer having a plurality of protrusions that define a plurality of openings between the plurality of protrusions;

etching the substrate to form a plurality of trenches in the substrate, wherein the trenches are aligned with the openings of the mask layer, and wherein at least a first subset of the trenches are shaped differently than a second subset of the trenches; and

forming a multi-layered light-emitting diode (LED) structure over the substrate;

wherein:

the multi-layered LED structure comprises a first doped layer, a second doped layer doped with a different type of conductivity from the first doped layer, and an active layer disposed between the first and second doped layers; and

at least parts of the LED structure are formed over the trenches in the substrate.

2. The method of claim 1 , wherein the openings extend completely through mask layer and expose portions of the substrate underneath before the substrate is etched.

3. The method of claim 1 , wherein the openings extend partially through the mask layer and cover up portions of the substrate underneath before the substrate is etched.

4. The method of claim 1 , wherein at least some of the openings have different lateral dimensions than other openings.

5. The method of claim 1 , wherein at least some of the protrusions of the mask layer have different lateral dimensions than other protrusions of the mask layer.

6. The method of claim 1 , wherein the first subset of the trenches in the substrate have different slant angles than the second subset of the trenches in the substrate.

7. The method of claim 1 , wherein at least some of the first subset of the trenches or the second subset of the trenches are shaped as rectangles in a top view.

8. The method of claim 1 , wherein at least some of the first subset of the trenches or the second subset of the trenches are shaped as elongate strips in a top view.

9. The method of claim 1 , wherein at least some of the first subset of the trenches are encircled by at least some of the second subset of the trenches in a top view.

10. The method of claim 1 , wherein the multi-layer LED structure is formed conformally over the substrate.

11. A method of fabricating a photonic device, comprising:

providing a substrate;

forming, through a lithography process, a plurality of recesses that extend into the substrate, wherein the recesses include a plurality of first recesses and a plurality of second recesses, and wherein at least some of the first recesses have different geometries than the second recesses;

growing a first cladding layer over the substrate, the first cladding layer having a first type of conductivity and partially filling the recesses in a conformal manner;

growing a multiple quantum well (MQW) layer over the first cladding layer, the MQW layer being conformally grown over the first cladding layer; and

growing a second cladding layer over the MQW layer, the second cladding layer having a second type of conductivity different from the first type and being conformally grown over the MQW layer.

12. The method of claim 11 , wherein the recesses are formed using an etching process.

13. The method of claim 11 , wherein the recesses are formed using a laser micro-machining process.

14. The method of claim 11 , wherein the geometries of the recesses are configured so that portions of the MQW layer overlying the recesses emit light in different directions.

15. The method of claim 11 , wherein at least one of the following is true:

at least some of the first recesses or some of the second recesses are shaped as rectangles in a top view;

at least some of the first recesses or some of the second recesses are shaped as elongate strips in a top view; and

at least some of the first recesses are circumferentially encircled by at least some of the second recesses in a top view.

16. A method of forming a device, the method comprising:

providing a substrate;

forming a first trench extending from a top surface of the substrate into the substrate, wherein the first trench comprises a first sidewall and a bottom, wherein the step of forming the first trench comprises a laser micro-machining; and

forming a light-emitting device (LED) comprising an active layer, wherein the active layer comprises a first portion parallel to the first sidewall of the first trench, and a second portion parallel to the bottom of the first trench.

17. The method of claim 16 , wherein the light-emitting device (LED) comprises:

a first cladding layer of a first conductivity type over the substrate;

the active layer over the first cladding layer; and

a second cladding layer of a second conductivity type opposite the first conductivity type over the active layer, wherein each of the first cladding layer, the active layer, and the second cladding layer is a non-flat layer.

18. The method of claim 16 , wherein the step of forming the first trench comprises etching the substrate.

19. The method of claim 16 , further comprising forming a second trench extending from the top surface of the substrate into the substrate, wherein the second trench comprises a second sidewall having a second slant angle different from a first slant angle of the first sidewall.

20. The method of claim 1 , wherein the etching comprises a laser micro-machining process.