FinFET with dummy gate on non-recessed shallow trench isolation (STI)
View Patent ↗An embodiment fin field effect transistor (FinFET) device includes fins formed from a semiconductor substrate, a non-recessed shallow trench isolation (STI) region disposed between the fins, and a dummy gate disposed on the non-recessed STI region.
1. A fin field effect transistor (FinFET) device, comprising:
a semiconductor substrate comprising fins, the fins comprising a first fin, the first fin having a first longitudinal axis;
a non-recessed shallow trench isolation (STI) region disposed between the fins, the non-recessed STI region adjoining a first end of the first fin, the first longitudinal axis intersecting the non-recessed STI region;
a recessed STI region over the semiconductor substrate and adjoining a second end of the first fin, the second end being opposite the first end, the first longitudinal axis intersecting the recessed STI region;
a dummy gate disposed on the non-recessed STI region without extending over any fins; and
a first active gate extending along opposing sidewalls of the first fin, the first active gate extending along an uppermost surface of the first fin.
2. The FinFET device of claim 1 , wherein a top surface of the non-recessed STI region and a top surface of the fins are co-planar.
3. The FinFET device of claim 1 , wherein a second active gate is formed over another of the fins and wherein the first active gate and the second active gate are formed on opposing sides of the dummy gate.
4. The FinFET device of claim 3 , wherein a top surface of the dummy gate and a top surface of the first and second active gates are co-planar.
5. The FinFET device of claim 1 , wherein the recessed STI region is free of any dummy gates.
6. The FinFET device of claim 1 , wherein the semiconductor substrate comprises silicon.
7. The FinFET device of claim 1 , wherein a longitudinal axis of the dummy gate is perpendicular to a longitudinal axis of the fins.
8. The FinFET device of claim 1 , wherein longitudinal axes of the fins are collinear.
9. A fin field effect transistor (FinFET) device, comprising:
a semiconductor substrate comprising a first fin and a second fin, longitudinal axes of the first fin and the second fin being collinear;
a non-recessed shallow trench isolation (STI) region disposed between the first fin and the second fin, a top surface of the non-recessed STI region and a top surface of the first fin and the second fin being co-planar;
a recessed STI region disposed adjacent the first fin and the second fin;
active gates, each of the active gates extending along sidewalls of a corresponding one of the first fin and the second fin and a top surface of the corresponding one of the first fin and the second fin; and
a dummy gate disposed between the active gates and over the non-recessed STI region, the dummy gate disposed completely over a shallow trench isolation region.
10. The FinFET device of claim 9 , wherein a top surface of the dummy gate and a top surface of the active gates are co-planar.
11. The FinFET device of claim 9 , wherein the recessed STI region is formed on sides of the first fin and the second fin.
12. The FinFET device of claim 11 , wherein the recessed STI region is free of any dummy gates.
13. The FinFET device of claim 9 , wherein the dummy gate is parallel to the active gates.
14. The FinFET device of claim 9 , wherein a longitudinal axis of the dummy gate is parallel to a longitudinal axis of a first active gate of the active gates.
15. A fin field effect transistor (FinFET) device, comprising:
a substrate having fins extending therefrom;
a non-recessed shallow trench isolation (STI) region disposed between the fins, at least one of the fins having a longitudinal axis intersecting the non-recessed STI region;
recessed STI regions disposed on opposing sides of the non-recessed shallow trench isolation region
an active gate formed over each of the fins, the active gate extending over opposing sidewalls of each of the fins; and
a dummy gate formed between the active gates and over the non-recessed STI region without extending over any active areas.
16. The FinFET device of claim 15 , wherein the recessed STI regions are laterally adjacent to the non-recessed STI region.
17. The FinFET device of claim 15 , wherein an upper surface of the recessed STI regions is free of any dummy gates.
18. The FinFET device of claim 15 , wherein the dummy gate is entirely disposed over the non-recessed STI region.
19. The FinFET device of claim 15 , wherein longitudinal axes of the fins are collinear.
20. The FinFET device of claim 15 , wherein a top surface of the non-recessed STI region and a top surface of the fins are co-planar.