Method of manufacturing semiconductor device and semiconductor device
An improvement is achieved in the manufacturing yield of a semiconductor device including a plurality of field effect transistors having different characteristics over the same substrate. By combining anisotropic dry etching with isotropic wet etching or isotropic dry etching, three types of sidewalls having different sidewall lengths are formed. By reducing the number of anisotropic dry etching steps, in a third n-type MISFET region and a third p-type MISFET region where layout densities are high, it is possible to prevent a semiconductor substrate from being partially cut between n-type gate electrodes adjacent to each other, between the n-type gate electrode and a p-type gate electrode adjacent to each other, and the p-type gate electrodes adjacent to each other.
1. A method of manufacturing a semiconductor device including a plurality of first field effect transistors in a first region of a semiconductor substrate, a plurality of second field effect transistors in a second region of the semiconductor substrate which is different from the first region, a plurality of third field effect transistors in a third region of the semiconductor substrate which is different from the first region and the second region, first sidewalls each having a first sidewall length and provided over side surfaces of first gate electrodes of the first field effect transistors, second sidewalls each having a second sidewall length and provided over side surfaces of second gate electrodes of the second field effect transistors, and third sidewalls each having a third sidewall length and provided over side surfaces of third gate electrodes of the third field effect transistors, the method comprising the steps of:
(a) forming the first gate electrodes over a main surface of the semiconductor substrate in the first region each via a first gate insulating film, forming the second gate electrodes over the main surface of the semiconductor substrate in the second region each via a second gate insulating film, and forming the third gate electrodes over the main surface of the semiconductor substrate in the third region each via a third gate insulating film;
(b) after the step (a), forming a first insulating film over the main surface of the semiconductor substrate so as to cover the first gate electrodes, the second gate electrodes, and the third gate electrodes therewith;
(c) after the step (b), forming a second insulating film over the first insulating film;
(d) after the step (c), processing the second insulating film by anisotropic dry etching to leave the second insulating film over each of the side surfaces of the first gate electrodes, the second gate electrodes, and the third gate electrodes;
(e) after the step (d), processing the second insulating film left over each of the side surfaces of the second gate electrodes and the third gate electrodes by isotropic dry etching or isotropic wet etching;
(f) after the step (e), removing the second insulating film left over each of the side surfaces of the third gate electrodes by isotropic dry etching or isotropic wet etching;
(g) after the step (f), forming a third insulating film over the main surface of the semiconductor substrate so as to cover the first gate electrodes, the second insulating film left over each of the side surfaces of the first gate electrodes, the second gate electrodes, the second insulating film left over each of the side surfaces of the second gate electrodes, and the third gate electrodes;
(h) after the step (g), processing the third insulating film by anisotropic dry etching to leave the third insulating film over each of the side surfaces of the first gate electrodes via the first insulating film and the second insulating film, each of the side surfaces of the second gate electrodes via the first insulating film and the second insulating film, and each of the side surfaces of the third gate electrodes via the first insulating film; and
(i) after the step (h), removing the exposed first insulating film,
wherein the first sidewalls are each formed of the first insulating film, the second insulating film, and the third insulating film which are formed over each of the side surfaces of the first gate electrodes, the second sidewalls are each formed of the first insulating film, the second insulating film, and the third insulating film which are formed over each of the side surfaces of the second gate electrodes, and the third sidewalls are each formed of the first insulating film and the third insulating film which are formed over each of the side surfaces of the third gate electrodes.
2. A method of manufacturing a semiconductor device according to claim 1 ,
wherein a second gate length of each of the second gate electrodes is shorter than a first gate length of each of the first gate electrodes, and a third gate length of each of the third gate electrodes is shorter than the second gate length of each of the second gate electrodes, and
wherein a layout density of the second gate electrodes is higher than a layout density of the first gate electrodes, and a layout density of the third gate electrodes is higher than the layout density of the second gate electrodes.
3. A method of manufacturing a semiconductor device according to claim 1 ,
wherein, in the step (d), between the third gate electrodes adjacent to each other in the third region, a part of the second insulating film is left.
4. A method of manufacturing a semiconductor device according to claim 1 ,
wherein the first insulating film is a silicon nitride film, and each of the second insulating film and the third insulating film is a silicon oxide film.
5. A method of manufacturing a semiconductor device according to claim 1 ,
wherein the first insulating film has a thickness of not more than 10 nm.
6. A method of manufacturing a semiconductor device according to claim 1 ,
wherein the second sidewall length is shorter than the first sidewall length, and the third sidewall length is shorter than the second sidewall length.
7. A method of manufacturing a semiconductor device according to claim 1 ,
wherein a height of each of the second sidewalls from the main surface of the semiconductor substrate and a height of each of the third sidewalls from the main surface of the semiconductor substrate are shorter than a height of each of the first sidewalls from the main surface of the semiconductor substrate.
8. A method of manufacturing a semiconductor device including a plurality of first field effect transistors in a first region of a semiconductor substrate, a plurality of second field effect transistors in a second region of the semiconductor substrate which is different from the first region, a plurality of third field effect transistors in a third region of the semiconductor substrate which is different from the first region and the second region, first sidewalls each having a first sidewall length and provided over side surfaces of first gate electrodes of the first field effect transistors, second sidewalls each having a second sidewall length and provided over side surfaces of second gate electrodes of the second field effect transistors, and third sidewalls each having a third sidewall length and provided over side surfaces of third gate electrodes of the third field effect transistors, the method comprising the steps of:
(a) forming the first gate electrodes over a main surface of the semiconductor substrate in the first region each via a first gate insulating film, forming the second gate electrodes over the main surface of the semiconductor substrate in the second region each via a second gate insulating film, and forming the third gate electrodes over the main surface of the semiconductor substrate in the third region each via a third gate insulating film;
(b) after the step (a), forming a first insulating film over the main surface of the semiconductor substrate so as to cover the first gate electrodes, the second gate electrodes, and the third gate electrodes therewith;
(c) after the step (b), forming a second insulating film over the first insulating film;
(d) after the step (c), processing the second insulating film by anisotropic dry etching to leave the second insulating film over each of the side surfaces of the first gate electrodes, the second gate electrodes, and the third gate electrodes;
(e) after the step (d), processing the second insulating film left over each of the side surfaces of the second gate electrodes and the third gate electrodes by isotropic dry etching or isotropic wet etching;
(f) after the step (e), processing the first insulating film left over each of the side surfaces of the third gate electrodes by isotropic dry etching or isotropic wet etching; and
(g) after the step (f), removing the exposed first insulating film,
wherein the first sidewalls are each formed of the first insulating film and the second insulating film which are formed over each of the side surfaces of the first gate electrodes, the second sidewalls are each formed of the first insulating film and the second insulating film which are formed over each of the side surfaces of the second gate electrodes, and the third sidewalls are each formed of the first insulating film and the second insulating film which are formed over each of the side surfaces of the third gate electrodes.
9. A method of manufacturing a semiconductor device according to claim 8 ,
wherein a second gate length of each of the second gate electrodes is shorter than a first gate length of each of the first gate electrodes, and a third gate length of each of the third gate electrodes is shorter than the second gate length of each of the second gate electrodes, and
wherein a layout density of the second gate electrodes is higher than a layout density of the first gate electrodes, and a layout density of the third gate electrodes is higher than the layout density of the second gate electrodes.
10. A method of manufacturing a semiconductor device according to claim 8 ,
wherein, in the step (d), between the third gate electrodes adjacent to each other in the third region, a part of the second insulating film is left.
11. A method of manufacturing a semiconductor device according to claim 8 ,
wherein the first insulating film is a silicon nitride film, and the second insulating film is a silicon oxide film.
12. A method of manufacturing a semiconductor device according to claim 8 ,
wherein the first insulating film has a thickness of not more than 10 nm.
13. A method of manufacturing a semiconductor device according to claim 8 ,
wherein the second sidewall length is shorter than the first sidewall length, and the third sidewall length is shorter than the second sidewall length.
14. A method of manufacturing a semiconductor device according to claim 8 ,
wherein a height of each of the second sidewalls from the main surface of the semiconductor substrate is shorter than a height of each of the first sidewalls from the main surface of the semiconductor substrate, and a height of each of the third sidewalls from the main surface of the semiconductor substrate is shorter than the height of each of the second sidewalls from the main surface of the semiconductor substrate.
15. A semiconductor device, comprising:
a plurality of first field effect transistors in a first region of a semiconductor substrate;
a plurality of second field effect transistors in a second region of the semiconductor substrate which is different from the first region;
a plurality of third field effect transistors in a third region of the semiconductor substrate which is different from the first region and the second region;
first sidewalls each having a first sidewall length and provided over side surfaces of first gate electrodes of the first field effect transistors;
second sidewalls each having a second sidewall length and provided over side surfaces of second gate electrodes of the second field effect transistors; and
third sidewalls each having a third sidewall length and provided over side surfaces of third gate electrodes of the third field effect transistors,
wherein the second sidewall length is shorter than the first sidewall length, and the third sidewall length is shorter than the second sidewall length, and
wherein a height of each of the second sidewalls from a main surface of the semiconductor substrate is shorter than a height of each of the first sidewalls from the main surface of the semiconductor substrate, and a height of each of the third sidewalls from the main surface of the semiconductor substrate is shorter than the height of each of the second sidewalls from the main surface of the semiconductor substrate.
16. A semiconductor device according to claim 15 ,
wherein a second gate length of each of the second gate electrodes is shorter than a first gate length of each of the first gate electrodes, and a third gate length of each of the third gate electrodes is shorter than the second gate length of each of the second gate electrodes, and
wherein a layout density of the second gate electrodes is higher than a layout density of the first gate electrodes, and a layout density of the third gate electrodes is higher than the layout density of the second gate electrodes.
17. A semiconductor device according to claim 15 ,
wherein a first silicide layer is formed over each of the first gate electrodes, a second silicide layer is formed over each of the second gate electrodes, and a third silicide layer is formed over each of the third gate electrodes, and
wherein the third silicide layer has a thickness larger than a thickness of the first silicide layer.