Semiconductor light emitting device and method for manufacturing the same

1. A method for manufacturing a semiconductor light emitting device, comprising:

providing a first stack film on a first substrate, the first stack film being formed by stacking a p-type nitride semiconductor layer, an active layer having a multiquantum well structure of a nitride semiconductor, and an n-type nitride semiconductor layer in this order;

patterning on the first stack film so as to have a tapered shape in cross-section, with an area of a film plane gradually increasing from the n-type nitride semiconductor layer toward the p-type nitride semiconductor layer;

forming a protection film that protects an upper face of the n-type nitride semiconductor layer and side faces of the first stack film;

removing the protection film from the upper face of the n-type nitride semiconductor layer to expose the upper face of the n-type nitride semiconductor layer;

forming an n-electrode on the exposed upper face of the n-type nitride semiconductor layer, the n-electrode being connected to the n-type nitride semiconductor layer; and

forming a concave-convex region on the upper face of the n-type nitride semiconductor layer by performing wet etching on the upper face of the n-type nitride semiconductor layer with the use of an alkaline solution, after the n-electrode is formed, the concave-convex region having first concavities and convexities and second concavities and convexities that are smaller than the first concavities and convexities, the first concavities and convexities randomly coexisting with second concavities and convexities, the first concavities and convexities having height differences of 1 μm to 3 μm, the second concavities and convexities having height differences of 300 nm or smaller.

2. The method according to claim 1 , wherein the alkaline solution contains potassium hydroxide or tetramethylammonium hydroxide.

3. The method according to claim 1 , wherein

before providing the first stack film on the first substrate, the providing the first stack film on the first substrate includes:

forming a second stack film on a second substrate, the second stack film being formed by stacking the n-type nitride semiconductor layer, the active layer, and the p-type nitride semiconductor layer in this order;

forming a contact electrode on an upper face of the p-type nitride semiconductor layer;

forming a first metal layer on upper faces of the contact electrode and the second stack film, the first metal layer having a larger minimum diameter than a minimum diameter of the upper face of the second stack film;

patterning on the first metal layer;

patterning on the second stack film so as to have a tapered shape in cross-section, with an area of a film plane gradually increasing from the upper face toward a lower face;

forming a second metal layer on an upper face of the first substrate, the second metal layer having a larger minimum diameter than the minimum diameter of the first metal layer, the second metal layer being made of a material having a lower melting point than a melting point of the first metal layer;

placing the second substrate so that an upper face of the first metal layer faces an upper face of the second metal layer, and bonding the upper face of the second metal layer and the upper face of the first metal layer to each other; and

detaching the second substrate from the second stack film, and transferring the second stack film onto the first substrate, so that the second stack film serves as the first stack film provided on the first substrate.

4. The method according to claim 3 , wherein the detaching is performed by irradiation with a UV laser.

5. The method according to claim 3 , wherein the alkaline solution is tetramethylammonium hydroxide or potassium hydroxide of 0.1 mol/l to 10 mol/l.