Substrate processing apparatus and substrate processing method for performing heat treatment on substrate
Each of substrates which are sequentially loaded into an apparatus is transferred to one of empty (available) cooling units, and the cooling unit is reserved as a unit to be used for performing a cooling treatment after a post-exposure bake process for the substrate and the reservation information is stored. After one of the cooling units is reserved in advance before the post-exposure bake process, the substrate is transferred from the cooling unit to one of heating units without being subjected to a cooling treatment and is subjected to a post-exposure bake process therein. After the post-exposure bake process, the substrate is transferred from the heating unit to the reserved cooling unit which is reserved in advance and subjected to a cooling treatment therein.
1. A substrate processing apparatus for performing a heat treatment for a predetermined time period on each of substrates which are sequentially loaded thereinto and then performing a cooling treatment thereon, comprising:
at least one heat treatment chamber for performing a heat treatment on a substrate;
a plurality of cooling treatment chambers for performing a cooling treatment on a substrate, the number of said plurality of cooling treatment chambers being not less than the number of said heat treatment chambers;
a substrate transfer part for transferring a substrate between said at least one heat treatment chamber and said plurality of cooling treatment chambers;
a transfer control part configured to select prior to the performance of said heat treatment on said substrate, one of said plurality of cooling treatment chambers which is reserved to be used for performing a cooling treatment after a heat treatment for each of substrates that are sequentially loaded into said substrate processing apparatus and memorize said selected one cooling treatment chamber as a reserved cooling treatment chamber, and to control said substrate transfer part to transfer said substrate to one of said at least one heat treatment chamber so that said substrate is subjected to a heat treatment therein for a predetermined time period and then transfer said substrate from said heat treatment chamber to said reserved cooling treatment chamber so that said substrate is subjected to a cooling treatment therein; and
said transfer control part is configured to disable loading of a subsequent substrate into said reserved cooling treatment chamber during a period while said heat treatment chamber performs a heat treatment on said substrate.
2. The substrate processing apparatus according to claim 1 , wherein
said heat treatment chamber performs a post-exposure heat treatment on a substrate which has been subjected to an exposure process after being coated with a chemically amplified resist.
3. A substrate processing apparatus for performing a heat treatment for a predetermined time period on each of substrates which are sequentially loaded thereinto and then performing a cooling treatment thereon, comprising:
at least one heat treatment chamber for performing a heat treatment on a substrate;
a plurality of cooling treatment chambers for performing a cooling treatment on a substrate, the number of said plurality of cooling treatment chambers being not less than the number of said heat treatment chambers;
a substrate transfer part for transferring a substrate between said at least one heat treatment chamber and said plurality of cooling treatment chambers;
a transfer control part configured to cause said substrate transfer part to transfer each of substrates which are sequentially loaded into said substrate processing apparatus to one of said plurality of cooling treatment chambers and memorize said one cooling treatment chamber as a reserved cooling treatment chamber for said substrate, and to then control said substrate transfer part to transfer said substrate from said reserved cooling treatment chamber to one of said at least one heat treatment chamber so that said substrate is subjected to a heat treatment therein for a predetermined time period and then transfer said substrate from said heat treatment chamber to said reserved cooling treatment chamber so that said substrate is subjected to a cooling treatment therein; and
said transfer control part is configured to disable loading of a subsequent substrate into said reserved cooling treatment chamber during a period while said heat treatment chamber performs a heat treatment on said substrate.
4. The substrate processing apparatus according to claim 3 , wherein
said heat treatment chamber performs a post-exposure heat treatment on a substrate which has been subjected to an exposure process after being coated with a chemically amplified resist.