IP Library Granted Patent US 8,509,276
Granted Patent B2
US 8,509,276 · App. 13/668,248 · Granted Aug 13, 2013

Plasmon lasers at deep subwavelength scale

Inventors: Xiang Zhang (Alamo, CA); Volker Jendrik Sorger (Berkeley, CA); Rupert Francis Maximillian Oulton (El Cerrito, CA); Ren-Min Ma (Albany, CA)
Assignee: The Regents of the University of California
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 8,509,276
App. No.
13/668,248
Granted
Aug 13, 2013
Kind
B2
Abstract

Hybrid plasmonic waveguides are described that employ a high-gain semiconductor nanostructure functioning as a gain medium that is separated from a metal substrate surface by a nanoscale thickness thick low-index gap. The waveguides are capable of efficient generation of sub-wavelength high intensity light and have the potential for large modulation bandwidth >1 THz.

Claims (47)

1. A plasmon laser source, comprising:

a metal substrate;

a semiconductor material;

the semiconductor material being separated from a surface of the metal substrate by a low-refraction index gap; and

an electron pumping means;

wherein the electron pumping means is configured to excite an electron carrier population to generate a plasmonic laser emission from the low-refraction index gap;

wherein the plasmonic laser emission is confined by a plasmonic mode having a mode size smaller than a diffraction limit of light in at least one dimension.

2. A laser source as recited in claim 1 , wherein at least a portion of the electron carrier population travel from the metal substrate through the low-refraction index gap to the semiconductor material.

3. A laser source as recited in claim 1 , wherein the laser source supports a plasmonic mode having a mode size smaller than λ/2 in at least one dimension of the mode.

4. A laser source as recited in claim 3 , wherein the laser source supports a plasmonic mode having a mode size smaller than λ/20 in at least one dimension of the mode.

5. A laser source as recited in claim 1 , wherein the low-refraction index gap comprises a layer of material having a thickness that ranges between approximately 1 nm and approximately 100 nm.

6. A laser source as recited in claim 5 , wherein the low-refraction index gap comprises a layer of material having a thickness that ranges between approximately 2 nm and approximately 50 nm.

7. A laser source as recited in claim 6 , wherein the low-refraction index gap comprises a layer of material having a thickness that ranges between approximately 5 nm and approximately 10 nm.

8. A laser source as recited in claim 6 , the laser source generates a plasmonic mode emission having a mode size confined to be smaller than 10 nm in at least one dimension.

9. A laser source as recited in claim 1 , wherein the low-refraction index gap has an index of refraction between 1 and 2.

10. A laser source as recited in claim 9 , wherein the semiconductor material has an index of refraction between 2.5 and 3.5.

11. A laser source as recited in claim 1 , wherein the semiconductor material comprises a gain medium for amplifying light.

12. A laser source as recited in claim 1 , further comprising:

a positive charge carrier layer disposed over at least a portion of the semiconductor material opposite from said low-refraction index gap;

wherein the positive charge carrier is configured to allow hole electrons to travel through the positive charge carrier layer to the semiconductor material.

13. A laser source as recited in claim 1 , further comprising:

an electrode coupled to said hole injection layer;

wherein the electron pumping means comprises an electronic voltage source configured to apply an electrical bias across the electrode and the metal substrate.

14. A laser source as recited in claim 1 , wherein the semiconductor material comprises a nanowire having a first dimension less than 150 nm.

15. A laser source as recited in claim 1 :

wherein the semiconductor comprises a doped semiconductor,

wherein the electron pumping means comprises an electronic voltage source configured to apply an electrical bias across the doped semiconductor and the metal substrate;

the laser source comprising an MOS junction;

wherein the electrical bias is configured to generate an electron carrier inversion by biasing the MOS junction.

16. A laser source as recited in claim 1 , wherein said laser source operates at room temperature.

17. A laser source as recited in claim 1 , wherein said semiconductor gain material is configured to be selected from a plurality of different semiconductor materials to determine the wavelength of the plasmonic laser emission.

18. A laser source as recited in claim 1 , wherein the said semiconductor gain material is comprises a planar structure configured to confine plasmonic laser emission in only one dimension.

19. A laser source as recited in claim 18 , wherein said planar structure is sized to confine plasmonic laser emission in three dimensions.

20. A laser source as recited in claim 1 , wherein said laser source has a loss, in loss/wavelength units, of between 0.0001-0.1.

21. A laser source as recited in claim 1 , wherein the laser source is configured to support modulation speeds faster than 40 GHz.

22. A laser source as recited in claim 1 , wherein the laser source is configured to support modulation speeds faster than 1 THz.

23. A method for generating a plasmonic laser emission, the plasmonic laser emission having a mode size smaller than the diffraction limit of light, the method comprising the steps of:

generating an electrical bias across a metal substrate and a semiconductor material;

the semiconductor material being separated from a surface of the metal substrate by a low-refraction index gap;

exciting an electron carrier population within the semiconductor material; and

generating the plasmonic emission from the low-refraction index gap.

24. A method as recited in claim 23 , wherein the plasmonic mode has a mode size smaller than λ/2 in at least one dimension of the mode.

25. A method as recited in claim 24 , wherein the plasmonic mode has a mode size smaller than λ/20 in at least one dimension of the mode.

26. A method as recited in claim 23 , wherein the low-refraction index gap comprises a layer of material having a thickness that ranges between approximately 1 nm and approximately 100 nm.

27. A method as recited in claim 26 , wherein the low-refraction index gap comprises a layer of material having a thickness that ranges between approximately 2 nm and approximately 50 nm.

28. A method as recited in claim 27 , wherein the low-refraction index gap comprises a layer of material having a thickness that ranges between approximately 5 nm and approximately 10 nm.

29. A method as recited in claim 23 , wherein the electrical bias causes at least a portion of the electron carrier population to travel from the metal substrate through the low-refraction index gap to the semiconductor material.

Assignments (2)
CONFIRMATORY LICENSE Recorded Jun 11, 2015
From: UNIVERSITY OF CALIFORNIA, BERKELEY
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 035887/0922 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 12, 2013
From: ZHANG, XIANG; SORGER, VOLKER JENDRIK; OULTON, RUPERT FRANCIS MAXIMILLIAN; MA, REN-MIN
To: REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
Reel/Frame 029819/0049 →
Continuity (3)
Continuation PCTUS2011045633 · Jul 27, 2011
Provisional Application 61367924 · Jul 27, 2010
Related Publication 20130148682A1 · Jun 13, 2013