Thin film transistor array panel including layered line structure and method for manufacturing the same
The present invention provides a thin film transistor array panel comprising an insulating substrate; a gate line formed on the insulating substrate; a gate insulating layer formed on the gate line; a drain electrode and a data line having a source electrode formed on the gate insulating layer, the drain electrode being adjacent to the source electrode with a gap therebetween; and a pixel electrode coupled to the drain electrode, wherein at least one of the gate line, the data line, and the drain electrode comprises a first conductive layer comprising a conductive oxide and a second conductive layer comprising copper (Cu).
1. A thin film transistor array panel comprising:
an insulating substrate;
a gate line disposed on the insulating substrate;
a gate insulating layer which is in contact with the gate line;
a drain electrode and a data line having a source electrode disposed over the gate insulating layer, the drain electrode being adjacent to the source electrode with a gap therebetween; and
a pixel electrode coupled to the drain electrode,
wherein at least one of the gate line, the data line, and the drain electrode comprises a first layer comprising amorphous IZO, amorphous IZON, or an amorphous conductive oxide and a second layer comprising copper (Cu),
wherein the second layer is thicker than the first layer, and
wherein the first layer is in contact with the second layer.
2. The thin film transistor array panel of claim 1 , wherein the amorphous conductive oxide of the first layer comprises at least one of amorphous ITO and amorphous ITON.
3. The thin film transistor array panel of claim 1 , wherein the at least one of the gate line, the data line, and the drain electrode further comprises a third layer comprising a conductive oxide.
4. The thin film transistor array panel of claim 3 , wherein the third layer is contact with the second layer.
5. The thin film transistor array panel of claim 3 , wherein the second layer is thicker than the third layer.
6. The thin film transistor array panel of claim 3 , wherein the third layer comprises amorphous IZO, amorphous IZON, or an amorphous conductive oxide.
7. The thin film transistor array panel of claim 6 , wherein the amorphous conductive oxide of the third layer comprises at least one of amorphous ITO and amorphous ITON.