Replacement metal gate FinFET
A field effect transistor device includes a fin including a semiconductor material arranged on an insulator layer, the fin including a channel region, a hardmask layer arranged partially over the channel region of the fin, a gate stack arranged over the hardmask layer and over the channel region of the fin, a metallic alloy layer arranged on a first portion of the hardmask layer, the metallic alloy layer arranged adjacent to the gate stack, and a first spacer arranged adjacent to the gate stack and over the metallic alloy layer.
1. A field effect transistor (FET) device, comprising:
a fin including a semiconductor material arranged on an insulator layer, the fin including a channel region;
a hardmask layer disposed on the top surface of the fin, over the channel region,
a metallic alloy layer having first and second portions disposed on opposing ends of the hardmask layer, and over the channel region;
a gate stack formed on the hardmask layer and over the channel region, between the first and second portions of the metallic alloy layer, the gate stack including a dielectric layer; and
sidewall spacers adjacent sidewalls of the gate stack and over the channel region, wherein bottom surfaces of the sidewall spacers are formed on the first and second portions of the metallic alloy layer.
2. The FET device of claim 1 , wherein the gate stack comprises one or more of the dielectric layer, a work function metal layer, and a metallic gate material.
3. The FET device of claim 1 , wherein the metallic alloy layer includes a titanium nitride (TiN) material.
4. The FET device of claim 1 , wherein the hardmask layer includes an oxide material.
5. The FET device of claim 1 , wherein the sidewall spacers comprise one of an oxide material and a nitride material.