MEMs-based cantilever energy harvester
The claimed invention is directed to integrated energy-harvesting piezoelectric cantilevers. The cantilevers are fabricated using sol-gel processing using a sacrificial poly-Si seeding layer. Improvements in film microstructure and electrical properties are realized by introducing a poly-Si seeding layer and by optimizing the poling process.
1. A piezoelectric energy harvester comprising stacked layers wherein the stacked layers comprise a silicon substrate layered with a polysilicon layer, a thermal silicon oxide layer, a silicon nitride layer, a PECVD silicon oxide layer, a titanium oxide layer, a PT layer and a PZT-PZN or PZT layer.
2. The energy harvester of claim 1 , wherein the polysilicon layer is a sacrificial layer.
3. The energy harvester of claim 1 , wherein the polysilicon layer contacts the silicon substrate.
4. The energy harvester of claim 1 , wherein the thermal silicon oxide layer contacts the polysilicon layer.
5. The energy harvester of claim 1 , wherein the silicon nitride layer contacts the thermal silicon oxide layer.
6. The energy harvester of claim 1 , wherein the PECVD silicon oxide layer contacts the silicon nitride layer.
7. The energy harvester of claim 1 , wherein the titanium oxide layer contacts the PECVD silicon oxide layer.
8. The energy harvester of claim 1 , wherein the PT layer contacts the titanium oxide layer.
9. The energy harvester of claim 1 , wherein the PZT-PZN or PZT layer contacts the PT layer.
10. An energy harvesting circuit comprising: a vibrational energy harvesting device in accordance with claim 1 ; a power rectification circuit for converting oscillatory current electric power to direct current electric power; and an energy storage device.
11. The energy harvesting circuit as recited in claim 10 wherein the energy storage device is a battery.
12. The energy harvesting circuit as recited in claim 10 wherein the energy storage device is a capacitor.
13. The energy harvester of claim 1 , wherein the power density of the energy harvester ranges from 1250 to 1377.61 μW/inch2·g.
14. The energy harvester of claim 1 , wherein the output voltage density ranges from 3400 to 3600 V/in 2 .