Contactor devices with carbon nanotube probes embedded in a flexible film and processes of making such

1. A probe card assembly comprising:

an electrical interface to a tester that controls testing of a device under test;

a mass of flexible, resilient electrically insulating material;

electrically conductive columns of intertwined carbon nanotubes surrounded by said mass of material, each said column extending from a first side of said mass of material to a second side of said mass of material, wherein said second side is opposite said first side;

a wiring substrate comprising electrically conductive terminals extending from a first side of said wiring substrate into said columns, wherein said terminals are electrically connected to said interface; and

pairs of physically interlocked structures coupling said flexible mass of material to said wiring substrate, wherein:

a first one of said interlocked structures in each said pair is a receptacle,

a second one of said interlocked structures in each said pair is a protrusion inserted into and physically interlocked with said receptacle to form a press fit with said receptacle,

said mass of material comprises one of said receptacle or said protrusion of each said pair, and

said wiring substrate comprises the other of said receptacle or said protrusion of each said pair;

wherein ones of said terminals of said wiring substrate contact and are thereby electrically connected to corresponding ones of said carbon nanotube columns;

wherein said ones of said terminals extend into and are thereby at least partially embedded in said corresponding ones of said carbon nanotube columns.

2. The probe card assembly of claim 1 , wherein each said receptacle comprises a space between a group of rods extending from said first side of said wiring substrate or said first side of said mass of material.

3. The probe card assembly of claim 1 , wherein each said receptacle is into a surface of said first side of said wiring substrate or a surface of said first side of said mass of material.

4. The probe card assembly of claim 1 wherein:

said protrusions extend from said first side of said wiring substrate, and

said protrusions consist of substantially a same material as said terminals.

5. The probe card assembly of claim 1 , wherein said protrusion of each said pair:

has a conical shape in which a first end of said protrusion is wider than a second end of said protrusion, and

extends from said first side of said wiring substrate from said second end to said first end.

6. The probe card assembly of claim 5 , wherein said receptacle of each said pair:

has a conical shape in which an inner end of said receptacle is wider than an opening of said receptacle, and

extends into said first side of said mass of material from said opening to said inner end.

7. The probe card assembly of claim 1 , further comprising an adhesive disposed between said first side of said wiring substrate and said first side of said mass of material, wherein said adhesive adheres said first side of said mass of material to said first side of said wiring substrate.

8. The probe card assembly of claim 1 , wherein said mass of material is a silicone-based elastomer.

9. The probe card assembly of claim 1 , said carbon nanotube columns are disposed in a pattern in said mass of material that corresponds to terminals of an electronic device to be contacted and tested.

10. The probe card assembly of claim 9 , wherein each said carbon nanotube column is a probe for contacting one of said terminals of said electronic device to be contacted and tested.

11. The probe card assembly of claim 10 further comprising electrical paths from said interface to said carbon nanotube columns.

12. An electronic device comprising:

a probe film comprising a mass of flexible, resilient electrically insulating material and electrically conductive columns of intertwined carbon nanotubes embedded in said mass of material;

a wiring substrate comprising electrically conductive terminals extending from a first side of said wiring substrate into said columns; and

pairs of physically interlocked structures coupling said flexible mass of material to said wiring substrate, wherein:

a first one of said interlocked structures in each said pair is a receptacle, and

a second one of said interlocked structures in each said pair is a protrusion inserted into and physically interlocked with said receptacle to form a press fit with said receptacle;

said mass of material comprises one of said receptacle or said protrusion of each said pair, and

said wiring substrate comprises the other of said receptacle or said protrusion of each said pair;

wherein ones of said terminals of said wiring substrate contact and are thereby electrically connected to corresponding ones of said carbon nanotube columns;

wherein said ones of said terminals extend into and are thereby at least partially embedded in said corresponding ones of said carbon nanotube columns.

13. The electronic device of claim 12 , wherein at least one of said receptacles or said protrusions comprises an elastic material, and said interlocking of said receptacles and said protrusions precisely positions said probe film with respect to said wiring substrate by elastic averaging.

14. The electronic device of claim 12 , wherein each said receptacle comprises a space between a group of rods extending from said first side of said wiring substrate or a first side of said mass of material.

15. The electronic device of claim 12 , wherein each said receptacle is into a surface of said first side of said wiring substrate or a surface of a first side of said mass of material.

16. The electronic device of claim 12 , wherein said protrusion of each said pair:

has a conical shape in which a first end of said protrusion is wider than a second end of said protrusion, and

extends from said first side of said wiring substrate from said second end to said first end.

17. The electronic device of claim 16 , wherein said receptacle of each said pair:

has a conical shape in which an inner end of said receptacle is wider than an opening of said receptacle, and

extends into a first side of said mass of material from said opening to said inner end.

18. The electronic device of claim 12 , wherein said mass of material is a silicone-based elastomer.