Fin-type field effect transistors including aluminum doped metal-containing layer
A semiconductor device includes a fin-type active region; a gate dielectric layer covering an upper surface and opposite lateral surfaces of the fin-type active region; and a gate line extending on the gate dielectric layer to cover the upper surface and opposite lateral surfaces of the fin-type active region and to cross the fin-type active region. The gate line includes an aluminum (Al) doped metal-containing layer extending to cover the upper surface and opposite lateral surfaces of the fin-type active region to a uniform thickness, and a gap-fill metal layer extending on the Al doped metal-containing layer over the fin-type active region. Related fabrication methods are also described.
1. A semiconductor device comprising:
a first metal oxide semiconductor (MOS) transistor comprising a first fin-type active region having a first conductive channel region and a first gate line on the first fin-type active region, the first gate line comprising a first metal nitride-containing layer on an upper surface and opposite lateral surfaces of the first fin-type active region, and a first Al doped metal-containing layer on the first metal nitride-containing layer opposite the first fin-type active region; and
a second MOS transistor comprising a second fin-type active region having a second conductive channel region that is different conductivity type from the first conductive channel region and a second gate line on the second fin-type active region, the second gate line comprising a second metal nitride-containing layer on an upper surface and opposite lateral surfaces of the second fin-type active region and having a greater thickness than a thickness of the first metal nitride-containing layer, and a second Al doped metal-containing layer on the second metal nitride-containing layer opposite the second fin-type active region and having a same thickness as a thickness of the first Al doped metal-containing layer,
wherein the second metal nitride-containing layer comprises a first metal nitride-containing sub-layer on the upper surface and opposite lateral surfaces of the second fin-type active region, and a second metal nitride-containing sub-layer on the first metal nitride-containing sub-layer opposite the second fin-type active region, and
wherein each of the first metal nitride-containing sub-layer and the second metal nitride-containing sub-layer includes a Ti nitride layer including Ti and N, wherein the amount of N is greater than the amount of Ti.
2. The semiconductor device of claim 1 , wherein the first Al doped metal-containing layer comprises Ta or Ti, and
wherein an atomic % of Al is greater than an atomic % of at least one first metal, in the first Al doped metal-containing layer.
3. The semiconductor device of claim 1 , wherein an atomic % of nitrogen contained in the first metal nitride-containing sub-layer is equal to or greater than an atomic % of nitrogen contained in the second metal nitride-containing sub-layer.
4. The semiconductor device of claim 3 ,
wherein the first metal nitride-containing layer has same composition as that of the second metal nitride-containing sub-layer and has same thickness as that of the second metal nitride-containing sub-layer.
5. The semiconductor device of claim 1 ,
wherein the second Al doped metal-containing layer has same composition as that of the first Al doped metal-containing layer.
6. The semiconductor device of claim 1 , wherein each of the first and second Al doped metal-containing layers comprises an M x Al y C z layer, wherein M is Ta or Ti, x, y, and z are each atomic %, 5≦x≦45, 10≦y≦65, 0≦z≦45, and x+y+z≦100, and wherein x<y.
7. The semiconductor device of claim 1 , wherein each of the first and second Al doped metal-containing layers comprises an M x Al y C z layer, wherein M is Ta or Ti, x, y, and z are each atomic %, 5≦x≦45, 10≦y≦65, 0≦z≦45, and x+y+z≦100, and wherein 0.3<(y/x)≦10.
8. The semiconductor device of claim 1 , wherein each of the first and second metal nitride-containing layers comprises a nitride of titanium (Ti), tantalum (Ta), tungsten (W), ruthenium (Ru), niobium (Nb), molybdenum (Mo) and/or hafnium (Hf).
9. A semiconductor device comprising:
a N-type metal oxide semiconductor (MOS) transistor comprising a first fm-type active region, a first gate line including a first metal nitride-containing layer on an upper surface and Opposite lateral surfaces of the first fin-type active region, and a first Al doped metal-containing layer on the first metal nitride-containing layer opposite the first fin-type active region; and
a P-type MOS transistor comprising a second fin-type active region, a second gate line including a second metal nitride-containing layer on an upper surface and Opposite lateral surfaces of the second fin-type active region and having a greater thickness than a thickness of the first metal nitride-containing layer, and a second Al doped metal-containing layer on the second metal nitride-containing layer opposite the second fin-type active region and having a same thickness as a thickness of the first Al doped metal-containing layer.
10. The semiconductor device of claim 9 , wherein the second metal nitride-containing layer has a greater thickness than a thickness of the first Al doped metal-containing layer.
11. The semiconductor device of claim 9 , wherein the second metal nitride-containing layer comprises a first metal nitride-containing sub-layer on the upper surface and opposite lateral surfaces of the second fin-type active region, and a second metal nitride-containing sub-layer on the first metal nitride-containing sub-layer opposite the second fin-type active region.
12. The semiconductor device of claim 11 , wherein a first metal nitride-containing sub-layer has a thickness greater than a thickness of the second metal nitride-containing sub-layer.
13. The semiconductor device of claim 9 , wherein the first gate line further comprises a first a gap-fill metal layer extending on the first Al doped metal-containing layer remote from the first fin-type active region, and
wherein the second gate line further comprises a second a gap-fill metal layer extending on the second Al doped metal-containing layer remote from the second fin-type active region.
14. The semiconductor device of claim 13 , wherein the first gate line further comprises a first capping layer interposed between the first Al doped metal-containing layer and the first gap-fill metal layer,
wherein the second gate line further comprises a second capping layer interposed between the second Al doped metal-containing layer and the second gap-fill metal layer, and
wherein the second capping layer is a same thickness as a thickness of the first capping layer.
15. The semiconductor device of claim 14 , wherein each of the first and second capping layers comprises TiN, TaN, or a combination thereof.
16. The semiconductor device of claim 9 , wherein each of the first and second Al doped metal-containing layers comprises an M x Al y C z layer, wherein M is Ta or Ti, x, y, and z are each atomic %, 5≦x≦45, 10≦y≦65, 0≦z≦45, and x+y+z≦100, and wherein x<y.
17. The semiconductor device of claim 9 , wherein each of the first and second Al doped metal-containing layers comprises an M x Al y C z layer, wherein M is Ta or Ti, x, y, and z are each atomic %, 5≦x≦45, 10≦y≦65, 0≦z≦45, and x+y+z≦100, and wherein 0.3<(y/x)≦10.
18. The semiconductor device of claim 9 , wherein each of the first and second metal nitride-containing layers comprises a nitride of titanium (Ti), tantalum (Ta), tungsten (W), ruthenium (Ru), niobium (Nb), molybdenum (Mo) and/or hafnium (Hf).
19. The semiconductor device of claim 13 , wherein the first gate line further comprises a first metal oxide layer interposed between the first Al doped metal-containing layer and the first gap-fill metal layer,
wherein the second gate line further comprises a second metal oxide layer interposed between the second Al doped metal-containing layer and the second gap-fill metal layer.
20. The semiconductor device of claim 19 , wherein the metal oxide layer comprises a TaO layer, a TiO layer and/or an AlO layer.