Inspection apparatus and inspection method
View Patent ↗The invention is directed to find a false defect from defect candidates and obtain a threshold with which the false defect can be eliminated by the smallest number of review times. Defect candidates are reviewed and selected as a defect or a false defect. By deleting a defect candidate having a characteristic quantity equal to or less than that of the false defect from a map or displaying it in another sign, the false defect can be determined visually. Since the defect candidate having the characteristic quantity equal to or less than that of the selected false defect is deleted from the map or displayed in another sign, the defect candidates unnecessary to set a threshold are not reviewed. The number of defect candidates to be reviewed can be largely reduced as compared with that in the conventional technique. Further, by repeating the above work, the threshold is automatically calculated, and an inspection result map with the threshold is displayed, so that a re-inspection is unnecessary.
1. An inspection apparatus comprising:
an illumination optical system which illuminates an object with light;
a detection optical system which detects light from the object;
a display system which displays a defect candidate group so as to correspond to coordinates on the object, based on a detection result from the detection optical system;
an input system for selecting a defect candidate having an arbitrary detection recall factor from the defect candidate group displayed on the display system; and
a processing system programmed to perform the process functions of:
i) in the case where an arbitrary defect candidate selected from the defect candidate group by the input system is determined as a false defect, classifying the defect candidate group into a defect or false defect based on a detection recall factor of the determined false defect; and
ii) obtaining a threshold for determining whether there is a defect on the object based on the classification result,
wherein the display system is configured to reflect the classification result, and
the input system is capable of selecting a plurality of arbitrary defect candidates on the display system.
2. The inspection apparatus according to claim 1 , wherein the display system is configured to delete from the displayed object a defect candidate which is classified into the false defect in the classification.
3. The inspection apparatus according to claim 1 , wherein the display system is configured to display a defect candidate which is classified into the false defect in the classification and a defect candidate which is classified into the defect in the classification in different signs on the displayed object.
4. The inspection apparatus according to claim 1 , wherein the display system is configured to display distribution of the defect candidate group.
5. A method for setting a condition for inspection, the method comprising steps of:
illuminating an object with light;
detecting light from the object;
selecting a plurality of defect candidates having an arbitrary detection recall factor from a display screen which displays a defect candidate group so as to correspond to coordinates on the object;
each time the defect candidate is determined as a false defect, obtaining a position on the object of a defect to be classified and a position on the object of the false defect based on a detection recall factor of the determined false defect; and
obtaining a threshold for inspection from the classification result.
6. The method according to claim 5 , further comprising the step of:
obtaining the threshold which is updated each time the false defect is determined.