Radiation-sensitive resin composition, method for forming resist pattern, and polymer and compound
A radiation-sensitive resin composition that provides a resist coating film in a liquid immersion lithography process is provided, the radiation-sensitive resin composition being capable of exhibiting a great dynamic contact angle during exposure, whereby the surface of the resist coating film can exhibit a superior water draining property, and the radiation-sensitive resin composition being capable of leading to a significant decrease in the dynamic contact angle during development, whereby generation of development defects can be inhibited, and further shortening of a time period required for change in a dynamic contact angle is enabled. A radiation-sensitive resin composition including (A) a polymer having a structural unit (I) represented by the following formula (1), and (B) a radiation-sensitive acid generator.
1. A radiation-sensitive resin composition comprising:
(A) a polymer comprising:
a structural unit (I) represented by formula (1); and
at least one structural unit selected from the group consisting of a structural unit (II) represented by formula (2) and a structural unit (III) represented by formula (3); and
(B) a radiation-sensitive acid generator:
wherein, in the formula (1), R represents a hydrogen atom, a methyl group or a trifluoromethyl group; R L1 represents a bivalent linking group; Rf 3 represents a monovalent aromatic hydrocarbon group which does not have or optionally has a substituent, a monovalent chain hydrocarbon group having a fluorine atom, or a monovalent alicyclic hydrocarbon group having a fluorine atom; and X represents a bivalent hydrocarbon group having 1 to 20 carbon atoms and having at least one fluorine atom,
wherein:
in the formulae (2) and (3), R represents a hydrogen atom, a methyl group or a trifluoromethyl group;
in the formula (2), G represents a single bond, an oxygen atom, a sulfur atom, —CO—O—, —SO 2 —O—NH—, —CO—NH—, or —O—CO—NH—; and R 1 represents a monovalent chain hydrocarbon group having 1 to 6 carbon atoms and having at least one fluorine atom, or a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms and having at least one fluorine atom; and
in the formula (3), R 2 represents a hydrocarbon group having a valency of (m+1) and having 1 to 20 carbon atoms, or a group in which an oxygen atom, a sulfur atom, —NR′—, a carbonyl group, —CO—O— or —CO—NH— is bound to a hydrocarbon group having a valency of (m+1) and having 1 to 20 carbon atoms at an end of R 3 side, wherein R′ represents a hydrogen atom or a monovalent organic group; R 3 represents a single bond, a bivalent chain hydrocarbon group having 1 to 10 carbon atoms or a bivalent alicyclic hydrocarbon group having 4 to 20 carbon atoms; X 2 represents a bivalent chain hydrocarbon group having 1 to 20 carbon atoms and having at least one fluorine atom; A represents an oxygen atom, —NR″—, —CO—O—* or —SO 2 —O—*, wherein R″ represents a hydrogen atom or a monovalent organic group and * denotes a site bound to R 4 ; R 4 represents an acid-dissociable group or an alkali-dissociable group; and m is an integer of 1 to 3, wherein in a case where m is 2 or 3, a plurality of R 3 s, X 2 s, As and R 4 s are each independent.
2. The radiation-sensitive resin composition according to claim 1 , wherein the structural unit (I) is a structural unit (I-1) represented by formula (1-1):
wherein, in the formula (1-1), R L11 represents a single bond or a bivalent linking group; and R, Rf 3 and X are as defined in the formula (1).
3. The radiation-sensitive resin composition according to claim 2 , wherein the structural unit (I-1) is at least one selected from the group consisting of structural units each represented by formulae (1-1a) to (1-1e):
wherein, in the formulae (1-1a) to (1-1e), R, R L11 and Rf 3 are as defined in the formula (1-1).
4. The radiation-sensitive resin composition according to claim 1 , wherein the Rf 3 is at least one selected from the set consisting of groups each represented by formulae (Rf 3 -a) to (Rf 3 -d):
wherein, in the formulae (Rf 3 -a) to (Rf 3 -d), Rf 31 each independently represents a monovalent organic group having a fluorine atom; R s11 each independently represents a substituent; n f1 is each independently 0 or 1; n f11 is an integer of 1 to (5+2n f1 ); n f12 is an integer of 0 to (5+2n f1 ), wherein an inequality of: (n f11 +n f12 )≦(5+2n f1 ) is satisfied; and n f13 is an integer of 0 to (5+2n f1 ).
5. The radiation-sensitive resin composition according to claim 1 , wherein the content of the structural unit (I) in the polymer (A) is no less than 30 mol % and no greater than 100 mol %.
6. The radiation-sensitive resin composition according to claim 1 further comprising (C) a polymer having a content of fluorine atoms less than a content of fluorine atoms of the polymer (A), the polymer (C) comprising an acid-dissociable group.
7. The radiation-sensitive resin composition according to claim 6 , wherein the content of the polymer (A) is no less than 0.1 parts by mass and no greater than 10 parts by mass with respect to 100 parts by mass of the polymer (C).
8. A method for forming a resist pattern comprising:
forming a photoresist film on a substrate using the radiation-sensitive resin composition according to claim 1 ;
subjecting the photoresist film to liquid immersion lithography; and
forming a resist pattern by developing the photoresist film subjected to the liquid immersion lithography.
9. The radiation-sensitive resin composition according to claim 1 , wherein the content of the structural unit (II) in the polymer (A) is from 5 mol % to 30 mol %.
10. The radiation-sensitive resin composition according to claim 1 , wherein the polymer (A) comprises the structural unit (III) represented by the formula (3), and at least one R 4 represents an acid-dissociable group.
11. The radiation-sensitive resin composition according to claim 1 , wherein the polymer (A) comprises the structural unit (III) represented by the formula (3), and at least one R 4 represents an alkali-dissociable group.
12. The radiation-sensitive resin composition according to claim 1 , wherein in the formula (3), m is 2 or 3.
13. A polymer comprising:
a structural unit (I) represented by formula (1); and
at least one structural unit selected from the group consisting of a structural unit (II) represented by formula (2) and a structural unit (III) represented by formula (3):
wherein, in the formula (1), R represents a hydrogen atom, a methyl group or a trifluoromethyl group; R L1 represents a bivalent linking group; Rf 3 represents a monovalent aromatic hydrocarbon group which does not have or optionally has a substituent, a monovalent chain hydrocarbon group having a fluorine atom, or a monovalent alicyclic hydrocarbon group having a fluorine atom; and X represents a bivalent hydrocarbon group having 1 to 20 carbon atoms and having at least one fluorine atom,
wherein:
in the formulae (2) and (3), R represents a hydrogen atom, a methyl group or a trifluoromethyl group;
in the formula (2), G represents a single bond, an oxygen atom, a sulfur atom, —CO—O—, —SO 2 —O—NH—, —CO—NH—, or —O—CO—NH—; and R 1 represents a monovalent chain hydrocarbon group having 1 to 6 carbon atoms and having at least one fluorine atom, or a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms and having at least one fluorine atom; and
in the formula (3), R 2 represents a hydrocarbon group having a valency of (m+1) and having 1 to 20 carbon atoms, or a group in which an oxygen atom, a sulfur atom, —NR′—, a carbonyl group, —CO—O— or —CO—NH— is bound to a hydrocarbon group having a valency of (m+1) and having 1 to 20 carbon atoms at an end of R 3 side, wherein R′ represents a hydrogen atom or a monovalent organic group; R 3 represents a single bond, a bivalent chain hydrocarbon group having 1 to 10 carbon atoms or a bivalent alicyclic hydrocarbon group having 4 to 20 carbon atoms; X 2 represents a bivalent chain hydrocarbon group having 1 to 20 carbon atoms and having at least one fluorine atom; A represents an oxygen atom, —NR″—, —CO—O—* or —SO 2 —O—*, wherein R″ represents a hydrogen atom or a monovalent organic group and * denotes a site bound to R 4 ; R 4 represents an acid-dissociable group or an alkali-dissociable group; and m is an integer of 1 to 3, wherein in a case where m is 2 or 3, a plurality of R a s, X 2 s, As and R 4 s are each independent.
14. The polymer according to claim 13 , wherein the structural unit (I) is a structural unit (I-1) represented by formula (1-1):
wherein, in the formula (1-1), R L11 represents a single bond or a bivalent linking group; and R, Rf 3 and X are as defined in the formula (1).
15. The polymer to claim 14 , wherein the structural unit (I-1) is at least one selected from the group consisting of structural units each represented by formulae (1-1a) to (1-1e):
wherein, in the formulae (1-1a) to (1-1e), R, R L11 and Rf 3 are as defined in the formula (1-1).
16. The polymer according to claim 13 , wherein the Rf 3 is at least one selected from the set consisting of groups each represented by formulae (Rf 3 -a) to (Rf 3 -d):
wherein, in the formulae (Rf 3 -a) to (Rf 3 -d), Rf 31 each independently represents a monovalent organic group having a fluorine atom; R S11 each independently represents a substituent; n f1 is each independently 0 or 1; n f11 is an integer of 1 to (5+2n f1 ); n f12 is an integer of 0 to (5+2n f1 ), wherein an inequality of: (n f11 +n f12 )<(5+2n f1 ) is satisfied; and n f13 is an integer of 0 to (5+2n f1 ).
17. The polymer according to claim 13 , wherein the content of the structural unit (I) in the polymer is no less than 30 mol % and no greater than 100 mol %.
18. The polymer according to claim 13 , wherein the content of the structural unit (II) in the polymer is from 5 mol % to 30 mol %.
19. The polymer according to claim 13 , wherein the polymer comprises the structural unit (III) represented by the formula (3), and at least one R 4 represents an acid-dissociable group.
20. The polymer according to claim 13 , wherein the polymer comprises the structural unit (III) represented by the formula (3), and at least one R 4 represents an alkali-dissociable group.
21. The polymer according to claim 13 , wherein in the formula (3), m is 2 or 3.