Laser optical system using optical fiber transmission
A laser optical system using optical fiber transmission, includes a first optical fiber for transmitting laser light emitted from a laser oscillator, a collimator lens for collimating laser light emitted from the first optical fiber, a spherical array lens including a plurality of cells for converging laser light emitted from the collimator lens into a plurality of spots, a plurality of second optical fibers each having a smaller core diameter than the first optical fiber and configured to admit the laser light converged into the corresponding spot by the spherical array lens, the second optical fibers having output ends that have mutually parallel axial lines and are arranged linearly in a single row, and a linearization optical unit for shaping laser light emitted from the second optical fibers into laser light having a linear cross section at an illuminated surface.
1. A laser optical system using optical fiber transmission, comprising:
a first optical fiber for transmitting laser light emitted from a laser oscillator;
a collimator lens for collimating laser light emitted from the first optical fiber;
an array lens including a plurality of cells for converging laser light emitted from the collimator lens into a plurality of spots;
a plurality of second optical fibers each having a smaller core diameter than the first optical fiber and configured to admit the laser light converged into the corresponding spot by the array lens, the second optical fibers having output ends that have mutually parallel axial lines and are arranged linearly in a single row; and
a linearization optical unit for shaping laser light emitted from the second optical fibers into laser light having a linear cross section at an illuminated surface.
2. The laser optical system using optical fiber transmission according to claim 1 , wherein if the first optical fiber has a core diameter of A, a widthwise NA of a condenser lens that converges the laser light onto the illuminated surface is N, and a widthwise dimension of the laser light on the illuminated surface is C, C<A is satisfied insofar as N<1.
3. The laser optical system using optical fiber transmission according to claim 1 , wherein if the first optical fiber has a core diameter of A and a NA of B, the second optical fibers have a core diameter of L and a NA of K, the laser light at the collimator lens has a beam diameter of D 4 and a circle circumscribing each cell of the array lens is D 5 , D 4 /D 5 =(A×B)/(L×K) holds.
4. The laser optical system using optical fiber transmission according to claim 1 , wherein the linearization optical unit comprises
a first cylindrical lens for refracting the laser light emitted from each second optical fiber in a direction along which the second optical fibers are arranged;
a second cylindrical lens for refracting the laser light emitted from each second optical fiber perpendicularly to the direction along which the second optical fibers are arranged;
a cylindrical array lens for refracting the laser light emitted from the first and second cylindrical lenses in the direction along which the second optical fibers are arranged;
a third cylindrical lens for refracting the laser light emitted from the cylindrical array lens in a direction along which the second optical fibers are arranged by using the Kohler illumination theory; and
a fourth cylindrical lens for refracting the laser light emitted from the cylindrical array lens perpendicularly to a direction along which the second optical fibers are arranged by using an optical image forming relationship with respect to the second cylindrical lens.
5. The laser optical system using optical fiber transmission according to claim 2 , wherein if the first optical fiber has a core diameter of A and a NA of B, the second optical fibers have a core diameter of L and a NA of K, the laser light at the collimator lens has a beam diameter of D 4 and a circle circumscribing each cell of the array lens is D 5 , D 4 /D 5 =(A×B)/(L×K) holds.
6. The laser optical system using optical fiber transmission according to claim 2 , wherein the linearization optical unit comprises
a first cylindrical lens for refracting the laser light emitted from each second optical fiber in a direction along which the second optical fibers are arranged;
a second cylindrical lens for refracting the laser light emitted from each second optical fiber perpendicularly to the direction along which the second optical fibers are arranged;
a cylindrical array lens for refracting the laser light emitted from the first and second cylindrical lenses in the direction along which the second optical fibers are arranged;
a third cylindrical lens for refracting the laser light emitted from the cylindrical array lens in a direction along which the second optical fibers are arranged by using the Kohler illumination theory; and
a fourth cylindrical lens for refracting the laser light emitted from the cylindrical array lens perpendicularly to a direction along which the second optical fibers are arranged by using an optical image forming relationship with respect to the second cylindrical lens.
7. The laser optical system using optical fiber transmission according to claim 3 , wherein the linearization optical unit comprises
a first cylindrical lens for refracting the laser light emitted from each second optical fiber in a direction along which the second optical fibers are arranged;
a second cylindrical lens for refracting the laser light emitted from each second optical fiber perpendicularly to the direction along which the second optical fibers are arranged;
a cylindrical array lens for refracting the laser light emitted from the first and second cylindrical lenses in the direction along which the second optical fibers are arranged;
a third cylindrical lens for refracting the laser light emitted from the cylindrical array lens in a direction along which the second optical fibers are arranged by using the Kohler illumination theory; and
a fourth cylindrical lens for refracting the laser light emitted from the cylindrical array lens perpendicularly to a direction along which the second optical fibers are arranged by using an optical image forming relationship with respect to the second cylindrical lens.