Light emitting diode and method of fabricating the same
View Patent ↗Exemplary embodiments of the present invention disclose a light emitting diode including an n-type contact layer doped with silicon, a p-type contact layer, an active region disposed between the n-type contact layer and the p-type contact layer, a superlattice layer disposed between the n-type contact layer and the active region, the superlattice layer including a plurality of layers, an undoped intermediate layer disposed between the superlattice layer and the n-type contact layer, and an electron reinforcing layer disposed between the undoped intermediate layer and the superlattice layer. Only a final layer of the superlattice layer closest to the active region is doped with silicon, and the silicon doping concentration of the final layer is higher than that of the n-type contact layer.
1. A light emitting diode, comprising:
an n-type contact layer doped with silicon;
a p-type contact layer;
an active region disposed between the n-type contact layer and the p-type contact layer, the active region comprising a barrier layer and a well layer;
a superlattice layer disposed between the n-type contact layer and the active region, the superlattice layer comprising a plurality of layers;
an undoped intermediate layer disposed between the superlattice layer and the n-type contact layer; and
an electron reinforcing layer disposed between the undoped intermediate layer and the superlattice layer,
wherein:
only a final layer of the superlattice layer closest to the active region is doped with silicon, and the silicon doping concentration of the final layer is higher than that of the n-type contact layer; and
the superlattice layer comprises a (Al, In, Ga) N-based group III-nitride semiconductor layer having a smaller bandgap than that of the barrier layer and a larger bandgap than that of the well layer.
2. The light emitting diode of claim 1 , wherein the final layer of the superlattice layer contacts the active region.
3. The light emitting diode of claim 1 , wherein the electron reinforcing layer is doped with silicon, and the silicon doping concentration of the electron reinforcing layer is higher than that of the n-type contact layer.
4. The light emitting diode of claim 3 , wherein the electron reinforcing layer contacts the superlattice layer.
5. The light emitting diode of claim 4 , wherein the electron reinforcing layer comprises GaN, the superlattice layer comprises an alternately stacked GaN layer and InGaN layer, and the final layer of the superlattice layer comprises GaN.
6. The light emitting diode of claim 5 , wherein the n-type contact layer comprises a GaN layer, and the undoped layer comprises GaN.
7. The light emitting diode of claim 1 , wherein the silicon doping concentration of the final layer of the superlattice layer is the same as that of the electron reinforcing layer.
8. The light emitting diode of claim 1 ,
wherein the n-type contact layer comprises at least two n-type GaN layers and an n-type AIGaN layer disposed between the at least two n-type GaN layers.
9. The light emitting diode of claim 1 , further comprising:
a substrate;
a low-temperature buffer layer disposed on the substrate; and
an undoped GaN layer disposed between the low-temperature buffer layer and the n-type contact layer.