AlGaInP-based semiconductor laser
View Patent ↗An aluminium gallium indium phosphide (AlGaInP)-based semiconductor laser device is provided. On a main surface of a semiconductor substrate formed of n-type GaAs (gallium arsenide), from the bottom layer, an n-type buffer layer, an n-type cladding layer formed of an AlGaInP-based semiconductor containing silicon (Si) as a dopant, an active layer, a p-type cladding layer formed of an AlGaInP-based semiconductor containing magnesium (Mg) or zinc (Zn) as a dopant, an etching stopper layer, and a p-type contact layer are formed. Here, when an Al composition ratio x of the AlGaInP-based semiconductor is taken as a composition ratio of Al and Ga defined as (Al x Ga 1−x ) 0.5 In 0.5 P, a composition of the n-type cladding layer is expressed as (Al xn Ga 1−xn ) 0.5 In 0.5 P (0.9<xn<1) and a composition of the p-type cladding layer is expressed as (Al xp Ga 1−xp ) 0.5 In 0.5 P (0.9<xp≦1), and xn and xp satisfy a relationship of xn<xp.
1. A semiconductor laser chip comprising:
an n-type cladding layer having a composition of (Al xn Ga 1−xn )0.5 In 0.5 P;
a p-type cladding layer having a composition of (Al xp Ga 1−xp )0.5 In 0.5 P where xp is 1;
a ridge portion configured for optical confinement, located on the p-type cladding layer;
an active layer provided between the n-type cladding layer and the p-type cladding layer,
an n-side electrode located on the n-type cladding layer;
a p-side electrode located on the ridge portion; and
wherein a difference between the Al composition ratio xp of the p-type cladding layer and the Al composition ratio xn of the n-type cladding layer satisfies a relationship of 0.02<xp−xn<=0.05.
2. The semiconductor laser chip according to claim 1 , wherein a dopant concentration of the p-type cladding layer is within a range from 6×10 17 cm −3 to 1.3×10 18 cm −3 .
3. The semiconductor laser chip according to claim 1 , wherein a dopant concentration of the n-type cladding layer is within a range from 1×10 17 cm −3 to 6×10 17 cm −3 .
4. The semiconductor laser chip according to claim 1 ,
wherein a dopant concentration of the p-type cladding layer is higher than a dopant concentration of the n-type cladding layer.
5. The semiconductor laser chip according to claim 1 ,
wherein a thickness of the p-type cladding layer is smaller than a thickness of the n-type cladding layer.
6. The semiconductor laser chip according to claim 1 , wherein the active layer is formed of GaInP or AlGaInP, includes one or two well layers having a thickness from 3 nm to 6 nm, and is oscillated in a TE mode.
7. The semiconductor laser chip according to claim 1 , further comprising:
a submount mounting a semiconductor chip to which the semiconductor laser is formed in a junction-down manner;
a stem loading the sub mount; and
a package in contact with the stem, in which the semiconductor chip is hermetic sealed with a cap.
8. The semiconductor laser chip according to claim 1 , wherein xn is 0.95.
9. The semiconductor laser chip according to claim 1 , wherein xn is 0.96.
10. The semiconductor laser chip according to claim 1 , wherein xn is 0.97.
11. The semiconductor laser chip according to claim 1 ,
wherein the active layer comprises:
a first optical guiding layer;
a second optical guiding layer;
a first well layer;
a second well layer; and
a barrier layer.
12. The semiconductor laser chip according to claim 11 ,
wherein the first optical guiding layer and the second optical guiding layer are formed of un-doped AlGaInP.
13. The semiconductor laser chip according to claim 12 ,
wherein the first well layer and the second well layer are formed from un-doped GaInP or AlGaInP.
14. The semiconductor laser chip according to claim 13 ,
wherein the barrier layer is formed from un-doped AlGaInP.
15. The semiconductor laser chip according to claim 13 ,
wherein said barrier layer is between 5 nm and 10 nm thick.
16. The semiconductor laser chip according to claim 11 ,
wherein the first optical guiding layer and the second optical guiding layer are formed from (Al x Ga 1−x ) 0.5 In 0.5 P, and wherein an Al composition ratio of x is from 0.4 to 0.8.
17. The semiconductor laser chip according to claim 11 ,
wherein the first well layer and the second well layer are formed from (Al x Ga 1−x ) 0.5 In 0.5 P, and wherein an Al composition ratio of x is from 0 to 0.15.
18. The semiconductor laser chip according to claim 11 ,
wherein the barrier layer is formed from (Al x Ga 1−x ) 0.5 In 0.5 P and wherein the Al composition ratio of x is from 0.4 to 0.8.
19. The semiconductor laser chip according to claim 11 ,
wherein the first optical guiding layer and the second optical guiding layer are from between 20 nm and 150 nm thick.
20. The semiconductor laser chip according to claim 11 ,
wherein the first well layer and the second well layer are from between 3 nm and 6 nm thick.