CHEMICAL VAPOR DEPOSITION OF GRAPHENE USING A SOLID CARBON SOURCE
Aspects of the invention are directed to a method of forming a film on a substrate. The substrate and a solid carbon source are placed into a reactor. Subsequently, both the substrate and the solid carbon source are heated. Optionally, one or more process gases may be introduced into the reactor to help drive the formation of the film. The film comprises graphene.
1 . A method of forming a film on a substrate, the method comprising the steps of:
placing the substrate into a reactor;
placing a solid carbon source into the reactor; and
heating both the substrate and the solid carbon source in the reactor;
wherein the film comprises graphene.
2 . The method of claim 1 , wherein the reactor is a chemical vapor deposition reactor.
3 . The method of claim 1 , wherein the reactor is a chemical vapor deposition tube furnace.
4 . The method of claim 1 , wherein the film substantially consists of a single layer of graphene.
5 . The method of claim 1 , wherein the film comprises multiple layers of graphene.
6 . The method of claim 1 , wherein the substrate comprises a metal.
7 . The method of claim 6 , wherein the metal comprises copper.
8 . The method of claim 1 , wherein the solid carbon source comprises graphite.
9 . The method of claim 1 , wherein the solid carbon source comprises amorphous carbon.
10 . The method of claim 1 , wherein the substrate is stacked on top of the solid carbon source in the reactor.
11 . The method of claim 1 , wherein the substrate is placed apart from the solid carbon source in the reactor.
12 . The method of claim 1 , wherein the substrate at least partially surrounds the solid carbon source in the reactor.
13 . The method of claim 1 , further comprising the step of introducing one or more process gases into the reactor.
14 . The method of claim 13 , wherein the one or more process gases comprise hydrogen.
15 . The method of claim 13 , wherein the one or more process gases comprise nitrogen.
16 . The method of claim 13 , wherein the one or more process gases comprise a noble gas.
17 . The method of claim 13 , wherein the one or more process gases comprise hydrogen in addition to at least one of nitrogen and a noble gas.
18 . The method of claim 1 , wherein the heating step comprises heating the substrate and the solid carbon source to between about 600 degrees Celsius and about 1,400 degrees Celsius.
19 . The method of claim 1 , further comprising the step of maintaining a pressure in the reactor at less than atmospheric pressure.
20 . The method of claim 1 , further comprising the step of waiting a sufficient time for forming the film while the substrate and the solid carbon source are heated.