Semiconductor device and method of fabricating the same
A semiconductor device and a method for manufacturing the same are capable of improving GIDL in a buried gate, and preventing degradation of device characteristics and reliability due to reduction in gate resistance. The semiconductor device may include: junction regions formed at both sidewalls of a trench formed in a semiconductor substrate; a first gate electrode formed in a lower portion of the trench; a second gate electrode formed on at least one inner sidewall of the trench which overlaps one of the junction regions on the first gate electrode; and a third gate electrode formed on one side of the second gate electrode on the first gate electrode.
1. A semiconductor device, comprising:
a semiconductor substrate having a trench, the trench having first and second sides;
junction regions formed in the semiconductor substrate and disposed over the first and the second sides of the trench;
a first gate electrode formed in a lower portion of the trench;
a second gate electrode formed over at least one inner sidewall of the trench, formed to overlap one of the junction regions, and formed over the first gate electrode; and
a third gate electrode formed over one side of the second gate electrode and over the first gate electrode,
wherein the second gate electrode is electrically coupled to the first gate electrode.
2. The semiconductor device of claim 1 , the device further comprising a barrier layer disposed between the second gate electrode and the third gate electrode that electrically couples the second gate electrode and the third gate electrode.
3. The semiconductor device of claim 1 , wherein the second gate electrode is formed over both inner sidewalls of the trench.
4. The semiconductor device of claim 3 , wherein the third gate electrode is formed between portions of the second gate electrode formed over both inner sidewalls of the trench.
5. The semiconductor device of claim 4 , wherein the first gate electrode and the third gate electrode each include metal and the second gate electrode includes polysilicon.
6. The semiconductor device of claim 1 , wherein the second gate electrode is formed over the one inner sidewall of the trench adjacent to a storage node contact.
7. The semiconductor device of claim 6 , wherein the third gate electrode is formed in the trench at the one side of the second gate electrode over the first gate electrode.
8. The semiconductor device of claim 1 , wherein the second gate electrode has a height to overlap the junction regions.
9. The semiconductor device of claim 1 , device further comprising a sealing layer formed over the second gate electrode and the third gate electrode.
10. The semiconductor device of claim 1 , wherein the second gate electrode and the third gate electrode are electrically coupled to the first gate electrode.