Vertical nanowire transistor with axially engineered semiconductor and gate metallization
View Patent ↗Vertically oriented nanowire transistors including semiconductor layers or gate electrodes having compositions that vary over a length of the transistor. In embodiments, transistor channel regions are compositionally graded, or layered along a length of the channel to induce strain, and/or include a high mobility injection layer. In embodiments, a gate electrode stack including a plurality of gate electrode materials is deposited to modulate the gate electrode work function along the gate length.
1. A vertical nanowire transistor having a longitudinal axis perpendicularly oriented to a surface plane of a crystalline substrate, the transistor comprising:
a group IV or group III-V epitaxial source semiconductor layer vertically aligned with an epitaxial group IV or group III-V drain semiconductor layer along the longitudinal axis;
a group IV or group III-V epitaxial channel semiconductor layer disposed between source and drain semiconductor layers, the channel semiconductor layer having an epitaxial film thickness, wherein the source semiconductor layer has a lower effective mass along a transport direction and/or a higher density of states mass in the plane perpendicular to the transport direction than that of the channel and drain semiconductor layers; and
an annular gate electrode surrounding a sidewall of the semiconductor channel layer, separated by an annular gate dielectric layer, and wherein the composition of at least one of the gate electrode or the semiconductor layers varies along the longitudinal axis.
2. The vertical nanowire transistor of claim 1 , wherein the channel semiconductor layer has a compositional variation between a first interface with the source semiconductor layer and a second interface with the drain semiconductor layer.
3. The vertical nanowire transistor of claim 2 , wherein the compositional variation further comprises a grading of the channel semiconductor layer throughout the epitaxial film thickness.
4. The vertical nanowire transistor of claim 3 , wherein the channel semiconductor comprises a SiGe alloy, and wherein the Ge content is higher at the first interface than at the second interface, or wherein the channel semiconductor comprises a In alloy, and wherein the In content is higher at the first interface than at the second interface.
5. The vertical nanowire transistor of claim 4 , wherein the source and drain semiconductor layers are silicon with b-dopant concentration profiles aligned to the first and second interfaces.
6. The vertical nanowire transistor of claim 2 , wherein the compositional variation further comprises a lightly doped or intrinsic high mobility injection layer disposed proximate to the first interface.
7. The vertical nanowire transistor of claim 6 , wherein the channel semiconductor is silicon or a SiGe alloy, and wherein the high mobility injection layer is disposed directly on the source semiconductor layer and is composed of Ge.
8. The vertical nanowire transistor of claim 6 , wherein the compositional variation further comprises a grading of the channel semiconductor layer from the high mobility injection layer to the second interface.
9. A vertical nanowire transistor having a longitudinal axis perpendicularly oriented to a surface plane of a crystalline substrate, the transistor comprising:
a group IV or group III-V epitaxial source semiconductor layer vertically aligned with an epitaxial group IV or group III-V drain semiconductor layer along the longitudinal axis;
a group IV or group III-V epitaxial channel semiconductor layer disposed between source and drain semiconductor layers, the channel semiconductor layer having an epitaxial film thickness; and
an annular gate electrode surrounding a sidewall of the semiconductor channel layer, separated by an annular gate dielectric layer, and wherein the composition of at least one of the gate electrode or the semiconductor layers varies along the longitudinal axis, wherein the composition of the gate electrode in direct contact with the gate dielectric varies along the longitudinal axis to differentiate the work function from a first level proximate to the source semiconductor layer to a second level proximate to the drain semiconductor layer.
10. The vertical nanowire transistor of claim 9 , wherein the work function of the gate electrode is greater proximate to the drain semiconductor layer than proximate to the source semiconductor layer.
11. The vertical nanowire transistor of claim 10 , wherein the gate electrode composition is graded from a first alloy composition proximate to the source semiconductor layer to a second alloy composition proximate to the drain semiconductor layer.
12. The vertical nanowire transistor of claim 10 , wherein the channel semiconductor layer has a compositional variation between a first interface with the source semiconductor layer and a second interface with the drain semiconductor layer, the semiconductor compositional variation to magnify a difference in transistor threshold voltage associated with the differentiation in the gate electrode work function.
13. The vertical nanowire transistor of claim 10 , wherein the channel semiconductor layer further comprises a lightly doped or intrinsic high mobility injection layer disposed proximate to the source semiconductor layer.
14. A vertical nanowire transistor having a longitudinal axis perpendicularly oriented to a surface plane of a crystalline substrate, the transistor comprising:
a group IV or group III-V epitaxial source semiconductor layer vertically aligned with an epitaxial group IV or group III-V drain semiconductor layer along the longitudinal axis;
a group IV or group III-V epitaxial channel semiconductor layer disposed between source and drain semiconductor layers, the channel semiconductor layer having an epitaxial film thickness, wherein the channel semiconductor layer has a compositional variation between a first interface with the source semiconductor layer and a second interface with the drain semiconductor layer, and wherein the compositional variation further comprises a grading of the channel semiconductor layer throughout the epitaxial film thickness; and
an annular gate electrode surrounding a sidewall of the semiconductor channel layer, separated by an annular gate dielectric layer, and wherein the composition of at least one of the gate electrode or the semiconductor layers varies along the longitudinal axis.
15. The vertical nanowire transistor of claim 14 , wherein the channel semiconductor comprises a SiGe alloy, and wherein the Ge content is higher at the first interface than at the second interface, or wherein the channel semiconductor comprises a In alloy, and wherein the In content is higher at the first interface than at the second interface.
16. The vertical nanowire transistor of claim 15 , wherein the source and drain semiconductor layers are silicon with b-dopant concentration profiles aligned to the first and second interfaces.
17. A vertical nanowire transistor having a longitudinal axis perpendicularly oriented to a surface plane of a crystalline substrate, the transistor comprising:
a group IV or group III-V epitaxial source semiconductor layer vertically aligned with an epitaxial group IV or group III-V drain semiconductor layer along the longitudinal axis;
a group IV or group III-V epitaxial channel semiconductor layer disposed between source and drain semiconductor layers, the channel semiconductor layer having an epitaxial film thickness, wherein the channel semiconductor layer has a compositional variation between a first interface with the source semiconductor layer and a second interface with the drain semiconductor layer, wherein the compositional variation further comprises a lightly doped or intrinsic high mobility injection layer disposed proximate to the first interface, and wherein the channel semiconductor is silicon or a SiGe alloy, and wherein the high mobility injection layer is disposed directly on the source semiconductor layer and is composed of Ge; and
an annular gate electrode surrounding a sidewall of the semiconductor channel layer, separated by an annular gate dielectric layer, and wherein the composition of at least one of the gate electrode or the semiconductor layers varies along the longitudinal axis.
18. A vertical nanowire transistor having a longitudinal axis perpendicularly oriented to a surface plane of a crystalline substrate, the transistor comprising:
a group IV or group III-V epitaxial source semiconductor layer vertically aligned with an epitaxial group IV or group III-V drain semiconductor layer along the longitudinal axis;
a group IV or group III-V epitaxial channel semiconductor layer disposed between source and drain semiconductor layers, the channel semiconductor layer having an epitaxial film thickness, wherein the channel semiconductor layer has a compositional variation between a first interface with the source semiconductor layer and a second interface with the drain semiconductor layer, wherein the compositional variation further comprises a lightly doped or intrinsic high mobility injection layer disposed proximate to the first interface, and wherein the compositional variation further comprises a grading of the channel semiconductor layer from the high mobility injection layer to the second interface; and
an annular gate electrode surrounding a sidewall of the semiconductor channel layer, separated by an annular gate dielectric layer, and wherein the composition of at least one of the gate electrode or the semiconductor layers varies along the longitudinal axis.