Display device
According to one embodiment, a display device includes a substrate, a thin film transistor, a passivation film, a hydrogen barrier film, a pixel electrode, an organic light emitting layer, an opposite electrode, and a sealing film. The thin film transistor is provided on a major surface of the substrate. The thin film transistor includes a gate electrode, a gate insulating film, a semiconductor film, a first conducting portion, and a second conducting portion. The passivation film is provided on the thin film transistor. The hydrogen barrier film is provided on the passivation film. The pixel electrode is electrically connected to one of the first conducting portion and the second conducting portion. The organic light emitting layer is provided on the pixel electrode. The opposite electrode is provided on the organic light emitting layer. The sealing film is provided on the hydrogen barrier film and the opposite electrode.
1. A display device comprising:
a substrate having a major surface, the substrate being light transmissive;
a thin film transistor provided on the major surface, the thin film transistor including:
a gate electrode provided on the major surface;
a gate insulating film provided on the gate electrode;
a semiconductor film provided on the gate insulating film, the semiconductor film including a first region, a second region apart from the first region, and a third region provided between the first region and the second region;
a first conducting portion electrically connected to the first region; and
a second conducting portion electrically connected to the second region and provided apart from the first conducting portion;
a passivation film provided on the thin film transistor, the passivation film being insulative;
a hydrogen barrier film provided on the passivation film and overlapping with the semiconductor film when projected onto a plane parallel with the major surface;
a pixel electrode electrically connected to one of the first conducting portion and the second conducting portion, the pixel electrode being light transmissive;
an organic light emitting layer provided on the pixel electrode;
an opposite electrode provided on the organic light emitting layer; and
a sealing film provided on the hydrogen barrier film and on the opposite electrode, the sealing film including hydrogen of 10 19 atoms/cm 3 or more.
2. The device according to claim 1 , wherein the hydrogen barrier film includes one of Ti, Ta, TiN and TaN.
3. The device according to claim 1 , wherein the hydrogen barrier film includes an oxide including at least one of In, Zn, Ga, Ti, and Al.
4. The device according to claim 1 , wherein the hydrogen barrier film is electrically connected to the one of the first conducting portion and the second conducting portion.
5. The device according to claim 1 , wherein
the semiconductor film is of an n-type, and
the hydrogen barrier film is electrically connected to the pixel electrode.
6. The device according to claim 1 , wherein
the semiconductor film is of a p-type, and
the hydrogen barrier film is electrically connected to the other of the first conducting portion and the second conducting portion.
7. The device according to claim 1 , wherein the hydrogen barrier film includes a material the same as a material of the pixel electrode.
8. The device according to claim 7 , wherein the pixel electrode includes at least one of ITO, IZO, AZO, IGZO, and ZnO.
9. The device according to claim 1 , wherein the semiconductor film includes an oxide semiconductor including at least one of In, Ga, and Zn.
10. The device according to claim 1 , wherein the opposite electrode extends on the semiconductor film and on the hydrogen barrier film.
11. The device according to claim 1 , wherein the substrate includes a resin material and is flexible.
12. The device according to claim 1 , wherein
the gate insulating film is disposed between the gate electrode and the third region.
13. The device according to claim 12 , wherein the thin film transistor further includes a channel protection film provided at least on the third region.
14. The device according to claim 1 , wherein the opposite electrode includes a metal material.
15. The device according to claim 1 , wherein a thickness of the hydrogen barrier film is 20 nm or more and 150 nm or less.
16. The device according to claim 1 , further comprising a color filter,
the passivation film extending between the pixel electrode and the major surface, and
the color filter being provided between the pixel electrode and the passivation film and on the hydrogen barrier film.
17. The device according to claim 1 , further comprising a color filter,
the passivation film extending between the pixel electrode and the major surface, and
the color filter being disposed between the pixel electrode and the passivation film and extending between the passivation film and the hydrogen barrier film.
18. A display device comprising:
a substrate having a major surface, the substrate being light transmissive;
a thin film transistor provided on the major surface, the thin film transistor including:
a gate electrode provided on the major surface;
a gate insulating film provided on the gate electrode;
a semiconductor film provided on the gate insulating film, the semiconductor film including a first region, a second region apart from the first region, and a third region provided between the first region and the second region;
a first conducting portion electrically connected to the first region; and
a second conducting portion electrically connected to the second region and provided apart from the first conducting portion;
a passivation film provided on the thin film transistor, the passivation film being insulative;
a hydrogen barrier film provided on the passivation film and overlapping with the semiconductor film when projected onto a plane parallel with the major surface;
a pixel electrode electrically connected to one of the first conducting portion and the second conducting portion, the pixel electrode being light transmissive;
an organic light emitting layer provided on the pixel electrode;
an opposite electrode provided on the organic light emitting layer; and
a sealing film provided on the hydrogen barrier film and on the opposite electrode,
wherein
the hydrogen barrier film includes a material the same as a material of the pixel electrode, and
the hydrogen barrier film continues to the pixel electrode.
19. The device according to claim 18 , wherein the sealing film includes at least one of a silicon oxide film, a silicon nitride film, and a silicon oxynitride film.