Methods of exposing conductive vias of semiconductor devices and associated structures
View Patent ↗Methods of exposing conductive vias of semiconductor devices may comprise conformally forming a barrier material over conductive vias extending from a backside surface of a substrate. A self-planarizing isolation material may be formed over the barrier material. An exposed surface of the self-planarizing isolation material may be substantially planar. A portion of the self-planarizing isolation material, a portion of the barrier material, and a portion of protruding material of the conductive vias may be removed to expose the conductive vias. Removal of the self-planarizing isolation material, the barrier material, and the conductive vias may be stopped after exposing at least one laterally extending portion of the barrier material.
1. A method of exposing conductive vias of a semiconductor device, comprising:
conformally forming a barrier material comprising silicon nitride, silicon oxide, silicon carbide, or any combination of these over conductive vias extending from a backside surface of a substrate;
forming a self-planarizing isolation material over the barrier material, wherein an exposed surface of the self-planarizing isolation material is substantially planar;
removing a portion of the self-planarizing isolation material, a portion of the barrier material, and a portion of protruding material of the conductive vias to expose the conductive vias; and
stopping removal of the self-planarizing isolation material, the barrier material, and the conductive vias after exposing at least one laterally extending portion of the barrier material.
2. The method of claim 1 , wherein conformally forming the barrier material over the conductive vias comprises conformally forming the barrier material to a thickness less than a protruding height of a shortest protruding portion of a conductive via.
3. The method of claim 2 , wherein conformally forming the barrier material to the thickness less than the protruding height of the shortest protruding portion of a conductive via comprises conformally forming the barrier material to a thickness of about 15,000 Å or less.
4. The method of claim 3 , wherein conformally forming the barrier material to a thickness of 15,000 Å or less comprises conformally forming the barrier material to a thickness of between about 800 Å and about 2,500 Å.
5. The method of claim 1 , wherein removing the portion of the self-planarizing isolation material, the portion of the barrier material, and a portion of protruding material of the conductive vias comprises selectively removing a first portion of the self-planarizing isolation material at a first rate and subsequently removing a second portion of the self-planarizing isolation material, the portion of the barrier material, and the portion of protruding material of the conductive vias at a second, slower rate.
6. The method of claim 1 , further comprising stopping removal in response to detecting a change in rate of removal of at least one of the self-planarizing isolation material, the barrier material, and the conductive vias, a change in amount of ammonia gas present, or a change in light reflectivity of the semiconductor device.
7. The method of claim 1 , wherein stopping removal of the self-planarizing isolation material, the barrier material, and the conductive vias after exposing the at least one laterally extending portion of the barrier material comprises stopping removal after exposing all of the barrier material extending laterally over the backside surface of the substrate.
8. The method of claim 1 , further comprising removing a portion of the substrate at the backside surface to expose portions of the conductive vias before conformally forming the barrier material over the conductive vias.
9. The method of claim 1 , wherein forming the self-planarizing isolation material over the barrier material comprises forming a first self-planarizing isolation material over the barrier material and a second, different self-planarizing isolation material over the first self-planarizing isolation material.
10. The method of claim 9 , wherein forming the first self-planarizing isolation material over the barrier material and the second self-planarizing isolation material over the first self-planarizing isolation material comprises forming a first self-planarizing isolation material exhibiting a first removal rate over the barrier material and a second self-planarizing isolation material exhibiting a second, faster removal rate over the first self-planarizing isolation material.
11. The method of claim 1 , further comprising forming a conformal isolation material comprising an oxide or a nitride over the barrier material before forming the self-planarizing isolation material.
12. A method of exposing conductive vias of a semiconductor device, comprising:
removing a portion of a substrate at a backside surface opposing an active surface of the substrate to expose portions of conductive vias;
conformally forming a barrier material comprising silicon nitride, silicon oxide, silicon carbide, or any combination of these over the conductive vias to a thickness less than a protruding height of a shortest conductive via;
forming a self-planarizing isolation material over the barrier material, wherein an exposed surface of the self-planarizing isolation material is substantially planar;
removing a portion of the self-planarizing isolation material, a portion of the barrier material, and a portion of protruding material of the conductive vias to expose the conductive vias; and
stopping removal of the self-planarizing isolation material, the barrier material, and the conductive vias after exposing at least one laterally extending portion of the barrier material abutting the backside surface of the substrate.
13. The method of claim 12 , wherein conformally forming the barrier material to the thickness less than the protruding height of the shortest conductive via comprises conformally forming the barrier material to a thickness of 2,500 Å or less.
14. The method of claim 12 , further comprising removing a first portion of the self-planarizing isolation material at a first rate and wherein removing the portion of the self-planarizing isolation material, the portion of the barrier material and the portion of protruding material of the conductive vias comprises subsequently removing a second portion of the self-planarizing isolation material, the portion of the barrier material, and the portion of protruding material of the conductive vias at a second, slower rate.
15. The method of claim 12 ,
wherein forming the self-planarizing isolation material over the barrier material comprises forming a first self-planarizing isolation material over the barrier material, and
further comprising forming a second, different self-planarizing isolation material over the first self-planarizing isolation material,
wherein removing the portion of the self-planarizing isolation material, the portion of the barrier material, and the portion of protruding material of the conductive vias comprises removing a portion of the second self-planarizing isolation material at a first rate and subsequently removing a remainder of the second self-planarizing isolation material, a portion of the first self-planarizing isolation material, the portion of the barrier material and the portion of protruding material of the conductive vias at a second, slower rate.
16. The method of claim 15 , wherein forming the first self-planarizing isolation material comprises forming a self-planarizing precursor material and curing the self-planarizing precursor material to form a silicon oxide.
17. The method of claim 12 , further comprising forming a conformal isolation material comprising a silicon oxide or silicon nitride over the barrier material before forming the self-planarizing isolation material, wherein a combined thickness of the conformal isolation material and the barrier material is less than the protruding height of the shortest protruding portion of the conductive via.
18. A method of exposing conductive vias of a semiconductor device, comprising:
conformally forming a barrier material comprising silicon nitride, silicon oxide, silicon carbide, or any combination of these over conductive vias extending from a backside surface of a substrate;
forming a conformal isolation material over the barrier material;
forming a self-planarizing isolation material over the conformal isolation material, wherein an exposed surface of the self-planarizing isolation material is substantially planar;
removing a portion of the self-planarizing isolation material, a portion of the conformal isolation material, a portion of the barrier material, and a portion of protruding material of the conductive vias to expose the conductive vias; and
stopping removal of the self-planarizing isolation material, the barrier material, and the conductive vias after exposing at least one laterally extending portion of the conformal isolation material.
19. The method of claim 18 , wherein removing the portion of the self-planarizing isolation material, the portion of the conformal isolation material, the portion of the barrier material, and the portion of protruding material of the conductive vias comprises selectively etching a first portion of the self-planarizing isolation at a first rate and subsequently chemically mechanically polishing a second portion of the conformal isolation material, the portion of the barrier material, and the portion of protruding material of the conductive vias at a second, slower rate.
20. The method of claim 18 , wherein a combined thickness of the barrier material and the conformal isolation material is less than a difference in elevation between the backside surface of the substrate at a thickest portion of the substrate and a protruding portion of a conductive via.
21. A semiconductor device, comprising:
conductive vias in a substrate and comprising exposed surfaces at a backside surface of the substrate;
a barrier material comprising silicon nitride, silicon oxide, silicon carbide, or any combination of these surrounding the conductive vias; and
a self-planarizing isolation material over at least a portion of the barrier material and located between the conductive vias,
wherein at least one laterally extending portion of the barrier material is exposed adjacent an associated conductive via.
22. The semiconductor device of claim 21 , wherein exposed surfaces of the conductive vias, the barrier material, and the self-planarizing isolation material are at least substantially coplanar.
23. The semiconductor device of claim 21 , wherein a thickness of the barrier material is less than a difference in elevation between the backside surface of the substrate at a thickest portion of the substrate and a protruding portion of a conductive via.
24. The semiconductor device of claim 21 , further comprising a conformal isolation material comprising silicon oxide interposed between the barrier material and the self-planarizing isolation material.
25. The semiconductor device of claim 21 , wherein the self-planarizing isolation material exhibits a first removal rate and the barrier material exhibits a second, slower removal rate.
26. An electronic system, comprising:
a first semiconductor device, comprising:
conductive vias in a substrate and comprising exposed surfaces at a backside surface of the substrate;
a barrier material comprising silicon nitride, silicon oxide, or both surrounding the conductive vias; and
a self-planarizing isolation material over at least a portion of the barrier material and located between the conductive vias,
wherein at least one laterally extending portion of the barrier material is exposed adjacent an associated conductive via; and
a second semiconductor device operatively connected to the first semiconductor device.