Semiconductor device and method for manufacturing the device
A semiconductor device includes a N-type field effect transistor comprising a N-channel region in a substrate. A high dielectric constant (high-k) layer is disposed on the N-channel region. A diffusion layer including a metal oxide is disposed on the high-k layer. A passivation layer is disposed on the diffusion layer, and a first metal gate is disposed on the passivation layer. The first high-k layer and the N-channel region include metal atoms of a metal element of the metal oxide.
1. A semiconductor device comprising a N-type field effect transistor, the N-type field effect transistor comprising:
a first high dielectric constant (high-k) layer disposed on a substrate;
a first diffusion layer including a metal oxide disposed on the first high-k layer;
a first passivation layer disposed on the first diffusion layer; and
a first metal gate disposed on the first passivation layer,
wherein the metal oxide is at least one of Y 2 O 3 , Lu 2 O 3 , and SrO.
2. The semiconductor device of claim 1 , wherein the first passivation layer includes a metal nitride layer for preventing the first diffusion layer from being oxidized.
3. The semiconductor device of claim 2 , wherein the metal nitride layer includes at least one of TiN and TaN.
4. The semiconductor device of claim 1 , wherein the first diffusion layer has a thickness of about 3 to about 10 Å.
5. The semiconductor device of claim 1 , wherein the first passivation layer has a thickness of about 11 to about 70 Å.
6. The semiconductor device of claim 1 , wherein the first metal gate includes a N-type work function layer having a thickness of about 30 to about 120 Å.
7. The semiconductor device of claim 1 , wherein the N-type field effect transistor further comprises a first interface layer disposed between the high-k layer and the substrate, wherein the first interlace layer has a dielectric constant less than that of the high-k layer.
8. The semiconductor device of claim 1 further comprising a P-type field effect transistor comprising a second high dielectric constant (high-k) layer disposed on the substrate.
9. The semiconductor device of claim 8 , wherein the P-type field effect transistor further comprising:
a diffusion barrier layer formed on the second high-k;
a second diffusion layer disposed on the diffusion barrier layer;
a second passivation layer disposed on the second diffusion layer; and
a second metal gate disposed on the second passivation
wherein the diffusion barrier layer prevents metal atoms of the second diffusion layer from being diffused into the second high-k layer and the substrate.
10. The semiconductor device of claim 8 , wherein the first high-k layer includes substantially the same high-k material as that of the second high-k layer.
11. The semiconductor device of claim 9 , wherein the diffusion barrier layer includes a metal nitride layer and a metal layer.
12. The semiconductor device of claim 11 , wherein the metal nitride layer includes TiN and the metal layer includes Al.
13. The semiconductor device of claim 11 , wherein the diffusion barrier layer has a thickness of about 1 to about 100 Å.
14. The semiconductor device of claim 11 , wherein the diffusion barrier layer includes a P-type work function layer having a thickness of about 50 to 100 Å.
15. The semiconductor device of claim 9 , wherein the second high-k layer has a U shape whose lower sidewall is covered with the diffusion barrier and whose upper sidewall is covered with the second diffusion layer.
16. A semiconductor device comprising a N-type field effect transistor and a P-type field effect transistor, the N-type field effect transistor comprising:
a N-channel region in a substrate,
a first high dielectric constant (high-k) layer disposed on the N-channel region,
a first diffusion layer including a metal oxide having a metal element disposed on the first high-k layer,
a first passivation layer disposed on the first diffusion layer, and
a first metal gate disposed on the first passivation layer, wherein the first high-k layer includes metal atoms of the metal element of the metal oxide,
the P-type field effect transistor comprising:
a second high-k layer disposed on a P-channel region in the substrate;
a diffusion barrier layer formed on the second high-k layer disposed on the P-channel region;
a second diffusion layer including a metal oxide disposed on the diffusion barrier layer,
a second passivation layer disposed on the second diffusion layer disposed on the diffusion barrier layer, and
a second metal gate disposed on the second passivation layer over the P-channel region;
wherein the diffusion barrier layer prevents the metal atoms of the second diffusion layer from being diffused into the second high-k layer,
wherein the metal element includes at least one of La, Y, Lu and St, and
wherein the diffusion barrier layer has a U shape of which upper surface is covered with the second diffusion layer.
17. The semiconductor device of claim 16 , the metal atoms are diffused from the metal oxide of the first diffusion layer.