Wafer scale thermoelectric energy harvester

1. A microfabricated thermoelectric energy harvester, comprising:

an integrated circuit substrate comprising an integrated circuit;

a thermoelectric device, including a plurality of p-type and n-type thermoelectric elements formed as layers on the integrated circuit substrate and connected in series while alternating between the p-type and the n-type thermoelectric elements and coupled to the integrated circuit; and

a cap monolithically integrated with the integrated circuit substrate to enclose the thermoelectric elements between the cap and the integrated circuit substrate.

2. The microfabricated thermoelectric energy harvester of claim 1 , wherein a low pressure is provided around the thermoelectric elements and between the cap and the substrate.

3. The microfabricated thermoelectric energy harvester of claim 1 , further comprising a thermal contact layer disposed above the cap.

4. The microfabricated thermoelectric energy harvester of claim 1 , wherein each thermoelectric element has a top and a bottom, wherein the top of one thermoelectric element is connected to the top of a first adjacent thermoelectric element and the bottom of the one thermoelectric element is connected to the bottom of a second adjacent thermoelectric element.

5. The microfabricated thermoelectric energy harvester of claim 4 , wherein the thermoelectric elements are connected via interconnects and a barrier metal is included between each interconnect and the thermoelectric elements.

6. The microfabricated thermoelectric energy harvester of claim 1 , wherein each p-type thermoelectric element is adjacent to only n-type thermoelectric elements.

7. The microfabricated thermoelectric energy harvester of claim 1 , wherein the integrated circuit substrate is a semiconductor substrate.

8. The microfabricated thermoelectric energy harvester of claim 1 , wherein a vacuum is provided around the thermoelectric elements and between the cap and the integrated circuit substrate.

9. The microfabricated thermoelectric energy harvester of claim 1 , wherein the cap includes a substrate.

10. The microfabricated thermoelectric energy harvester of claim 1 , further comprising a plurality of conductive interconnects formed as at least one layer on the cap, the plurality of conductive interconnects electrically connecting the p-type and n-type thermoelectric elements.

11. The microfabricated thermoelectric energy harvester of claim 10 , further comprising a barrier metal formed as at least one layer between the plurality of conductive interconnects and the p-type and n-type thermoelectric elements.

12. The microfabricated thermoelectric energy harvester of claim 1 , further comprising a thermal contact layer group formed on and separate from the cap, the thermal contact layer group including a non-conductive layer and a metal layer, wherein the non-conductive layer is thinner than the metal layer.

13. The microfabricated thermoelectric energy harvester of claim 1 , further comprising a dielectric layer formed over the substrate, wherein the plurality of p-type and n-type thermoelectric elements are disposed within the dielectric layer.

14. The microfabricated thermoelectric energy harvester of claim 13 , wherein the dielectric layer is a polyimide layer.

15. The microfabricated thermoelectric energy harvester of claim 13 , wherein the plurality of p-type and n-type thermoelectric elements have higher thermal conductivity than the dielectric layer.

16. The microfabricated thermoelectric energy harvester of claim 13 , wherein the dielectric layer is an electrical insulator and has a lower thermal conductivity than the substrate.

17. The microfabricated thermoelectric energy harvester of claim 1 , further comprising an additional circuit component formed at least one of: on the integrated circuit substrate, or in the integrated circuit substrate.

18. The microfabricated thermoelectric energy harvester of claim 17 , wherein an output of the thermoelectric device is connected to the additional circuit component to provide electrical energy to the additional circuit component.

19. The microfabricated thermoelectric energy harvester of claim 18 , wherein the additional circuit component includes a sensor.

20. The microfabricated thermoelectric energy harvester of claim 17 , wherein the additional circuit component is connected to the thermoelectric device to control the thermoelectric device.

21. The microfabricated thermoelectric energy harvester of claim 17 , wherein the additional circuit component is connected to the thermoelectric device to provide a current to control the thermoelectric device to provide cooling.

22. The microfabricated thermoelectric energy harvester of claim 1 , wherein the plurality of p-type and n-type thermoelectric elements have a concentration of at least one of a doping level or a scattering element that is increased at one end of the thermoelectric elements as compared to an opposite end of the thermoelectric elements.

23. A microfabricated thermoelectric energy harvester, comprising:

an integrated circuit substrate comprising an integrated circuit;

means for providing a plurality of p-type thermoelectric conduction paths as layers on the integrated circuit substrate;

means for providing a plurality of n-type thermoelectric conduction paths as layers on the integrated circuit substrate and coupled to the integrated circuit, the means for providing the plurality of n-type thermoelectric conduction paths connected to and alternating with the means for providing the plurality of p-type thermoelectric conduction paths; and

means for enclosing an area about the means for providing the plurality of n-type thermoelectric conduction paths and the means for providing the plurality of p-type thermoelectric conduction paths on the integrated circuit substrate.