Method of fabricating a nitride semiconductor light emitting device
View Patent ↗According to one embodiment, in a nitride semiconductor light emitting device, a first clad layer includes an n-type nitride semiconductor. An active layer is formed on the first clad layer, and includes an In-containing nitride semiconductor. A GaN layer is formed on the active layer. A first AlGaN layer is formed on the GaN layer, and has a first Al composition ratio. A p-type second AlGaN layer is formed on the first AlGaN layer, has a second Al composition ratio higher than the first Al composition ratio, and contains a larger amount of Mg than the GaN layer and the first AlGaN layer. A second clad layer is formed on the second AlGaN layer, and includes a p-type nitride semiconductor.
1. A method for manufacturing a nitride semiconductor light emitting device, comprising:
forming an active layer including an In-containing nitride semiconductor on a first layer including an n-type nitride semiconductor;
forming a GaN layer and a first AlGaN layer having a first Al composition ratio on the active layer in order by metal organic chemical vapor deposition at a first growth temperature in a nitrogen gas atmosphere without doping with Mg;
forming a second AlGaN layer on the first AlGaN layer by metal organic chemical vapor deposition at a second growth temperature, in an atmosphere mainly containing a hydrogen gas with doping with Mg, the second AlGaN layer having a second Al composition ratio larger than the first Al composition ratio, and the second growth temperature being higher than the first growth temperature; and
forming a second layer including a p-type nitride semiconductor on the second AlGaN layer.
2. The method for manufacturing the nitride semiconductor light emitting device according to claim 1 , wherein the first Al composition ratio is greater than 0 and not greater than 0.01.
3. The method for manufacturing the nitride semiconductor light emitting device according to claim 1 , wherein a concentration of Mg in each of the GaN layer and the first AlGaN layer is not greater than 1E18 cm −3 .
4. The method for manufacturing the nitride semiconductor light emitting device according to claim 1 , wherein the first AlGaN layer has a smaller thickness than the GaN layer.
5. The method for manufacturing the nitride semiconductor light emitting device according to claim 1 , wherein a concentration of Mg in the GaN layer is not greater than 1E18 cm −3 .
6. The method for manufacturing the nitride semiconductor light emitting device according to claim 1 , wherein a concentration of Mg in the first AlGaN layer is not greater than 1E18 cm −3 .
7. The method for manufacturing the nitride semiconductor light emitting device according to claim 1 , wherein a concentration of Mg in the GaN layer is not greater than 1E18 cm −3 , the first AlGaN layer is formed on the GaN layer, the first Al composition ratio is greater than 0 and not greater than 0.01, a concentration of Mg in the first AlGaN layer is not greater than 1E18 cm −3 and the first AlGaN layer has a smaller thickness than the GaN layer.