Method For Producing An Emitter Of A Solar Cell And Solar Cell

1 . A method of producing an emitter of a solar cell comprising:

introducing a first dopant into a solar cell substrate through a surface of the solar-cell substrate;

forming a diffusion barrier layer on the surface of the solar cell substrate which is impenetrable by a second dopant, and

arranging the second dopant on the diffusion barrier layer.

2 . The method of claim 1 , wherein an aperture is formed in the diffusion barrier layer for introducing the second dopant through the aperture into the solar cell substrate.

3 . The method of claim 1 , wherein forming the diffusion barrier layer comprises forming an oxide layer on the surface of the solar-cell substrate.

4 . The method of claim 3 , wherein introducing the first dopant comprises driving the first dopant into the solar cell substrate with oxygen.

5 . The method of claim 4 , wherein an amount of oxygen is increased during the driving in process by standard cubic centimetres per minute.

6 . The method of claim 4 , wherein an amount of oxygen is between 150 sccm and 5000 sccm.

7 . The method of claim 1 , wherein in during at least one of the steps of introducing the first dopant, of forming the diffusion barrier layer and of arranging the second dopant, a temperature between 780° C. and 860° C. is set.

8 . The method of claim 1 , wherein a duration of time of at least one of the steps of introducing the first dopant, of forming the diffusion barrier layer and of arranging the second dopant is between 5 minutes and 20 minutes.

9 . The method of claim 1 , wherein a layer thickness of the diffusion barrier layer is between 10 nm and 50 nm.

10 . The method of claim 1 , wherein the solar cell substrate has a p-doping and the first and the second dopant are n-dopants.

11 . The method of claim 1 , wherein the solar cell substrate has an n-doping and the first and the second dopant are p-dopants.

12 . A method of producing an emitter of a solar cell comprising:

depositing phosphorus on a surface of a solar cell substrate;

introducing phosphorus into the solar cell substrate through the surface of the solar cell substrate with oxygen, said introducing with oxygen simultaneously comprising driving the phosphorus into the solar cell substrate with oxygen and forming a diffusion barrier layer on the surface of the solar cell substrate which is impenetrable by a second dopant, and

arranging the second dopant on the diffusion barrier layer.

13 . The method of claim 12 , wherein the phosphorus is deposited on the surface of the solar cell substrate in form of phosphorus silicate glass.

14 . The method of claim 12 , wherein phosphorus silicate glass is deposited on the diffusion barrier layer in order to arrange phosphorus as a second dopant.

15 . The method of claim 13 , wherein the phosphorus silicate glass is deposited by means of phosphorus oxychloride and oxygen, wherein an amount of phosphorus oxychloride is between 500 sccm and 1500 sccm and an amount of oxygen is between 150 sccm and 5000 sccm.

16 . The method of claim 14 , wherein the phosphorus silicate glass is deposited with of phosphorus oxychloride and oxygen, wherein an amount of phosphorus oxychloride is between 500 sccm and 1500 sccm and an amount of oxygen is between 150 sccm and 5000 sccm.

17 . A solar cell comprising an emitter, said emitter comprising:

a first dopant introduced into a solar cell substrate through a surface of the solar cell substrate,

a diffusion barrier layer on the surface of the solar cell substrate which is impenetrable by a second dopant, and

the second dopant arranged on the diffusion barrier layer.

18 . The solar cell of claim 19 , wherein the first dopant is phosphorus, said phosphorus being deposited on the surface of the solar cell substrate in form of phosphorus silicate glass, being introduced into the solar cell substrate through the surface of the solar cell substrate by means of oxygen, said introducing by means of oxygen simultaneously comprising driving the phosphorus into the solar cell substrate by means of oxygen and forming the diffusion barrier layer on the surface of the solar cell substrate.

19 . The solar cell of claim 19 , wherein the second dopant is phosphorus, said phosphorus being deposited on the on the diffusion barrier layer in form of phosphorus silicate glass.