IP Library Granted Patent US 9,000,416
Granted Patent B2
US 9,000,416 · App. 13/744,011 · Granted Apr 7, 2015

Nanoparticle synthesis

Inventors: Silvija Gradecak (Cambridge, MA); Chun-Hao Tseng (Taichung, TW); Sung Keun Lim (Revere, MA)
Assignee: Massachusetts Institute of Technology
H01L29/66977B22F1/0018B22F9/24B82Y30/00C30B7/14C30B29/02C30B29/605B22F2999/00Y10S977/815Y10S977/893
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 9,000,416
App. No.
13/744,011
Granted
Apr 7, 2015
Kind
B2
Abstract

A noble metal nanoparticle can be grown on a semiconductor substrate by contacting a predetermined region of the substrate with a solution including noble metal ions. The predetermined region of the semiconductor substrate can be exposed by applying a polymeric layer over the substrate selectively removing a portion of the polymeric layer. The nanoparticles can be prepared in a predetermined pattern. The nanoparticle can be formed with a barrier separating it from another nanoparticle on the substrate; for example, nanoparticle can be located in a pit etched in the substrate. The size and location of the nanoparticle can be stable at elevated temperatures.

Claims (15)

1. A composition comprising:

a noble metal nanoparticle positioned on a predetermined region of a semiconductor substrate, the noble metal nanoparticle being separated from another nanoparticle on the substrate by a barrier, wherein the barrier is a portion of the semiconductor substrate that is raised relative to the region of the semiconductor substrate upon which the nanoparticle is positioned.

2. The composition of claim 1 , wherein the barrier includes a polymeric material.

3. The composition of claim 1 , wherein the barrier is raised relative to the region of the substrate upon which the nanoparticle is positioned.

4. The composition of claim 1 , wherein the substrate is GaAs.

5. The composition of claim 2 , wherein the polymeric material is PMMA.

6. The composition of claim 1 , wherein the nanoparticle is a nanocrystal.

7. The composition of claim 1 , wherein the noble metal is Au.

8. The composition of claim 1 , wherein the nanoparticle has a diameter of 25 nm or smaller, or 10 nm or smaller.

9. A nanomaterial comprising:

a noble metal nanocrystal; and

an amorphous layer comprising an oxide at least partially surrounding the nanoparticle.

10. The nanomaterial of claim 9 , wherein the noble metal is Au.

11. The nanomaterial of claim 9 , wherein the average diameter of the nanocrystal is 25 nm or smaller, or 10 nm or smaller.

12. The nanomaterial of claim 9 , wherein the oxide is derived from the semiconductor material.

Assignments (2)
CONFIRMATORY LICENSE Recorded May 26, 2015
From: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 035762/0249 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 12, 2013
From: GRADECAK, SILVIJA; TSENG, CHUN-HAO; LIM, SUNG KEUN
To: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Reel/Frame 030205/0180 →
Continuity (2)
Division 12511634 · Jul 29, 2009
Related Publication 20130140524A1 · Jun 6, 2013