Maintaining a wafer/wafer translator pair in an attached state free of a gasket disposed
View Patent ↗A wafer translator and a wafer, removably attached to each other, provides the electrical connection to electrical contacts on integrated circuits on a wafer in such a manner that the electrical contacts are substantially undamaged in the process of making such electrical connections. Various embodiments of the present invention provide a gasketless sealing means for facilitating the formation by vacuum attachment of the wafer/wafer translator pair. In this way, no gasket is required to be disposed between the wafer and the wafer translator. Air, or gas, is evacuated from between the wafer and wafer translator through one or more evacuation pathways in the gasketless sealing means.
1. An assembly, comprising:
a wafer translator having an inquiry-side, a wafer-side, and a peripheral sidewall;
a wafer having contact pads at a first side, a second side facing away from the first side, and a peripheral sidewall, the first side of the wafer facing the wafer-side of the wafer translator; and
a sheet of flexible material having a first portion disposed along the second side of the wafer, a second portion disposed along the peripheral sidewall of the wafer and the peripheral sidewall of the wafer translator, and a third portion disposed along the inquiry-side of the wafer translator;
wherein an enclosed space defined at least in part by the wafer, the wafer translator, and the sheet of flexible material is at a pressure that is lower than a pressure outside the enclosed space.
2. The assembly of claim 1 wherein the first portion of the flexible material is disposed along the entire second side of the wafer.
3. The assembly of claim 1 wherein the first portion of the flexible material includes a generally annular hole.
4. The assembly of claim 1 wherein the third portion of the flexible material is disposed only partially along the inquiry-side of the wafer translator.
5. The assembly of claim 1 wherein the wafer-side of the wafer translator is electrically connected with the contact pads at the first side of the wafer.
6. The assembly of claim 1 wherein the flexible material comprises a compliant material.
7. An assembly, comprising:
a wafer translator having an inquiry-side, a wafer-side, and a peripheral sidewall;
a wafer having contact pads at a first side, and a second side facing away from the first side, wherein the first side of the wafer faces the wafer-side of the wafer translator;
a first substantially circular flexible support structure having a first base portion and a first upper portion, the first upper portion circumferentially and continuously contacting the wafer-side of the wafer translator to form a first sealed contact;
a second substantially circular flexible support structure having a second base portion and a second upper portion, the second upper portion circumferentially and continuously contacting the second side of the wafer to form a second sealed contact; and
a ring having an inner diameter and having:
a first substantially circular groove positioned to receive the base portion of the first flexible support structure; and
a second substantially circular groove positioned to receive the base portion of the second flexible support structure,
wherein an evacuation pathway extends between the first and the second grooves and between the first and second flexible support structures.
8. The assembly of claim 7 wherein the first upper portion is bendable toward the peripheral sidewall of the wafer translator and the second upper portion is bendable toward a center of the wafer.
9. The assembly of claim 7 wherein the first flexible support structure and the second flexible support structure comprise rubber.
10. The assembly of claim 7 wherein a gas in a space between the first side of the wafer and the wafer-side of the wafer translator is at a lower pressure than a gas outside of the space.
11. The assembly of claim 7 , further comprising a valve having an open state and a closed state and being positioned in a fluid communication between an environment external to the assembly and the space between the first side of the wafer and the wafer-side of the wafer translator.
12. The assembly of claim 7 wherein the first groove is flanged.
13. An assembly, comprising:
a wafer translator having an inquiry-side, a wafer-side, and a peripheral sidewall;
a wafer having contact pads at a first side, and a second side facing away from the first side, wherein the first side of the wafer faces the wafer-side of the wafer translator;
a first substantially circular flexible support structure having a first base portion and a first upper portion, the first upper portion circumferentially and continuously contacting the wafer-side of the wafer translator to form a first sealed contact;
a second substantially circular flexible support structure having a second base portion and a second upper portion, the second upper portion circumferentially and continuously contacting the second side of the wafer to form a second sealed contact; and
a ring having an inner diameter and having:
a substantially circular groove positioned to receive the base portions of the first and the second flexible support structures,
wherein an evacuation pathway extends through the substantially circular groove and between the first and second flexible support structures.
14. The assembly of claim 13 wherein:
a space between the first side of the wafer and the wafer-side of the wafer translator is at a pressure lower than a pressure outside of the space; and
the wafer-side of the wafer translator and the contact pads at the first side of the wafer are in an electrical contact.