3D memory
Three-dimensional memory cells and methods of making and using the memory cells are discussed generally herein. In one or more embodiments, a three-dimensional vertical memory can include a memory stack. Such a memory stack can include memory cells and a dielectric between adjacent memory cells, each memory cell including a control gate and a charge storage structure. The memory cell can further include a barrier material between the charge storage structure and the control gate, the charge storage structure and the barrier material having a substantially equal dimension.
1. A vertical memory comprising:
a stack of memory cells, a cell of the stack comprising:
a control gate;
a charge storage structure having a dimension;
a barrier film between the charge storage structure and the control gate, wherein the barrier film has a dimension corresponding to the dimension of the charge storage structure, and wherein the dimension of the charge storage structure is substantially equal to or greater than the dimension of the barrier film;
a first dielectric between the barrier film and the charge storage structure at a first side of the barrier film; and
a second dielectric between the barrier film and the control gate at a second side of the barrier film opposite the first side of the barrier film.
2. The memory of claim 1 , wherein the barrier film has a face and the charge storage structure has a face opposing the face of the barrier film and substantially parallel to the face of the barrier film, wherein each part of the face of the barrier film is separated from the face of the charge storage structure by a substantially equal distance.
3. The memory of claim 1 , wherein the charge storage structure has a substantially planar side facing the barrier film, the control gate has a substantially planar side facing the barrier film, and the barrier film has a first substantially planar side facing and substantially parallel to the substantially planar side of the charge storage structure and a second substantially planar side facing and substantially parallel to the substantially planar side of the control gate.
4. The memory of claim 1 , wherein the dimension of the charge storage structure substantially equal to or greater than the dimension of the barrier film comprises the dimension of the charge storage structure being substantially equal to the dimension of the barrier film.
5. The memory of claim 1 , further comprising a pillar adjacent to the charge storage structure and wherein a dielectric is between the pillar and the charge storage structure.
6. The memory of claim 5 , wherein the pillar comprises polysilicon, the charge storage structure comprises polysilicon, the dielectric comprises oxide, and the barrier film comprises nitride.
7. The memory of claim 1 , wherein the stack of memory cells comprises a NAND string of memory cells.
8. The memory of claim 1 , wherein the barrier film is entirely between a plane corresponding to a side of the charge storage structure and a plane corresponding to a side of the control gate opposing the side of the charge storage structure.
9. The memory of claim 1 , wherein the charge storage structure and the barrier film are formed in a control gate recess adjacent to the control gate.
10. A vertical stack of memory cells comprising a vertical pillar, wherein a cell of the stack comprises:
a charge storage structure adjacent to the pillar along a dimension;
a first dielectric and a barrier film adjacent to the charge storage structure along the dimension, the first dielectric between the charge storage structure and the pillar;
a control gate adjacent to the dielectric and barrier film along the dimension, wherein the barrier film of the memory cell has a substantially uniform thickness across the entire dimension;
a second dielectric between the barrier film and the charge storage structure at a first side of the barrier film; and
a third dielectric between the barrier film and the control gate at a second side of the barrier film opposite the first side of the barrier film.
11. The stack of claim 10 , wherein the charge storage structure is substantially rectangular.
12. The stack of claim 10 , wherein the control gate comprises doped polysilicon.
13. The stack of claim 10 , wherein the pillar comprises polysilicon, the charge storage structure comprises polysilicon, the dielectric comprises oxide, and the barrier film comprises nitride.
14. The stack of claim 10 , wherein the stack comprises a NAND string of memory cells.
15. The stack of claim 10 , wherein the dielectric surrounds the charge storage structure and the barrier film.
16. The stack of claim 10 , wherein the charge storage structure and the barrier film are formed in a control gate recess.
17. A vertical stack of memory cells, wherein a cell of the stack comprises:
a charge storage structure having a dimension;
a control gate having a dimension corresponding to the dimension of the charge storage structure, wherein the dimension of the control gate and the corresponding dimension of the charge storage structure are substantially equal;
a barrier film between the charge storage structure and the control gate;
a first dielectric between the barrier film and the charge storage structure at a first side of the barrier film; and
a second dielectric between the barrier film and the control gate at a second side of the barrier film opposite the first side of the barrier film.
18. The stack of claim 17 , wherein the cell further comprises a dielectric and a barrier film, wherein the dielectric and the barrier film are between the charge storage structure and the control gate, wherein the dimension of the control gate is substantially equal to a corresponding dimension of the barrier film.
19. The stack of claim 18 , wherein the barrier film is substantially rectangular.
20. The stack of claim 19 , wherein, in a vertical cross-section of the memory cell, a surface area of the barrier film of the cell is less than a surface area of the charge storage structure of the cell.
21. The stack of claim 18 , wherein the charge storage structure comprises polysilicon, the control gate comprises polysilicon, and the barrier film comprises nitride.
22. The stack of claim 18 , wherein the dielectric is between the charge storage structure and the barrier film, and the dielectric is between the control gate and the barrier film.
23. The stack of claim 18 , wherein the dielectric surrounds the charge storage structure and the barrier film.
24. The stack of claim 18 , wherein the charge storage structure and the barrier film are formed, at least partially, in a control gate recess adjacent to the control gate and between tier dielectric layers that separate the cell from adjacent cells of the stack.
25. A vertical memory array comprising:
a plurality of vertical memory strings, wherein a string of the plurality comprises:
a vertical pillar; and
at least two tier dielectric layers; and
a memory cell between two adjacent tier dielectric layers of the at least two tier dielectric layers comprising:
a charge storage structure having a dimension;
a control gate;
a dielectric layer between the charge storage structure and the vertical pillar;
a barrier film between the charge storage structure and the control gate, the barrier film having a dimension corresponding to the dimension of the charge storage structure, the dimension of the barrier film and the dimension of the charge storage structure being substantially equal;
a first dielectric between the barrier film and the charge storage structure at a first side of the barrier film; and
a second dielectric between the barrier film and the control gate at a second side of the barrier film opposite the first side of the barrier film.
26. The memory array of claim 25 , wherein the barrier film has a face and the charge storage structure has a face opposing the face of the barrier film and substantially parallel to the face of the barrier film, wherein each part of the face of the barrier film is separated from the face of the charge storage structure by a substantially equal distance.
27. The memory array of claim 25 , wherein the charge storage structure has a planar side facing the barrier film, the control gate has a planar side facing the barrier film, and the barrier film has a first planar side facing and substantially parallel to the planar side of the charge storage structure and a second planar side facing and substantially parallel to the planar side of the control gate.
28. The memory array of claim 25 , wherein the control gate has a dimension corresponding to the dimension of the charge storage structure and the dimension of the control gate is substantially equal to the dimension of the charge storage structure.
29. The memory array of claim 25 , wherein the pillar comprises polysilicon, the charge storage structure comprises polysilicon, the control gate comprises polysilicon, and the barrier film comprises nitride.
30. The memory array of claim 25 , wherein the memory strings are NAND memory strings.
31. The memory array of claim 25 , wherein the control gate has a dimension corresponding to the dimension of the charge storage structure and wherein the dimension of the control gate is greater than the corresponding dimension of the charge storage structure.
32. The memory array of claim 25 , wherein the charge storage structure and the barrier film are formed in a control gate recess between the adjacent tier dielectric layers and adjacent to the control gate.